Fluid control device for de-vacuuming in wafer grinding apparatus

Abstract

Disclosed is a fluid control device for de-vacuuming in a wafer grinding apparatus. The fluid control device has a linear driver which drives a positioning seat to move upward and downward, several drain tubes are respectively disposed in the positioning seat, several flexible covers are respectively attached to each of the drain tubes, a converting seat is disposed on a support frame, and several flow diverters are arranged at intervals on the support frame. Several relay channels are formed within the converting seat and each of the flexible covers corresponds with each of the relay channels individually, the other end of each relay channel communicates with several relay tubes. Each flow diverter is connected to several conveying tubes, and communicates with several conveying tubes correspondingly, whereby the flow is controlled to enter the wafer grinding apparatus between the upper grinding wheel and the wafer subjected to the grinding thereof.

1 . A fluid control device for de-vacuuming in a wafer grinding apparatus, wherein the wafer grinding apparatus includes an upper grinding wheel for grinding the upper surface of a wafer, the upper grinding wheel having several channels extending therethrough, each of which extends to the upper end and the lower end of the upper grinding wheel, and the fluid control device is used to control the flow of fluid flowing through each of the channels to enter between the upper grinding wheel and the wafer and remove an adhesion condition therebetween, wherein the fluid described is water or air; the fluid control device comprising:
 a linear driver fixedly disposed in the wafer grinding apparatus;   a positioning seat connected with the linear driver and is located between the linear driver and the upper surface of the upper grinding wheel, and the linear driver drives the positioning seat to move up and down so that the positioning seat can move close to or away from the upper surface;   several drain tubes respectively positioned on the positioning seat, each of the drain tubes is respectively communicated with a fluid supply source, and extends toward the upper surface of the upper grinding wheel; several flexible covers are respectively attached to one end of each of the drain tubes facing the upper surface, and each of them is respectively formed with a conical space inside the flexible cover to communicate with each of the drain tubes;   a converting seat provided on a support frame connected to the upper grinding wheel, the interior of the converting seat is formed with several relay channels cooperating with each of the drain tubes, and one end of each of the relay channels respectively extends to the upper end of the converting seat, each of the conical spaces respectively forms an orientation vertically correspondence with each of the relay channels individually, and the other end of each of the relay channels respectively extends to one side of the converting seat to communicate with several relay tubes; and   several flow diverters configured at intervals on the support frame, each of the relay tubes is in communication with each of the flow diverters, each of the flow diverters is correspondingly connected to several conveying tubes, and each of the conveying tubes is communicated with each of the channels, thereby allowing the fluid to flow through each of the channels to enter between the upper grinding wheel and the wafer.   
     
     
         2 . The fluid control device according to  claim 1 , wherein the positioning seat is provided with a support rack, each of the drain tubes is positioned on the support rack, each of the flexible covers is positioned between the support rack and the converting seat, and each of the flexible covers is immediately adjacent to the support rack. 
     
     
         3 . The fluid control device according to  claim 2 , wherein two sides of the support rack are each connected with two touch elements, each of which extends toward the converting seat. 
     
     
         4 . The fluid control device according to  claim 1 , wherein two retaining walls are respectively abutted against two opposite sides of the converting seat, and each of the flexible covers is respectively located between each of the retaining walls. 
     
     
         5 . The fluid control device according to  claim 2 , wherein two retaining walls are respectively abutted against two opposite sides of the converting seat, and each of the flexible covers is respectively located between each of the retaining walls. 
     
     
         6 . The fluid control device according to  claim 3 , wherein two retaining walls are respectively abutted against two opposite sides of the converting seat, and each of the flexible covers is respectively located between each of the retaining walls. 
     
     
         7 . The fluid control device according to  claim 4 , wherein each of the retaining walls is a circular plate, each of the retaining walls is arranged coaxially, and the axial extension of the upper grinding wheel extends through the radial center of each of the retaining walls. 
     
     
         8 . The fluid control device according to  claim 5 , wherein each of the retaining walls is a circular plate, each of the retaining walls is arranged coaxially, and the axial extension of the upper grinding wheel extends through the radial center of each of the retaining walls. 
     
     
         9 . The fluid control device according to  claim 6 , wherein each of the retaining walls is a circular plate, each of the retaining walls is arranged coaxially, and the axial extension of the upper grinding wheel extends through the radial center of each of the retaining walls.