Free joint structure, push-pull device, and substrate processing module

Abstract

A free joint structure capable of absorbing a misalignment between a piston rod and a shaft is disclosed. The free joint structure includes a push-pull force generating portion and a target load portion.

What is claimed is: 
     
         1 . A free joint structure comprising:
 a push-pull force generating portion configured to generate a push-pull force; and   a target load portion coupled to the push-pull force generating portion and to which the push-pull force from the push-pull force generating portion is applied, and   wherein the push-pull force generating portion is configured to apply a push force to the target load portion by making point contact with the target load portion and to apply a pull force to the target load portion by making surface contact with the target load portion.   
     
     
         2 . The free joint structure according to  claim 1 ,
 wherein the free joint structure has an axial gap and a radial gap formed between the push-pull force generating portion and the target load portion.   
     
     
         3 . The free joint structure according to  claim 2 ,
 wherein the free joint structure comprises a shim configured to adjust a size of the axial gap.   
     
     
         4 . The free joint structure according to  claim 1 ,
 wherein the target load portion comprises:
 a pressing flat surface portion arranged opposite to the push-pull force generating portion; and 
 an opening flat surface portion arranged on an opposite side of the pressing flat surface portion and having an opening into which the push-pull force generating portion is inserted, and 
   wherein the push-pull force generating portion comprises:
 a spherical portion configured to make point contact with the pressing flat surface portion; and 
 a flat surface flange portion configured to make surface contact with the opening flat surface portion. 
   
     
     
         5 . The free joint structure according to  claim 4 ,
 wherein the spherical portion and the flat surface flange portion are arranged opposite each other.   
     
     
         6 . The free joint structure according to  claim 4 ,
 wherein the spherical portion is arranged opposite the pressing flat surface portion, and   wherein the flat surface flange portion is arranged opposite the opening flat surface portion.   
     
     
         7 . The free joint structure according to  claim 4 ,
 wherein the target load portion comprises a spacer arranged between the pressing flat surface portion and the opening flat surface portion.   
     
     
         8 . A push-pull device comprising:
 a free joint structure as described in  claim 1 ; and   an air bearing cylinder coupled to the free joint structure.   
     
     
         9 . A substrate processing module comprising:
 a push-pull device as described in claim  8 ;   a shaft coupled to the push-pull device; and   a processing member connected to the shaft and configured to process a substrate or a polishing pad.   
     
     
         10 . The substrate processing module according to  claim 9 ,
 wherien the processing member corresponds to at least one of a polishing head configured to polish the substrate and a dresser configured to dress the polishing pad.   
     
     
         11 . The substrate processing module according to  claim 9 ,
 wherein the processing member corresponds to at least one of a buff cleaning member and a pencil cleaning member configured to clean the substrate.