Inspecting unit

Abstract

An inspecting unit for use in a laser processing apparatus includes a camera configured to image a spot of a laser beam, and a processing unit configured to generate a light intensity at two-dimensional X-Y coordinates corresponding to a two-dimensional image imaged by the camera. The processing unit includes a determining unit configured to generate a three-dimensional approximate curve or an approximate curved surface such that the light intensity corresponding to the two-dimensional coordinates is set as a Z-coordinate, and determine that there is dirt, a flaw, or an abnormality in an optical system on an optical path on the laser oscillator side of a position at which the spot is imaged when a difference between the first light intensity of the Z-coordinate corresponding to the two-dimensional coordinates and a second light intensity indicated by the approximate curve or the approximate curved surface exceeds an allowable value.

What is claimed is: 
     
         1 . An inspecting unit for use in a laser processing apparatus, the laser processing apparatus including a laser oscillator configured to emit a laser beam and an optical system including a condenser configured to guide and condense the laser beam emitted by the laser oscillator, the inspecting unit comprising:
 a camera configured to image a spot of the laser beam; and   a processing unit configured to generate a light intensity at two-dimensional coordinates of an X-coordinate and a Y-coordinate corresponding to a two-dimensional image imaged by the camera,   the processing unit including a determining unit configured to generate a three-dimensional approximate curve or an approximate curved surface such that the light intensity corresponding to the two-dimensional coordinates is set as a Z-coordinate, and determine that there is a dirt, a flaw, or an abnormality in the optical system on an optical path on the laser oscillator side of a position at which the spot is imaged, when a difference between the light intensity of the Z-coordinate corresponding to the two-dimensional coordinates and a light intensity indicated by the approximate curve or the approximate curved surface exceeds an allowable value.   
     
     
         2 . The inspecting unit according to  claim 1 , further comprising:
 a display unit configured to display the two-dimensional image processed by the processing unit, wherein the approximate curve or the approximate curved surface is two-dimensionally displayed on the display unit.   
     
     
         3 . The inspecting unit according to  claim 2 , wherein the two-dimensional coordinates are rotated, and the approximate curve or the approximate curved surface is two-dimensionally displayed.