Computer device and method for examining a capacitive sensor

Abstract

A computer device for a capacitive sensor. The computer device includes an electronic device, wherein the electronic device is designed and/or programmed in such a way that, by means of the electronic device and taking into account at least one first measured variable which is determined or provided when a sensor mass is in its initial position or initial oscillation and relates to a first capacitance between a first electrode and the sensor mass, at least one evaluation variable relating to a spacing of the sensor mass to the first electrode and/or the second electrode and/or relating to a property of the sensor mass and/or the at least one spring component can be defined as at least part of the evaluation information.

What is claimed is: 
     
         1 . A computer device for a capacitive sensor, comprising:
 an electronic device configured in such a way that the electronic device can be used to define evaluation information taking into account at least one measured variable, which is determined by the computer device or is provided to the computer device and relates to a respective capacitance between: (i) at least one first electrode and/or second electrode of the capacitive sensor fastened to and/or in a holder of the capacitive sensor and (ii) a sensor mass of the capacitive sensor which is adjustably connected to and/or in the holder by at least one spring component of the capacitive sensor in such a way that the sensor mass can be moved using a physical force external to the sensor and/or using a non-zero voltage applied: (a) between the first electrode and the sensor mass and/or (b) between the second electrode and the sensor mass from an initial position or initial oscillation of the sensor mass;   wherein the electronic device is configured in such a way that, using the electronic device and taking into account the at least one first measured variable which is determined or provided when the sensor mass is in its initial position or initial oscillation and relates to a first capacitance between the first electrode and the sensor mass, at least one evaluation variable can be defined as at least part of the evaluation information: (i) relating to a spacing of the sensor mass to the first electrode and/or the second electrode and/or (ii) relating to a property of the sensor mass and/or the at least one spring component.   
     
     
         2 . The computer device according to  claim 1 , wherein the electronic device is further configured in such a way that the electronic device can be used to define the at least one evaluation variable additionally taking into account at least one second measured variable which is determined or provided when the sensor mass is in its initial position or initial oscillation, and relates to a second capacitance between the second electrode and the sensor mass. 
     
     
         3 . The computer device according to  claim 1 , wherein the electronic device is further configured in such a way that the electronic device can be used to define, at the at least one evaluation variable: (i) at least a first actual distance between the sensor mass and the first electrode, and/or (ii) a second actual distance between the sensor mass and the second electrode, and/or (iii) a first actual deviation of the first actual distance between the sensor mass and the first electrode from a first target distance between the sensor mass and the first electrode, and/or (iv) a second actual deviation of the second actual distance between the sensor mass and the second electrode from a second target distance between the sensor mass and the second electrode, and/or (v) a mean value of the first actual distance and the second actual distance, and/or (vi) a deflection of the sensor mass from a centered spacing of the first electrode to the second electrode. 
     
     
         4 . The computer device according to  claim 1 , wherein the electronic device is further configured in such a way that the electronic device can be used to define, at the at least one evaluation variable: (i) at least one etching strength and/or (ii) a degree of etching of the sensor mass and/or (iii) the at least one spring component. 
     
     
         5 . The computer device according to  claim 1 , wherein the electronic device is configured in such a way that the electronic device can be used to define, as the at least one evaluation variable: (i) at least an average extent of the sensor mass along a spatial direction which extends from the first electrode to the second electrode, (ii) a maximum extent of the sensor mass along the spatial direction which extends from the first electrode to the second electrode, (iii) a volume of the sensor mass, and/or (iv) a weight of the sensor mass. 
     
     
         6 . The computer device according to  claim 1 , wherein the electronic device is further configured in such a way that the electronic device can be used to define, at the at least one evaluation variable, at least a respective volume of the at least one spring component, and/or a respective weight of the at least one spring component, and/or a respective spring constant of the at least one spring component, and/or (iv) a total spring constant of a spring-mass system including sensor mass and the at least one spring component. 
     
     
         7 . The computer device according to  claim 1 , wherein the electronic device is further configured in such a way that the electronic device can be used to define, at the at least one evaluation variable at least a natural frequency of spring-mass system including the sensor mass and the at least one spring component. 
     
     
         8 . The computer device according to  claim 1 , wherein the electronic device is further configured in such a way that the electronic device can be used to define, as the at least one evaluation parameter, at least one sensitivity of the capacitive sensor. 
     
     
         9 . The computer device according to  claim 1 , wherein the computer device is an ASIC. 
     
     
         10 . A capacitive sensor comprising:
 a computer device including:
 an electronic device configured in such a way that the electronic device can be used to define evaluation information taking into account at least one measured variable, which is determined by the computer device or is provided to the computer device and relates to a respective capacitance between: (i) at least one first electrode and/or second electrode of the capacitive sensor fastened to and/or in a holder of the capacitive sensor and (ii) a sensor mass of the capacitive sensor which is adjustably connected to and/or in the holder by at least one spring component of the capacitive sensor in such a way that the sensor mass can be moved using a physical force external to the sensor and/or using a non-zero voltage applied: (a) between the first electrode and the sensor mass and/or (b) between the second electrode and the sensor mass from an initial position or initial oscillation of the sensor mass, 
 wherein the electronic device is configured in such a way that, using the electronic device and taking into account the at least one first measured variable which is determined or provided when the sensor mass is in its initial position or initial oscillation and relates to a first capacitance between the first electrode and the sensor mass, at least one evaluation variable can be defined as at least part of the evaluation information: (i) relating to a spacing of the sensor mass to the first electrode and/or the second electrode and/or (ii) relating to a property of the sensor mass and/or the at least one spring component; 
   the holder;   at least the first electrode fastened to and/or in the holder; and   the sensor mass which is adjustably connected to and/or in the holder using the at least one spring component of the capacitive sensor in such a way that the sensor mass can be moved using the physical force external to the sensor and/or using the non-zero voltage applied: (i) between the first electrode and the sensor mass and/or (ii) between the second electrode of the capacitive sensor and the sensor mass from an initial position or initial oscillation of the sensor mass.   
     
     
         11 . The capacitive sensor according to  claim 10 , wherein the capacitive sensor is an acceleration sensor or a capacitive pressure sensor or a rotation rate sensor. 
     
     
         12 . A measuring cabinet for a production facility, comprising:
 a computer device including:
 an electronic device configured in such a way that the electronic device can be used to define evaluation information taking into account at least one measured variable, which is determined by the computer device or is provided to the computer device and relates to a respective capacitance between: (i) at least one first electrode and/or second electrode of the capacitive sensor fastened to and/or in a holder of the capacitive sensor and (ii) a sensor mass of the capacitive sensor which is adjustably connected to and/or in the holder by at least one spring component of the capacitive sensor in such a way that the sensor mass can be moved using a physical force external to the sensor and/or using a non-zero voltage applied: (a) between the first electrode and the sensor mass and/or (b) between the second electrode and the sensor mass from an initial position or initial oscillation of the sensor mass; 
 wherein the electronic device is configured in such a way that, using the electronic device and taking into account the at least one first measured variable which is determined or provided when the sensor mass is in its initial position or initial oscillation and relates to a first capacitance between the first electrode and the sensor mass, at least one evaluation variable can be defined as at least part of the evaluation information: (i) relating to a spacing of the sensor mass to the first electrode and/or the second electrode and/or (ii) relating to a property of the sensor mass and/or the at least one spring component. 
   
     
     
         13 . A method for examining a capacitive sensor, comprising:
 defining evaluation information taking into account at least one determined measured variable, which relates to a respective capacitance between: (i) at least one first electrode and/or second electrode of the capacitive sensor fastened to and/or in a holder of the capacitive sensor and (ii) a sensor mass of the capacitive sensor which is adjustably connected to and/or in the holder using at least one spring component of the capacitive sensor in such a way that the sensor mass can be moved: (i) by a physical force external to the sensor and/or (ii) by a non-zero voltage applied: (a) between the first electrode and the sensor mass and/or (b) between the second electrode and the sensor mass, from an initial position or initial oscillation of the sensor mass; and   taking into account at least one first measured variable which is determined when a sensor mass is in its initial position or initial oscillation and relates to a first capacitance between the first electrode and the sensor mass, at least one evaluation variable relating to: (i) a spacing of the sensor mass to the first electrode and/or the second electrode and/or (ii) with respect to a property of the sensor mass and/or the at least one spring component, is defined as at least part of the evaluation information.