Carrier head and substrate polishing apparatus including the same

Abstract

Provided are carrier heads that include a carrier body; and a retainer ring coupled to the carrier body. A weight adjusting groove recessed into the retainer ring by a predetermined depth is disposed at an upper surface of the retainer ring.

What is claimed is: 
     
         1 . A substrate carrier head comprising:
 a carrier body; and   a retainer ring coupled to the carrier body,   wherein the retainer ring comprises a weight adjusting groove recessed into the retainer ring by a predetermined depth,   wherein the retainer ring has an upper surface facing the carrier body, and   wherein the weight adjusting groove is disposed at the upper surface of the retainer ring.   
     
     
         2 . The substrate carrier head of  claim 1 , wherein the weight adjusting groove is one of a plurality of weight adjusting grooves, wherein the plurality of weight adjusting grooves are spaced apart from each other along a circumferential direction of the retainer ring. 
     
     
         3 . The substrate carrier head of  claim 2 ,
 wherein a fastening groove recessed downward into the retainer ring by a predetermined depth is disposed at the upper surface of the retainer ring, and   wherein the carrier head further includes a fastening member that protrudes downward from the carrier body toward the upper surface of the retainer ring, the fastening member being configured to be inserted into the fastening groove.   
     
     
         4 . The substrate carrier head of  claim 3 , wherein the fastening groove is one of a plurality of fastening grooves, wherein each of the fastening grooves is spaced apart from each other of the fastening grooves along the circumferential direction of the carrier head. 
     
     
         5 . The substrate carrier head of  claim 4 , wherein at least one of the plurality of weight adjusting grooves is disposed between adjacent fastening grooves of the plurality of fastening grooves. 
     
     
         6 . The substrate carrier head of  claim 2 , wherein the plurality of weight adjusting grooves comprises:
 an inner weight adjusting groove disposed at an inner region of the upper surface of the retainer ring along a radial direction; and   an outer weight adjusting groove disposed at an outer region of the upper surface of the retainer ring along the radial direction.   
     
     
         7 . The substrate carrier head of  claim 1 , wherein the weight adjusting groove has an arc shape with a predetermined length along a circumferential direction. 
     
     
         8 . The substrate carrier head of  claim 7 , wherein the weight adjusting groove is one of a plurality of weight adjusting grooves, wherein each weight adjusting groove of the plurality of weight adjusting grooves has a length corresponding to each other weight adjusting groove. 
     
     
         9 . The substrate carrier head of  claim 7 , wherein the weight adjusting groove is one of a plurality of weight adjusting grooves, wherein at least one of the weight adjusting grooves has a length that is different from at least one other of the plurality of weight adjusting grooves. 
     
     
         10 . The substrate carrier head of  claim 1 , wherein the weight adjusting groove has a ring shape. 
     
     
         11 . The substrate carrier head of  claim 10 , wherein the weight adjusting groove is one of a plurality of weight adjusting grooves comprising:
 an inner weight adjusting groove disposed at an inner region of the upper surface of the retainer ring along a radial direction; and   an outer weight adjusting groove disposed at an outer region of the upper surface of the retainer ring along the radial direction.   
     
     
         12 . The substrate carrier head of  claim 1 , further comprising a seal ring disposed between the retainer ring and the carrier body. 
     
     
         13 . The substrate carrier head of  claim 12 , wherein the seal ring comprises:
 an inner seal ring disposed at a region between the weight adjusting groove and an upper end portion of an inner surface of the retainer ring; and   an outer seal ring disposed at a region between the weight adjusting groove and an upper end portion of an outer surface of the retainer ring.   
     
     
         14 . The substrate carrier head of  claim 1 , further comprising a supplementary member disposed inside the weight adjusting groove. 
     
     
         15 . The substrate carrier head of  claim 1 , wherein the retainer ring comprises an upper ring disposed at an upper region of the retainer ring and a lower ring disposed at a lower region of the retainer ring, wherein the weight adjusting groove is disposed only at the upper ring. 
     
     
         16 . A substrate carrier head comprising:
 a carrier body;   a retainer ring coupled to the carrier body;   a fastening member that protrudes from the carrier body toward the retainer ring, which fastening member is configured to fit into a fastening groove of the retainer ring; and   a seal ring disposed between the retainer ring and the carrier body,   wherein the retainer ring has an upper surface facing the carrier body, and   wherein the fastening groove recessed into the retainer ring by a predetermined depth and a weight adjusting groove recessed into the retainer ring by a predetermined depth are disposed at the upper surface of the retainer ring.   
     
     
         17 . The substrate carrier head of  claim 16 , wherein the weight adjusting groove is one of a plurality of weight adjusting grooves, wherein the plurality of weight adjusting grooves are spaced apart from each other along a circumferential direction of the retainer ring. 
     
     
         18 . The substrate carrier head of  claim 16 , wherein the weight adjusting groove has a ring shape. 
     
     
         19 . The substrate carrier head of  claim 18 , wherein the weight adjusting groove is one of a plurality of weight adjusting grooves, wherein the plurality of weight adjusting grooves comprising
 an inner weight adjusting groove disposed at an inner region of the upper surface of the retainer ring along a radial direction; and   an outer weight adjusting groove disposed at an outer region of the upper surface of the retainer ring along the radial direction,   wherein the fastening groove is disposed between the inner weight adjusting groove and the outer weight adjusting groove.   
     
     
         20 . A substrate polishing apparatus, comprising:
 a platen; and   a substrate carrier head disposed adjacent to the platen,   wherein the substrate carrier head comprises
 a carrier body, 
 a retainer ring coupled to the carrier body, 
 a fastening member that protrudes from the carrier body toward the retainer ring, which fastening member is configured to fit into a fastening groove of the retainer ring, 
 an inner seal ring disposed between the retainer ring and the carrier body at a region between a weight adjusting groove and an upper end portion of an inner surface of the retainer ring, and 
 an outer seal ring disposed between the retainer ring and the carrier body at a region between the weight adjusting groove and an upper end portion of an outer surface of the retainer ring, 
 wherein the retainer ring has an upper surface facing the carrier body, and 
 wherein the fastening groove recessed into the retainer ring by a predetermined depth and the weight adjusting groove recessed into the retainer ring by a predetermined depth, are disposed at the upper surface of the retainer ring, and 
 wherein the fastening member is inserted into the fastening groove.