Electroplating fluid disturbance device and operating method thereof and electroplating tank device

Abstract

An electroplating fluid disturbance device includes a first supporting plate, a linking member, a spout and a pivoting member. The first supporting plate has a pivoting portion. A first portion of the linking member is close to the pivoting portion of the first supporting plate. The spout is located on the linking member. The spout has a nozzle. The nozzle is configured to be immersed in the electroplating fluid. One end of the pivoting member is pivoted to the pivoting portion of the first supporting plate. The other end of the pivoting member connects to the spout and the first portion of the linking member. When the first portion of the linking member moves, the pivoting member rotates relative to the pivoting portion and the spout moves along with the first portion of the linking member, so that the nozzle of the spout rotates to disturb the electroplating fluid.

What is claimed is: 
     
         1 . An electroplating fluid disturbance device, comprising
 a first supporting plate, which is provided with at least a pivoting portion, wherein the pivoting portion is fixed on the first supporting plate;   a linking member, which is provided with a first portion, wherein the first portion is close to the pivoting portion of the first supporting plate;   at least a spout, which is disposed on the linking member and is provided with at least a nozzle, wherein the nozzle is configured to be immersed in an electroplating fluid; and   at least a pivoting member, a first end of which is pivoted to the pivoting portion of the first supporting plate, and a second end opposite to the first end is connected to the spout and the first portion of the linking member, wherein when the first portion of the linking member moves, the pivoting member rotates relative to the pivoting portion, and the spout moves along with the first portion of the linking member, allowing the nozzle of the spout to disturb the electroplating fluid;   wherein the pivoting portion is disposed on a side of the spout away from the nozzle, and when the first portion of the linking member is driven, the pivoting member drives the second end to rotate against the first end, so that the nozzle on the spout swings back-and-forth in a fan shape.   
     
     
         2 . The electroplating fluid disturbance device according to  claim 1 , wherein the nozzle is provided with an initial spraying direction, the nozzle swings to allow the nozzle to have a first predetermined spraying direction, a first included angle between the initial spraying direction and the first predetermined spraying direction is smaller than 30 degrees, the nozzle swings to allow the nozzle to have a second predetermined spraying direction opposite to the first predetermined spraying direction, and a second included angle between the initial spraying direction and the second predetermined spraying direction is smaller than 30 degrees. 
     
     
         3 . The electroplating fluid disturbance device according to  claim 1 , wherein the linking member is provided with an initial position, as well as a first extreme position and a second extreme position opposite to two sides of the initial position, with that the time period in which the linking member moves from the initial position to the first extreme position, from the first extreme position to the second extreme position, and from the second extreme position back to the initial position, is between 3 seconds and 5 seconds. 
     
     
         4 . The electroplating fluid disturbance device according to  claim 1 , wherein the spout is provided with an opening, the opening is configured to draw in the electroplating fluid, the nozzle of the spout is configured to spray out the electroplating fluid, the spout is plural, and the nozzle is plural. 
     
     
         5 . The electroplating fluid disturbance device according to  claim 1 , wherein the number of the pivoting portion is equal to the number of the pivoting member. 
     
     
         6 . The electroplating fluid disturbance device according to  claim 1 , wherein the first supporting plate is provided with a first slide rail, and the first portion of the linking member is disposed in the first slide rail. 
     
     
         7 . The electroplating fluid disturbance device according to  claim 1 , further comprising a second supporting plate which is provided with a second slide rail, wherein the linking member is provided with a second portion and the second portion is disposed in the second slide rail, and the spout is disposed between the first portion and the second portion of the linking member. 
     
     
         8 . The electroplating fluid disturbance device according to  claim 1 , wherein the pivoting portion is plural, and the pivoting portion is arranged in a direction parallel to a direction along the length of the first portion of the linking member. 
     
     
         9 . An electroplating tank device, comprising
 the electroplating fluid disturbance device described in  claim 1 ; and   a push rod, which is extended into the electroplating fluid disturbance device, wherein the linking member is provided with a second portion and a third portion and the third portion is connected to one end of the push rod, and the third portion of the linking member is disposed between the first portion and the second portion of the linking member.   
     
     
         10 . The electroplating tank device according to  claim 9 , further comprising an actuating element, which is disposed outside the electroplating fluid disturbance device and is connected to the other end of the push rod. 
     
     
         11 . An operating method of the electroplating fluid disturbance device, comprising the steps of:
 a) immersing a nozzle of a spout in an electroplating fluid;   b) moving a first portion of a linking member, allowing a pivoting member to rotate relative to a pivoting portion of a first supporting plate, wherein the pivoting portion is fixed on the first supporting plate, a first end of the pivoting member is pivoted to the pivoting portion of the first supporting plate, a second end which is opposite to the first end is connected to the spout and the first portion of the linking member, and the first portion of the linking member is close to the pivoting portion of the first supporting plate; and   c) when the pivoting member rotates relative to the pivoting portion, the spout moving along with the first portion of the linking member, allowing the nozzle of the spout to swing to disturb the electroplating fluid, wherein the pivoting portion is disposed on a side of the spout away from the nozzle, and when the first portion of the linking member is drive, the pivoting member drives the second end to rotate against the first end, so that the nozzle on the spout, being immersed in the electroplating fluid, swings back-and-forth in a fan shape.   
     
     
         12 . The operating method of the electroplating fluid disturbance device according to  claim 11 , wherein, at least of the nozzle of the spout spraying out the electroplating fluid, wherein the electroplating fluid enters into at least of the spout from an opening of the spout. 
     
     
         13 . The operating method of the electroplating fluid disturbance device according to  claim 11 , wherein the spout moves along with the first portion of the linking member to allow the nozzle to have an initial spraying direction; the nozzle swings to allow the nozzle to have a first predetermined spraying direction, a first included angle between the initial spraying direction and the first predetermined spraying direction is smaller than 30 degrees, the nozzle swings to allow the nozzle to have a second predetermined spraying direction opposite to the first predetermined spraying direction, and a second included angle between the initial spraying direction and the second predetermined spraying direction is smaller than 30 degrees. 
     
     
         14 . The operating method of the electroplating fluid disturbance device according to  claim 11 , wherein the nozzle moves along with the first portion of the linking member to allow the linking member to have an initial position as well as a first extreme position and a second extreme position opposite to the initial position, and the time period in which the linking member moves from the initial position to the first extreme position, from the first extreme position to the second extreme position, and from the second extreme position back to the initial position, is between 3 seconds and 5 seconds.