Cryopump system

Abstract

A cryopump system including a cryopump and a compressor configured to supply a high-pressure helium refrigerant to the cryopump includes a temperature measuring unit configured to measure a temperature of a second stage part among a first stage part and the second stage part of the cryopump, a monitoring unit configured to monitor whether the temperature of the second stage part reaches a predetermined second reference temperature, and a controller configured to incrementally increase an operating frequency of the compressor whenever the temperature of the second stage part reaches the predetermined second reference temperature.

We claim 
     
         1 . A cryopump system including a cryopump and a compressor configured to supply a high-pressure helium refrigerant to the cryopump, comprising:
 a temperature measuring unit configured to measure a temperature of a second stage part among a first stage part and the second stage part of the cryopump;   a monitoring unit configured to monitor whether the temperature of the second stage part reaches a predetermined second reference temperature; and   a controller configured to incrementally increase an operating frequency of the compressor whenever the temperature of the second stage part reaches the predetermined second reference temperature.   
     
     
         2 . The cryopump system of  claim 1 ,
 wherein an initial operating frequency of the compressor is from 40 Hz to 45 Hz, and   wherein the controller is configured to increase the operating frequency of the compressor to a range of 50 Hz and 60 Hz.   
     
     
         3 . The cryopump system of  claim 1 ,
 wherein the controller is configured to increase the operating frequency of the compressor by an increment of 5 Hz to 10 Hz whenever the temperature of the second stage part reaches the predetermined second reference temperature.   
     
     
         4 . The cryopump system of  claim 1 ,
 wherein the predetermined second reference temperature is in a range of 17K to 20K.   
     
     
         5 . The cryopump system of  claim 1 ,
 wherein the controller is configured to perform a regeneration process after exceeding the predetermined second reference temperature while the compressor operates at an operating frequency of 60 Hz.