Multi-stage cooling system

Abstract

A multi-stage cooling system includes a pressure-resistant container and a parallel-mode cooling device that is at least partially arranged in the pressure-resistant container. The pressure-resistant container can store a dry gas therein that has a dew point temperature being less than −10° C. and that has a pressure being greater than 1 atm. The parallel-mode cooling device includes two heat exchangers immersed in the dry gas. The two heat exchangers respectively have a first cooling critical value and a second cooling critical value that is less than the first cooling critical value. The parallel-mode cooling device is configured to reduce a temperature of the dry gas to the first cooling critical value through one of the two heat exchangers having a lower operation power, and then further to reduce the temperature of the dry gas through another one of the two heat exchangers having a higher operation power.

What is claimed is: 
     
         1 . A multi-stage cooling system, comprising:
 a pressure-resistant container including a gap storage room and a control valve that is in spatial communication with the gas storage room, wherein the gap storage room is configured to store a dry gas that has a dew point temperature being less than −10° C. and that has a pressure being greater than 1 atm;   a parallel-mode cooling device including:
 a first heat exchanger at least partially arranged in the gas storage room and immersed in the dry gas, wherein the first heat exchanger has a first cooling critical value; and 
 a second heat exchanger at least partially arranged in the gas storage room and immersed in the dry gas, wherein an operation power of the second heat exchanger is higher than an operation power of the first heat exchanger, and the second heat exchanger has a second cooling critical value that is less than the first cooling critical value; 
 wherein the parallel-mode cooling device is configured to reduce a temperature of the dry gas in the gas storage room to the first cooling critical value through the first heat exchanger, and then further to reduce the temperature of the dry gas from the first cooling critical value to a predetermined temperature through the second heat exchanger, the predetermined temperature being greater than or equal to the second cooling critical value; and 
   a plurality of contactless test devices connected to the control valve of the pressure-resistant container, wherein the control valve of the pressure-resistant container is configured to output the dry gas having the predetermined temperature from the gas storage room to a N number of the contactless test devices, selectively, for establishing a predetermined test environment in each of the N number of the contactless test devices, and wherein N is a positive integer, and at least one of the contactless test devices includes:
 a single test socket configured to perform an electrical test to a single device under test (DUT) and including:
 a lower chamber including a signal transmitting board arranged on a bottom portion thereof, wherein the lower chamber is configured to allow the DUT to be tightly fitted with an inner wall thereof and to be disposed on the signal transmitting board; and 
 an upper chamber that is detachably assembled onto the lower chamber so as to jointly define a gas mixing room; 
 wherein the single test socket has a gas input channel and a gas output channel that are in spatial communication with the gas mixing room, and the gas mixing room is in spatial communication with an external space only through the gas input channel and the gas output channel; and 
 
 a gas pressure module connected to the gas input channel and the gas output channel, wherein the gas pressure module is connected to the control valve of the pressure-resistant container for allowing the dry gas to be injected into the gas mixing room from the pressure-resistant container, whereby the gas mixing room has the predetermined test environment for allowing the electrical test to be performed to the DUT. 
   
     
     
         2 . The multi-stage cooling system according to  claim 1 , further comprising a pressurizing and drying mechanism connected to the gas storage room, wherein the pressurizing and drying mechanism is configured to provide the gas storage room with the dry gas that has the dew point temperature being within a range from −30° C. to −100° C. and that has the pressure being within a range from 1.5 atm to 6 atm. 
     
     
         3 . The multi-stage cooling system according to  claim 1 , wherein a difference between the first cooling critical value of the first heat exchanger and the second cooling critical value of the second heat exchanger is at least 20° C. 
     
     
         4 . The multi-stage cooling system according to  claim 1 , wherein the parallel-mode cooling device includes a rapid cooler connected to the gas storage room, and the rapid cooler is configured to selectively inject a liquid nitrogen into the gas storage room. 
     
     
         5 . The multi-stage cooling system according to  claim 1 , wherein the pressure-resistant container includes a first pressure-resistant tank and a first output pipe that connects the first pressure-resistant tank and the control valve, and an interior space of the first pressure-resistant tank is defined as at least part of the gas storage room, and wherein the first heat exchanger includes:
 an evaporator that is arranged in the first pressure-resistant tank;   a condenser arranged outside of the first pressure-resistant tank;   an expansion valve connected in-between an inlet of the evaporator and an outlet of the condenser; and   a compressor connected in-between an outlet of the evaporator and an inlet of the condenser.   
     
     
         6 . The multi-stage cooling system according to  claim 5 , wherein the pressure-resistant container includes a second pressure-resistant tank, a second output pipe that connects the second pressure-resistant tank and the control valve, and a connection pipe that connects the first pressure-resistant tank and the second pressure-resistant tank, wherein an interior space of the second pressure-resistant tank is defined as a part of the gas storage room, and wherein at least part of the second heat exchanger is arranged in the second pressure-resistant tank and is a liquid nitrogen heat exchanger or a liquid helium heat exchanger. 
     
     
         7 . The multi-stage cooling system according to  claim 1 , wherein the lower chamber includes a first frame and a second frame that is assembled to the first frame, wherein the signal transmitting board is assembled to the first frame, and the gas input channel is formed in the first frame and has a gas inlet that is arranged at the gas mixing room and that is higher than the DUT with respect to the signal transmitting board, and wherein the upper chamber includes:
 a covering plate detachably assembled to the second frame and having the gas output channel and a thru-hole; and   a positioning mechanism assembled to the covering plate and arranged in the thru-hole, wherein the positioning mechanism includes a manipulation portion arranged outside of the gas mixing room and a pressing portion that is arranged in the gas mixing room;   wherein the positioning mechanism is configured to move the pressing portion toward the signal transmitting board through the manipulation portion for allowing the pressing portion to abut against the DUT so that the DUT is flatly disposed onto the signal transmitting board.   
     
     
         8 . A multi-stage cooling system, comprising:
 a pressure-resistant container including a gap storage room and a control valve that is in spatial communication with the gas storage room, wherein the gap storage room is configured to store a dry gas that has a dew point temperature being less than −10° C. and that has a pressure being greater than 1 atm;   a parallel-mode cooling device including:
 a first heat exchanger at least partially arranged in the gas storage room and immersed in the dry gas, wherein the first heat exchanger has a first cooling critical value; and 
 a second heat exchanger at least partially arranged in the gas storage room and immersed in the dry gas, wherein an operation power of the second heat exchanger is higher than an operation power of the first heat exchanger, and the second heat exchanger has a second cooling critical value that is less than the first cooling critical value; 
 wherein the parallel-mode cooling device is configured to reduce a temperature of the dry gas in the gas storage room to the first cooling critical value through the first heat exchanger, and then further to reduce the temperature of the dry gas from the first cooling critical value to a predetermined temperature through the second heat exchanger, the predetermined temperature being greater than or equal to the second cooling critical value; and 
   a plurality of contactless test devices connected to the control valve of the pressure-resistant container, wherein the control valve of the pressure-resistant container is configured to output the dry gas having the predetermined temperature from the gas storage room to a N number of the contactless test devices, selectively, for establishing a predetermined test environment in each of the N number of the contactless test devices, and wherein N is a positive integer, and at least one of the contactless test devices includes:
 a machine; 
 a test module assembled to the machine and including:
 a first test chamber and a second test chamber both being assembled to the machine, wherein the second test chamber and the first test chamber are movable relative to each other along a first direction for jointly forming a test space, and wherein a top portion of the first test chamber has an opening that is in spatial communication with the test space; and 
 a test carrier disposed on the second test chamber and configured to provide a device under test (DUT) to be disposed thereon; and 
 
 a temperature adjustment module assembled to the first test chamber and partially arranged in the test space, wherein the temperature adjustment module includes:
 a temperature control mechanism including:
 a guiding shield arranged in the test space and located above the test carrier; and 
 a temperature control unit disposed in the guiding shield and arranged adjacent to the opening; and 
 
 a fan mechanism assembled into the opening of the first test chamber and facing toward the temperature control unit, wherein the guiding shield and the fan mechanism jointly define an inner circulation path in the test space, the inner circulation path traveling along the temperature control unit and circulating through an inner side and an outer side of the guiding shield, and wherein the fan mechanism is operable to form a circulation airflow along the inner circulation path, and the circulation airflow maintains the predetermined temperature by traveling through the temperature control unit. 
 
   
     
     
         9 . The multi-stage cooling system according to  claim 8 , wherein, in any one of the contactless test devices, the temperature control unit includes at least one of a heater and a cooler that is arranged adjacent to a blade of the fan mechanism. 
     
     
         10 . The multi-stage cooling system according to  claim 8 , wherein, in any one of the contactless test devices, the guiding shield includes:
 an arrangement tube arranged adjacent to the opening, wherein the temperature control unit and a blade of the fan mechanism are located in the arrangement tube; and   a shield body extending from a bottom edge of the arrangement tube toward the second test chamber, wherein the shield body is tapered in a direction from the second test chamber towards the arrangement tube.   
     
     
         11 . The multi-stage cooling system according to  claim 8 , wherein, in any one of the contactless test devices, the fan mechanism is operable in a first operation mode or a second operation mode, wherein, when the fan mechanism is in the first operation mode, a blade of the fan mechanism is rotated to form the circulation airflow in the inner circulation path from the blade toward the temperature control unit, and wherein, when the fan mechanism is in the second operation mode, the blade of the fan mechanism is rotated to form the circulation airflow in the circulation airflow along the inner circulation path from the temperature control unit toward the blade. 
     
     
         12 . The multi-stage cooling system according to  claim 8 , wherein, in any one of the contactless test devices, the first test chamber includes a first accommodating portion and a first sealing portion that is connected to a peripheral edge of the first accommodating portion, and the second test chamber includes a second accommodating portion and a second sealing portion that is connected to a peripheral edge of the second accommodating portion and that faces toward the first sealing portion along the first direction, wherein the test module includes a sealing gasket arranged between the first sealing portion and the second sealing portion, and wherein the first test chamber and the second test chamber are movable relative to each other for being closed with each other, so that the first accommodating portion and the second accommodating portion jointly define the test space, and the sealing gasket is sandwiched between the first sealing portion and the second sealing portion to complete a pre-closed process. 
     
     
         13 . The multi-stage cooling system according to  claim 12 , wherein, in any one of the contactless test devices, the test module further includes a sealing mechanism including:
 a driver assembled to the machine;   a plurality of locking members rotatably disposed on the first sealing portion of the first test chamber, wherein each of the locking members has an interconnection end portion and a locking end portion that is opposite to the interconnection end portion; and   a transmission member connected to the driver and the interconnection end portions of the locking members;   wherein, after the pre-closed process is complete, the driver is configured to drive the locking members to be synchronously rotated to perform a locking process through the transmission member, so that two opposites of the second sealing portion are sandwiched between the first sealing portion and the locking end portion of each of the locking members.   
     
     
         14 . The multi-stage cooling system according to  claim 13 , further comprising a pressurizing and drying mechanism that is connected to the gas storage room and that is connected to at least one of the first accommodating portion and the second accommodating portion of each of the contactless test devices, wherein, after the pre-closed process is complete, the pressurizing and drying mechanism is configured to perform a vacuuming process to the test space of each of the contactless test devices for implementing the locking process. 
     
     
         15 . The multi-stage cooling system according to  claim 14 , wherein the pressurizing and drying mechanism is configured to provide the gas storage room with the dry gas that has the dew point temperature being within a range from −30° C. to −100° C. and that has the pressure being within a range from 1.5 atm to 6 atm. 
     
     
         16 . The multi-stage cooling system according to  claim 13 , wherein, in any one of the contactless test devices, the driver includes a gear portion, the interconnected end portion of each of the locking members is a gear, the transmission member is a transmission chain that is engaged with the gear portion and the interconnected end portions, the gear portion and the interconnected end portions are arranged in a plane that is higher than the first test chamber with respect to the machine, and central axes of the interconnected end portions are parallel to each other. 
     
     
         17 . The multi-stage cooling system according to  claim 8 , wherein, in any one of the contactless test devices, the fan mechanism includes:
 a frame having one end assembled to the opening;   a motor assembled to another end of the frame and having an output shaft arranged in the frame;   an isolation layer assembled in the frame, wherein a temperature and a pressure of an interior space of the frame are isolated from those of the test space through the isolation layer;   a rotational shaft rotatably passing through the isolation layer, wherein one end of the rotational shaft is arranged in the frame, and another end of the rotational shaft is arranged in the guiding shield;   a blade fixed to the another end of the rotational shaft and arranged adjacent to the temperature control unit; and   a heat-isolation coupling that connects the output shaft and the one end of the rotational shaft;   wherein the motor is configured to drive the blade to be rotated through the output shaft, the heat-isolation coupling, and the rotational shaft, so as to the circulation airflow that travels through the temperature control unit.   
     
     
         18 . The multi-stage cooling system according to  claim 17 , wherein, in any one of the contactless test devices, the fan mechanism includes a housing that is assembled to the top portion of the first test chamber and that covers and encloses the frame and the motor therein, and wherein the frame has an assembling hole corresponding in position to the heat-isolation coupling, and the heat-isolation coupling is configured to be assembled or detached in the frame through the assembling hole. 
     
     
         19 . The multi-stage cooling system according to  claim 8 , wherein the pressure-resistant container includes a first pressure-resistant tank and a first output pipe that connects the first pressure-resistant tank and the control valve, and an interior space of the first pressure-resistant tank is defined as at least part of the gas storage room, and wherein the first heat exchanger includes:
 an evaporator that is arranged in the first pressure-resistant tank;   a condenser arranged outside of the first pressure-resistant tank;   an expansion valve connected in-between an inlet of the evaporator and an outlet of the condenser; and   a compressor connected in-between an outlet of the evaporator and an inlet of the condenser.   
     
     
         20 . The multi-stage cooling system according to  claim 19 , wherein the pressure-resistant container includes a second pressure-resistant tank, a second output pipe that connects the second pressure-resistant tank and the control valve, and a connection pipe that connects the first pressure-resistant tank and the second pressure-resistant tank, wherein an interior space of the second pressure-resistant tank is defined as a part of the gas storage room, and wherein at least part of the second heat exchanger is arranged in the second pressure-resistant tank and is a liquid nitrogen heat exchanger or a liquid helium heat exchanger.