Method for producing a coated object and coated object

Abstract

A method for producing a coated object, wherein the method comprises the steps of: A substrate is provided in a reaction chamber and an anti-wear layer is deposited on a surface of the substrate by physical vapor deposition, wherein a target is provided in the reaction chamber, which target contains at least a first transition metal Ma that is a transition metal from the fifth or sixth group of the periodic table, in order to produce an Ma2C phase in the anti-wear layer, and wherein the proportion of Ma of the Ma2C phase in the anti-wear layer is at least 60 atomic percent, based on the total quantity of transition metals in the anti-wear layer. Furthermore, a coated object is indicated.

1 . A method for producing a coated object, wherein the method comprises the steps of:
 providing a substrate in a reaction chamber, and   depositing an anti-wear layer on a surface of the substrate by means of physical vapor deposition, wherein a target is provided in the reaction chamber, which target contains at least a first transition metal Ma, which is a transition metal from the fifth or sixth group of the periodic table, to produce a Ma 2 C phase in the anti-wear layer, and wherein the proportion of Ma of the Ma 2 C phase in the anti-wear layer is at least 60 atomic percent, relative to the total quantity of transition metals in the anti-wear layer.   
     
     
         2 . The method according to  claim 1 , wherein Ma is selected from the group consisting of vanadium, niobium, tungsten, molybdenum, and combinations thereof. 
     
     
         3 . The method according to  claim 1 , wherein the anti-wear layer ( 16 ) is applied by means of magnetron sputtering. 
     
     
         4 . The method according to  claim 3 , wherein the anti-wear layer is applied by means of HIPIMS, wherein the target is supplied with power pulses and the substrate is supplied with voltage pulses, and wherein the power pulses and the voltage pulses are supplied with a time delay. 
     
     
         5 . The method according to  claim 1 , wherein in addition a graphite cathode is provided for supplying carbon in the reaction chamber when depositing the anti-wear layer ( 16 ). 
     
     
         6 . The method according to  claim 1 , wherein, for the supply of carbon, the reaction chamber is flushed with a reactive gas containing carbon during the deposition of the anti-wear layer. 
     
     
         7 . The method according to  claim 1 , wherein the reaction chamber is heated to a temperature in the range of 100 to 600° C. 
     
     
         8 . The method according to  claim 1 , wherein a pressure of 0.1 to 0.5 Pa is set in the reaction chamber. 
     
     
         9 . The method according to  claim 1 , wherein the target further comprises a nitride-forming second transition metal Mb to produce a nanocrystalline structure comprising a primary phase and a secondary phase upon deposition of the anti-wear layer, wherein the primary phase is the Ma 2 C phase and the secondary phase is a cubic nitride or carbonitride phase comprising the second transition metal Mb. 
     
     
         10 . The method according to  claim 9 , wherein the second transition metal Mb is selected from the group consisting of the transition metals of the fourth group of the periodic table, vanadium, chromium, iron and combinations thereof. 
     
     
         11 . The method according to  claim 9 , wherein, during the deposition of the anti-wear layer, the reaction chamber is flushed with a nitrogen-containing reactive gas to supply nitrogen. 
     
     
         12 . The method according to  claim 1 , wherein the anti-wear layer is the only coating applied to the substrate. 
     
     
         13 . The method according to  claim 1 , wherein a top layer of MaC, MbN and/or MbCN is applied to the anti-wear layer, wherein Ma and Mb denote the first transition metal and the second transition metal of the target, respectively. 
     
     
         14 . The method according to  claim 1 , wherein the anti-wear layer is applied to a thickness in the range from 1 to 10 μm. 
     
     
         15 . A coated object comprising a substrate and an anti-wear coating disposed on a surface of the substrate, wherein the anti-wear coating comprises a Ma 2 C phase, wherein Ma is a transition metal of the fifth or sixth group of the periodic table, and wherein the proportion of Ma in the anti-wear layer is at least 50 atomic percent, based on the total quantity of transition metals in the anti-wear layer. 
     
     
         16 . The coated object according to  claim 15 , wherein the anti-wear layer has a plastic hardness of at least 30 GPa. 
     
     
         17 . The coated object according to  claim 15 , wherein the intrinsic compressive voltage of the anti-wear layer is 4.5 GPa or less.