Grinding wheel

Abstract

A grinding wheel includes: a wheel body positioned over a wafer; a plurality of wheel tips disposed on the wheel body; and a support block disposed on the wheel body and an outer side surface of each of the wheel tips.

What is claimed is: 
     
         1 . A grinding wheel comprising:
 a wheel body positioned over a wafer;   a plurality of wheel tips disposed on the wheel body; and   a support block disposed on the wheel body and an outer side surface of each of the wheel tips.   
     
     
         2 . The grinding wheel of  claim 1 , wherein the support block has a lower surface that is higher than a lower end of each of the wheel tips. 
     
     
         3 . The grinding wheel of  claim 1 , wherein the support block has an inner side surface that makes contact with the outer side surface of each of the wheel tips. 
     
     
         4 . The grinding wheel of  claim 3 , wherein the support block has an upper surface that makes contact with a lower surface of the wheel body. 
     
     
         5 . The grinding wheel of  claim 4 , wherein the upper surface of the support block is fixed to the lower surface of the wheel body. 
     
     
         6 . The grinding wheel of  claim 3 , wherein the support block further comprises an auxiliary support block that makes contact with an outer side surface of the wheel body. 
     
     
         7 . The grinding wheel of  claim 6 , wherein the auxiliary support block is fixed to the outer side surface of the wheel body. 
     
     
         8 . The grinding wheel of  claim 1 , further comprising a control module that controls a position of the support block. 
     
     
         9 . The grinding wheel of  claim 8 , wherein the control module comprises:
 a resilient member that movably connects the support block with the wheel body;   a control block that forms an air chamber between the control block and the support block; and   an air line formed in the control block to selectively supply air to the air chamber.   
     
     
         10 . The grinding wheel of  claim 9 , wherein the support block further comprises a lift block that is connected to the resilient member. 
     
     
         11 . The grinding wheel of  claim 10 , wherein the control block comprises:
 a vertical block arranged on a side surface of the support block; and   a horizontal block extended from a lower end of the vertical block toward the support block,   wherein the support block, the lift block, the vertical block and the horizontal block form the air chamber.   
     
     
         12 . The grinding wheel of  claim 11 , wherein the air line is extended through the vertical block and the horizontal block to the air chamber. 
     
     
         13 . The grinding wheel of  claim 1 , wherein the wheel body comprises:
 a wheel arranged over the wafer; and   a base shank arranged on an edge portion of a lower surface of the wheel, wherein the wheel tips are disposed on the base shank.   
     
     
         14 . A grinding wheel comprising:
 a wheel arranged over a wafer;   a base shank arranged on an edge portion of a first surface of the wheel;   a plurality of wheel tips arranged on a first surface of the base shank; and   a support block disposed on the base shank and an outer side surface of each of the wheel tips,   wherein the support block has a first surface that is higher than a first end of each of the wheel tips.   
     
     
         15 . The grinding wheel of  claim 14 , wherein a second surface of the support block is fixed to the first surface of the base shank. 
     
     
         16 . The grinding wheel of  claim 14 , wherein the support block further comprises an auxiliary support block that is fixed to an outer side surface of the base shank. 
     
     
         17 . A grinding wheel comprising:
 a wheel arranged over a wafer;   a base shank arranged on an edge portion of a lower surface of the wheel;   a plurality of wheel tips arranged on a lower surface of the base shank;   a support block disposed on the base shank and an outer side surface of each of the wheel tips; and   a control module that controls a position of the support block.   
     
     
         18 . The grinding wheel of  claim 17 , wherein the control module comprises:
 a resilient member that movably connects the support block with the base shank;   a control block that forms an air chamber between the control block and the support block; and   an air line formed in the control block to selectively supply air to the air chamber.   
     
     
         19 . The grinding wheel of  claim 18 , wherein the support block further comprises a lift block that is connected to the resilient member. 
     
     
         20 . The grinding wheel of  claim 19 , wherein the control block comprises:
 a vertical block arranged on a side surface of the support block; and   a horizontal block extended from a lower end of the vertical block toward the support block,   wherein the support block, the lift block, the vertical block and the horizontal block form the air chamber, and   wherein the air line is extended through the vertical block and the horizontal block to the air chamber.