Film forming apparatus for metal film

Abstract

A metal film in a predetermined pattern can be accurately formed using a masking member including a mask portion made of a rubber material. The masking member of a film forming apparatus includes the mask portion that has a penetrating portion formed therein and that is made of a rubber material. A contact prevention member (cover sheet) made of a resin material is disposed on an opposing surface, which opposes an electrolyte membrane, of surfaces of the mask portion, the contact prevention member being configured to prevent contact between the mask portion and the electrolyte membrane.

What is claimed is: 
     
         1 . A film forming apparatus for a metal film that forms the metal film in a predetermined pattern on a surface of a substrate by electroplating, the film forming apparatus comprising:
 a container having an opening formed at a position opposing the substrate, the opening covered by an electrolyte membrane with a plating solution contained in the container;   a pressing mechanism configured to press the substrate by the electrolyte membrane with a hydraulic pressure of the plating solution contained in the container;   an anode disposed inside the container at a position opposing the electrolyte membrane; and   a masking member disposed between the electrolyte membrane and the substrate, the masking member having a penetrating portion in the predetermined pattern formed therein,   wherein   the masking member includes a mask portion made of a rubber material and having the penetrating portion formed therein, and   a contact prevention member made of a resin material is disposed on an opposing surface, which opposes the electrolyte membrane, of surfaces of the mask portion, the contact prevention member being configured to prevent contact between the mask portion and the electrolyte membrane.   
     
     
         2 . The film forming apparatus for a metal film according to  claim 1 , wherein
 the contact prevention member is a cover sheet disposed on the opposing surface so as to cover the penetrating portion, and   a plurality of openings is formed in the cover sheet at a position where at least the penetrating portion is covered, the plurality of openings allowing the plating solution to penetrate therethrough.   
     
     
         3 . The film forming apparatus for a metal film according to  claim 2 , wherein
 the mask portion comprises a first portion facing the electrolyte membrane and a second portion facing the substrate, and   the masking member comprises a mesh portion woven with a wire, the mesh portion being disposed between the first portion and the second portion and retaining the first portion and the second portion.   
     
     
         4 . The film forming apparatus for a metal film according to  claim 3 , wherein
 the cover sheet is a sheet in a mesh woven with a wire, and   each of the openings of the mesh in the cover sheet is larger than an opening of a mesh in the mesh portion.   
     
     
         5 . The film forming apparatus for a metal film according to  claim 1 , wherein the contact prevention member is a resin film that covers the opposing surface.