Transfer robot for substrate processing apparatus

Abstract

The robot includes a hand that supports a substrate, a base, a multi-joint arm that connects the hand to the base, one or more motors that drives the multi-joint arm and changes a position of the hand relative to the base, a drive circuit that supplies driving power to the one or more motors, and a circuit case that accommodates the drive circuit and is attached to the base in a removable manner.

What is claimed is: 
     
         1 . A robot comprising:
 a hand configured to support a substrate;   a base;   a multi-joint arm configured to connect the hand to the base;   one or more motors configured to drive the multi-joint arm and change a position of the hand relative to the base;   a drive circuit configured to supply driving power to the one or more motors; and   a circuit case configured to accommodate the drive circuit and be attached to the base in a removable manner.   
     
     
         2 . The robot according to  claim 1 , further comprising:
 a flange extending to partition between the arm and the base,   wherein the circuit case is attached to the base such that the base is positioned between the circuit case and the flange.   
     
     
         3 . The robot according to  claim 2 , further comprising:
 a first vent configured to communicate an internal space of the base with an external space of the base;   a second vent configured to communicate an internal space of the circuit case with an external space of the circuit case; and   a ventilator configured to generate airflow between the first vent and the second vent through the internal space of the base and the internal space of the circuit case.   
     
     
         4 . The robot according to  claim 3 , wherein the ventilator generates airflow from the second vent to the first vent through the internal space of the base and the internal space of the circuit case. 
     
     
         5 . The robot according to  claim 4 , wherein the ventilator includes a fan provided at the first vent to direct a gas from the internal space of the base to the external space of the base. 
     
     
         6 . The robot according to  claim 5 , wherein the ventilator further includes a second fan provided at the second vent to direct a gas from the external space of the circuit case to the internal space of the circuit case. 
     
     
         7 . The robot according to  claim 4 , wherein the one or more motors are built into the base. 
     
     
         8 . The robot according to  claim 4 , wherein a part of the drive circuit protrudes from the circuit case toward the flange and is accommodated in the base. 
     
     
         9 . The robot according to  claim 3 , further comprising
 a sealing member provided on the flange to airtightly separate the internal space of the base from the external space of the base.   
     
     
         10 . The robot according to  claim 2 , wherein
 the base and the circuit case are located below the flange, and   the flange holds the base with the circuit case separated from a floor surface.   
     
     
         11 . The robot according to  claim 10 , wherein
 the base includes a first frame that imparts a load bearing capacity exceeding a total weight of the hand, the multi-joint arm, the flange, and the one or more motors to the base,   the circuit case includes a second frame that imparts a load bearing capacity exceeding a total weight of the hand, the multi-joint arm, the flange, the one or more motors, and the base to the circuit base, and   the second frame is attached to the first frame.   
     
     
         12 . The robot according to  claim 10 , further comprising
 a first hook provided on the base; and   a second hook provided on the circuit case to be caught by the first hook to temporarily fix the circuit case to the base,   wherein the circuit case is attached to the base in a state where the second hook is caught by the first hook.   
     
     
         13 . The robot according to  claim 1 , wherein
 the drive circuit includes a connector to which the one or more motors are electrically connected, and   the circuit case has wiring openings that expose the connector in a state where the circuit case is attached to the base.   
     
     
         14 . The robot according to  claim 13 , further comprising
 a cover capable of opening or closing the wiring openings while the circuit case is attached to the base.   
     
     
         15 . The robot according to  claim 1 , further comprising
 a power supply circuit configured to supply power to the drive circuit, and   a power supply case configured to accommodate the power supply circuit and attached to the circuit case in a removable manner.   
     
     
         16 . The robot according to  claim 15 , wherein the power supply case is attached to the circuit case such that it is aligned with the circuit case in a direction intersecting a direction in which the base and the circuit case are arranged. 
     
     
         17 . The robot according to  claim 15 , further comprising
 a communication connector provided in the power supply case; and   a communication cable configured to electrically connect the communication connector to the drive circuit,   wherein the drive circuit communicates with an external device through the communication cable and the communication connector.   
     
     
         18 . A substrate transfer device comprising:
 the robot according to  claim 2 ; and   a chamber configured to accommodate the hand and the multi-joint arm,   wherein the chamber has a chamber opening to position the base and the circuit case outside the chamber, and   the flange is attached to the chamber to close the chamber opening.   
     
     
         19 . The substrate transfer device according to  claim 18 , wherein
 the chamber opening opens downward, and   the flange holds the base with the circuit case separated from a floor surface.