Cmp conditioning disk, and method and device for manufacturing cmp conditioning disk

Abstract

A CMP conditioning disk manufacturing device includes: a diamond jig providing a jig pocket in which a diamond is seated; a suction unit configured to selectively apply suction force to the jig pocket; and a moving unit that fixes the diamond seated in the jig pocket to a shank base. The suction unit provides the jig pocket with a suction force when the diamond is seated in the jig pocket, and removes the suction force when the diamond is fixed to the shank base.

1 . A CMP conditioning disk manufacturing device comprising:
 a diamond jig providing a jig pocket in which a diamond is seated;   a suction unit configured to selectively apply suction force to the jig pocket; and   a moving unit that fixes the diamond seated in the jig pocket to a shank base.   
     
     
         2 . The CMP conditioning disk manufacturing device of  claim 1 , further comprising:
 a vibration unit that vibrates the diamond jig to guide the diamond to the jig pocket when the suction unit applies suction force to the jig pocket.   
     
     
         3 . The CMP conditioning disk manufacturing device of  claim 1 , wherein the moving unit includes:
 a jig rotating unit that turns over the diamond jig so that the diamond faces downward; and   a jig moving unit that moves the diamond jig away from or closer to the shank base.   
     
     
         4 . The CMP conditioning disk manufacturing device of  claim 1 , wherein the jig pocket includes:
 a jig groove portion with an upper edge for supporting at least a lower portion of the diamond; and   a jig channel formed on a lower side of the jig groove portion so that the suction force is transmitted to the jig groove portion.   
     
     
         5 . The CMP conditioning disk manufacturing device of  claim 4 , wherein the jig pocket is provided in plurality, and
 the jig groove portion includes:   a first symmetrical inclined surface extending in one direction from a lowermost end toward a surface of the diamond jig; and   a second symmetrical inclined surface extending in another direction from the lowermost end of the jig groove portion toward the surface of the diamond jig to be symmetrical to the first symmetrical inclined surface with respect to an imaginary line extending in a direction perpendicular to a surface of the jig pocket.   
     
     
         6 . The CMP conditioning disk manufacturing device of  claim 4 , wherein the jig pocket is provided in plurality, and
 the jig groove portion includes:   a first asymmetrical inclined surface extending in one direction from a lowermost end toward a surface of the diamond jig; and   a second asymmetrical inclined surface extending in another direction from the lowermost end of the jig groove portion toward the surface of the diamond jig to be asymmetrical with the first asymmetrical inclined surface with respect to an imaginary line extending in a direction perpendicular to the surface of the jig pocket.   
     
     
         7 . The CMP conditioning disk manufacturing device of  claim 6 , wherein the plurality of the jig groove portions are oriented along a predetermined pattern or a predetermined direction. 
     
     
         8 . The CMP conditioning disk manufacturing device of  claim 4 , wherein the jig channel is provided in plurality, and
 ends of the plurality of jig channels communicate with the jig groove portion, and the ends of the jig channels are arranged at different heights.   
     
     
         9 . The CMP conditioning disk manufacturing device of  claim 4 , wherein the jig channel is provided in plurality, and
 ends of the plurality of jig channels communicate with the jig groove portion, and the ends of the jig channels are arranged at the same height.   
     
     
         10 . The CMP conditioning disk manufacturing device of  claim 2 , further comprising:
 a detection sensor for measuring an internal pressure of the jig pocket when the suction force is applied to the jig pocket; and   a controller for controlling the vibration unit to increase vibration intensity of the vibration unit when the measured internal pressure is maintained lower than a preset reference pressure for a preset reference time.   
     
     
         11 . A CMP conditioning disk manufacturing method comprising:
 a jig preparation step of preparing a diamond jig with a jig pocket;   a diamond providing step of providing at least one diamond to a surface of the diamond jig;   a jig fixing step of temporarily fixing the diamond in the jig pocket of the diamond jig;   a bonding layer forming step of forming a bonding layer on a surface of a shank base;   a diamond fixing step of fixing the diamond to the bonding layer of the shank base; and   a jig separation step of separating the diamond from the diamond jig.   
     
     
         12 . The CMP conditioning disk manufacturing method of  claim 11 , wherein in the jig fixing step, suction force is applied to the jig pocket to temporarily fix the diamond to the jig pocket. 
     
     
         13 . The CMP conditioning disk manufacturing method of  claim 12 , wherein in the jig fixing step, the diamond jig is vibrated to guide the diamond to the jig pocket when the suction force is applied to the jig pocket. 
     
     
         14 . The CMP conditioning disk manufacturing method of  claim 12 , wherein in the jig fixing step, an internal pressure of the jig pocket is measured when the suction force is applied to the jig pocket, and the application of the suction force is stopped when the measured internal pressure reaches a preset reference pressure. 
     
     
         15 . The CMP conditioning disk manufacturing method of  claim 12 , wherein in the diamond fixing step, the diamond jig is turned over so that the diamond faces downward and the turned-over diamond jig is moved toward the bonding layer to fix the diamond to the bonding layer of the shank base. 
     
     
         16 . A CMP conditioning disk manufactured by the CMP conditioning disk manufacturing device of  claim 1 . 
     
     
         17 . A CMP conditioning disk manufactured by the CMP conditioning disk manufacturing method of  claim 11 .