Double-sided conditioner

Abstract

A double-sided conditioner includes a carrier, a plurality of polishing components, and a binding material. The carrier includes an upper surface, a lower surface opposite to the upper surface, and a plurality of opening structures that are arranged at intervals around a carrier center. The polishing components are respectively disposed in the opening structures of the carrier. Each of the polishing components has a first polishing surface exposed from the upper surface of the carrier and a second polishing surface exposed from the lower surface of the carrier. The binding material is filled into the opening structures, so as to fix in position the polishing components.

What is claimed is: 
     
         1 . A double-sided conditioner, comprising:
 a carrier having an upper surface and a lower surface opposite to the upper surface, wherein the carrier includes a carrier center and a plurality of opening structures that are arranged at intervals around the carrier center;   a plurality of polishing components respectively disposed in the opening structures, wherein each of the polishing components has a first polishing surface exposed from the upper surface and a second polishing surface exposed from the lower surface; and   a binding material filled into the opening structures, so as to fix in position the polishing components.   
     
     
         2 . The double-sided conditioner according to  claim 1 , wherein each of the opening structures includes a hollow portion and at least one supporting portion around a periphery of the hollow portion; wherein each of the polishing components includes a polishing portion and at least one wing portion around a periphery of the polishing portion, the polishing portion is accommodated in the hollow portion of the corresponding opening structure and has the first polishing surface and the second polishing surface, and the at least one wing portion abuts against the at least one supporting portion of the corresponding opening structure. 
     
     
         3 . The double-sided conditioner according to  claim 2 , wherein the at least one wing portion of each of the polishing components is immovably fixed to the at least one supporting portion of the corresponding opening structure by the binding material. 
     
     
         4 . The double-sided conditioner according to  claim 3 , wherein the wing portion has at least one through hole, and the binding material passes through the at least one through hole to contact the supporting portion. 
     
     
         5 . The double-sided conditioner according to  claim 1 , further comprising an installation gasket that is fixed in position to the upper surface or the lower surface of the carrier and is not located at positions where the opening structures are located. 
     
     
         6 . The double-sided conditioner according to  claim 5 , wherein a thickness of the installation gasket is greater than a height of the first polishing surface relative to the upper surface of the carrier or a height of the second polishing surface relative to the lower surface of the carrier. 
     
     
         7 . The double-sided conditioner according to  claim 6 , wherein the installation gasket includes an outer frame portion and a partitioning portion located inside the outer frame portion, and the outer frame portion and the partitioning portion have a plurality of protective spaces therebetween that correspond in position to the opening structures to accommodate the polishing components, respectively. 
     
     
         8 . The double-sided conditioner according to  claim 7 , wherein the carrier has a plurality of fixing holes that do not overlap with the opening structures in a diameter direction of the carrier, and the partitioning portion has a plurality of installation holes that correspond in position to the fixing holes. 
     
     
         9 . The double-sided conditioner according to  claim 1 , wherein the first polishing surface has a plurality of first abrasive particles and a first metal-based multi-layered structure thereon, and the first metal-based multi-layered structure has a plurality of first protrusions to fix in position the first abrasive particles, respectively; wherein the second polishing surface has a plurality of second abrasive particles and a second metal-based multi-layered structure thereon, and the second metal-based multi-layered structure has a plurality of second protrusions to fix in position the second abrasive particles, respectively. 
     
     
         10 . The double-sided conditioner according to  claim 9 , wherein each of the first abrasive particles has a first inner end portion that is conformally enclosed by the corresponding first protrusion and a first outer end portion that is exposed from the corresponding first protrusion, and a ratio of a minimum width of one of the first protrusions to an average particle diameter of the first abrasive particle being enclosed by the one of the first protrusions is 0.5-5:10; wherein each of the second abrasive particles has a second inner end portion that is conformally enclosed by the corresponding second protrusion and a second outer end portion that is exposed from the corresponding second protrusion, and a ratio of a minimum width of one of the second protrusions to an average particle diameter of the second abrasive particle being enclosed by the one of the second protrusions is 0.5-5:10. 
     
     
         11 . The double-sided conditioner according to  claim 10 , wherein a height of the first outer end portion of one of the first abrasive particles is less than 40% of a total height of the one of the first abrasive particles, and a height of the second outer end portion of one of the second abrasive particles is less than 40% of a total height of the one of the second abrasive particles. 
     
     
         12 . The double-sided conditioner according to  claim 9 , wherein the first metal-based multi-layered structure or the second metal-based multi-layered structure includes a first nickel layer, a copper layer, and a second nickel layer that are arranged sequentially from inside to outside. 
     
     
         13 . The double-sided conditioner according to  claim 9 , wherein the first metal-based multi-layered structure or the second metal-based multi-layered structure includes a first copper layer, a second copper layer, and a nickel layer that are arranged sequentially from inside to outside. 
     
     
         14 . The double-sided conditioner according to  claim 9 , wherein the first metal-based multi-layered structure or the second metal-based multi-layered structure includes a first nickel layer, a first copper layer, a second copper layer, a third copper layer, and a second nickel layer that are arranged sequentially from inside to outside.