Anode titanium basket and continuous electroplating apparatus including the same

Abstract

An anode titanium basket and a continuous electroplating apparatus including the same are provided. The continuous electroplating apparatus includes an electroplating tank, an anode titanium basket, a rotating conductive roller set, and a power supply. The electroplating tank has an electroplating solution accommodation space. The anode titanium basket is disposed in the electroplating solution accommodation space and includes an accommodation space and a channel. The accommodation space consists of a first surface, a second surface, and a side surface. The channel includes a first channel opening penetrating through the first surface and a second channel opening corresponding to the first channel opening and penetrating through the second surface. The rotating conductive roller set corresponds to the first channel opening and the second channel opening. The power supply is disposed outside the electroplating tank and is electrically connected to the rotating conductive roller set and the anode titanium basket.

What is claimed is: 
     
         1 . A continuous electroplating apparatus, comprising:
 an electroplating tank having an outlet end, an inlet end, and an electroplating solution accommodation space located between the outlet end and the inlet end;   an anode titanium basket disposed in the electroplating solution accommodation space, wherein the anode titanium basket comprises:
 an accommodation space, wherein the accommodation space consists of a first surface, a second surface opposite to the first surface, and a side surface connecting the first surface and the second surface of the anode titanium basket; and 
 a channel comprising a first channel opening penetrating through the first surface and a second channel opening corresponding to the first channel opening and penetrating through the second surface; 
   a rotating conductive roller set disposed at the outlet end and the inlet end of the electroplating tank and corresponding to the first channel opening and the second channel opening of the channel; and   a power supply disposed outside the electroplating tank and electrically connected to the rotating conductive roller set and the anode titanium basket.   
     
     
         2 . The continuous electroplating apparatus as claimed in  claim 1 , further comprising:
 a spraying unit disposed in the electroplating solution accommodation space.   
     
     
         3 . The continuous electroplating apparatus as claimed in  claim 2 , wherein the spraying unit further comprises:
 a flow distribution plate disposed below the anode titanium basket, wherein a normal direction of the flow distribution plate is perpendicular to a normal direction of the anode titanium basket.   
     
     
         4 . The continuous electroplating apparatus as claimed in  claim 3 , wherein the flow distribution plate has a plurality of conical holes arranged in an array, each of the conical holes has an outlet port and an inlet port, and an area of the outlet port is smaller than an area of the inlet port. 
     
     
         5 . The continuous electroplating apparatus as claimed in  claim 3 , wherein the electroplating tank further comprises:
 a sub-tank; and   a main tank fluidly connected to the sub-tank,   wherein the flow distribution plate is disposed in the sub-tank.   
     
     
         6 . The continuous electroplating apparatus as claimed in  claim 5 , wherein
 the sub-tank further comprises:
 an inner tank; and 
 an outer tank, wherein the inner tank is disposed in the outer tank, and a height of the outer tank is greater than a height of the inner tank, 
   wherein an electroplating solution introduced through the spraying unit flows into the inner tank of the sub-tank through the flow distribution plate, overflows to the outer tank of the sub-tank, and flows back to the main tank.   
     
     
         7 . The continuous electroplating apparatus as claimed in  claim 1 , wherein the anode titanium basket comprises a plurality of the channels, and the plurality of the channels are distributed in the anode titanium basket at equal or unequal distances. 
     
     
         8 . The continuous electroplating apparatus as claimed in  claim 1 , wherein
 the channel further comprises:
 a connection opening penetrating through the side surface of the anode titanium basket and connecting the first channel opening and the second channel opening. 
   
     
     
         9 . The continuous electroplating apparatus as claimed in  claim 1 , wherein the anode titanium basket further comprises:
 a first portion having a first recess; and   a second portion having a second recess,   wherein the first recess and the second recess are combined to form the channel.   
     
     
         10 . An anode titanium basket, comprising:
 an accommodation space, wherein the accommodation space consists of a first surface, a second surface opposite to the first surface, and a side surface connecting the first surface and the second surface of the anode titanium basket; and   a channel comprising a first channel opening penetrating through the first surface and a second channel opening penetrating through the second surface, and the channel penetrating through the accommodation space.   
     
     
         11 . The anode titanium basket as claimed in  claim 10 , wherein the anode titanium basket comprises a plurality of the channels, and the plurality of the channels are distributed in the anode titanium basket at equal or unequal distances. 
     
     
         12 . The anode titanium basket as claimed in  claim 10 , wherein the first channel opening, the second channel opening, or a combination thereof comprises a circular opening. 
     
     
         13 . The anode titanium basket as claimed in  claim 12 , wherein a diameter of the circular opening is 3 to 5 times a diameter of an electroplated object passing through the circular opening. 
     
     
         14 . The anode titanium basket as claimed in  claim 10 , further comprising:
 a first portion having a first recess; and   a second portion having a second recess,   wherein the first recess and the second recess are combined to form the channel.   
     
     
         15 . The anode titanium basket as claimed in  claim 10 , wherein
 the channel further comprises:
 a connection opening penetrating through the side surface of the anode titanium basket and connecting the first channel opening and the second channel opening. 
   
     
     
         16 . The anode titanium basket as claimed in  claim 10 , wherein the anode titanium basket is provided as a plurality of the anode titanium baskets, and the plurality of the anode titanium baskets comprise the same channels. 
     
     
         17 . The anode titanium basket as claimed in  claim 16 , wherein the plurality of the anode titanium baskets comprises a first anode titanium basket and a second anode titanium basket,
 the first channel opening and the second channel opening of the channel of the first anode titanium basket are circular openings that are not connected to each other, and   the first channel opening and the second channel opening of the channel of the second anode titanium basket are circular openings connected to each other by a connection opening penetrating through the side surface of the second anode titanium basket.   
     
     
         18 . The anode titanium basket as claimed in  claim 17 , wherein the plurality of the anode titanium baskets further comprises a third anode titanium basket,
 the first channel opening and the second channel opening of the channel of the third anode titanium basket are circular openings connected to each other by a connection opening penetrating through the side surface of the third anode titanium basket,   the first anode titanium basket is disposed between the second anode titanium basket and the third anode titanium basket, and   the connection opening of the second anode titanium basket and the connection opening of the third anode titanium basket in the same opening direction.   
     
     
         19 . The anode titanium basket as claimed in  claim 16 , wherein the plurality of the anode titanium baskets comprise a first anode titanium basket and a second anode titanium basket,
 the first channel opening and the second channel opening of the channel of the first anode titanium basket are circular openings connected to each other by a connection opening penetrating through the side surface of the first anode titanium basket,   the first channel opening and the second channel opening of the channel of the second anode titanium basket are circular openings connected to each other by a connection opening penetrating through the side surface of the second anode titanium basket, and   the connection opening of the first anode titanium basket and the connection opening of the second anode titanium basket have different opening directions.   
     
     
         20 . The anode titanium basket as claimed in  claim 19 , wherein the plurality of the anode titanium baskets further comprises a third anode titanium basket,
 the first channel opening and the second channel opening of the channel of the third anode titanium basket are circular openings connected to each other by a connection opening penetrating through the side surface of  5  the third anode titanium basket,   the first anode titanium basket is disposed between the second anode titanium basket and the third anode titanium basket, and   the connection opening of the second anode titanium basket and the connection opening of the third anode titanium basket have in same opening direction.