Imaging element and electronic device
Abstract
The present technique relates to an imaging element and an electronic device that can extend a dynamic range. The imaging element includes: a first photoelectric conversion unit that is provided in a semiconductor substrate and generates a charge corresponding to the amount of light; a second photoelectric conversion unit having a smaller light-receiving area than the first photoelectric conversion unit; a first inter-pixel isolation portion that surrounds a unit pixel including the first photoelectric conversion unit and the second photoelectric conversion unit; and a second inter-pixel isolation portion provided between the first photoelectric conversion unit and the second photoelectric conversion unit, wherein the first inter-pixel isolation portion and the second inter-pixel isolation portion are each configured with a trench penetrating the semiconductor substrate. The present technique can be applied to an imaging element including a large pixel and a small pixel.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . An imaging element, comprising: a first photoelectric conversion unit that is provided in a semiconductor substrate and generates a charge corresponding to an amount of light;
a second photoelectric conversion unit having a smaller light-receiving area than the first photoelectric conversion unit; a first inter-pixel isolation portion that surrounds a unit pixel including the first photoelectric conversion unit and the second photoelectric conversion unit; and a second inter-pixel isolation portion provided between the first photoelectric conversion unit and the second photoelectric conversion unit, wherein the first inter-pixel isolation portion and the second inter-pixel isolation portion are each configured with a trench penetrating the semiconductor substrate.
2 . The imaging element according to claim 1 , wherein the trench is filled with an insulator.
3 . The imaging element according to claim 1 , wherein one or more transistors and a contact are disposed in a region where the second photoelectric conversion unit is formed in plan view.
4 . The imaging element according to claim 1 , wherein a capacitor is connected to the second photoelectric conversion unit.
5 . The imaging element according to claim 1 , wherein the unit pixel further includes an element isolation region that separates elements, and
the element isolation region is configured with a trench not penetrating the semiconductor substrate.
6 . The imaging element according to claim 1 , wherein the first photoelectric conversion unit is L-shaped in plan view,
the second photoelectric conversion unit is square-shaped, and a combination of the first photoelectric conversion unit and the second photoelectric conversion unit is square-shaped.
7 . The imaging element according to claim 1 , wherein two sides of a gate of at least one of a plurality of transistors constituting the unit pixel are located on the first inter-pixel isolation portion and the second inter-pixel isolation portion in plan view.
8 . The imaging element according to claim 1 , wherein two sides of a gate of an amplification transistor are located on the first inter-pixel isolation portion and the second inter-pixel isolation portion in plan view.
9 . The imaging element according to claim 8 , wherein the two sides are parallel to a line connecting a source and a drain of the amplification transistor.
10 . The imaging element according to claim 1 , further comprising a first lens disposed on the first photoelectric conversion unit; and
a second lens disposed on the second photoelectric conversion unit, wherein the first lens and the second lens are identical in size.
11 . The imaging element according to claim 1 , further comprising a first lens disposed on the first photoelectric conversion unit; and
a second lens disposed on the second photoelectric conversion unit, wherein the first lens and the second lens have different sizes.
12 . The imaging element according to claim 11 , wherein the first lens and the second lens that are disposed in the unit pixel are placed in contact with each other, and
the second lens disposed in a first unit pixel and the first lens disposed in a second unit pixel adjacent to the first unit pixel are not placed in contact with each other.
13 . The imaging element according to claim 12 , wherein the first lens in contact with the second lens is oval.
14 . The imaging element according to claim 11 , wherein the plurality of square-shaped first lenses are disposed on the first photoelectric conversion unit.
15 . The imaging element according to claim 11 , wherein the second lens disposed in a first unit pixel is placed in contact with the first lens disposed in the first unit pixel and the first lens disposed in a second unit pixel adjacent to the first unit pixel.
16 . The imaging element according to claim 11 , wherein the first lens has a different size for each color of a placed color filter.
17 . The imaging element according to claim 1 , wherein a light shielding film provided on the second inter-pixel isolation portion is located at a position shifted toward the second photoelectric conversion unit.
18 . The imaging element according to claim 1 , wherein the trench of each of the first inter-pixel isolation portion and the second inter-pixel isolation portion includes a fixed charge film therein, and
each of the first photoelectric conversion unit and the second photoelectric conversion unit has an n-type impurity region in contact with the trench.
19 . An electronic device, comprising an imaging element and a processing unit that processes a signal from the imaging element, the imaging element including: a first photoelectric conversion unit that is provided in a semiconductor substrate and generates a charge corresponding to an amount of light;
a second photoelectric conversion unit having a smaller light-receiving area than the first photoelectric conversion unit; a first inter-pixel isolation portion that surrounds a unit pixel including the first photoelectric conversion unit and the second photoelectric conversion unit; and a second inter-pixel isolation portion provided between the first photoelectric conversion unit and the second photoelectric conversion unit, wherein the first inter-pixel isolation portion and the second inter-pixel isolation portion are each configured with a trench penetrating the semiconductor substrate.Join the waitlist — get patent alerts
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