Method for vacuum-exhausting by means of cryopump

Abstract

A vacuum evacuation method to be performed by a cryopump includes: a process of receiving an injection signal of a process gas from a process gas injection device that injects a process gas into a processing chamber; a process of turning on a first heater based on the injection signal to increase a temperature of a first stage part; a process of measuring the temperature of the first stage part; a process of monitoring whether the temperature of the first stage part reaches a predetermined first stage reference temperature; and a process of vacuum-evacuating the process gas when the temperature of the first stage part reaches a predetermined first stage reference temperature.

What is claimed is: 
     
         1 . A vacuum evacuation method to be performed by a cryopump which includes: a freezer equipped with a first stage part and a second stage part and configured to cool the first stage part and the second stage part; a cryopanel including a first stage panel cooled by the first stage part and a second stage panel cooled by the second stage part; a cryopump vessel surrounding the cryopanel; a first heater provided in the first stage part; and a second heater provided in the second stage part, the vacuum evacuation method comprising:
 a process of receiving an injection signal of a process gas from a process gas injection device that injects the process gas into a processing chamber;   a process of turning on the first heater based on the injection signal to increase a temperature of the first stage part;   a process of measuring the temperature of the first stage part;   a process of monitoring whether the temperature of the first stage part reaches a predetermined first stage reference temperature; and   a process of vacuum-evacuating the process gas when the temperature of the first stage part reaches the predetermined first stage reference temperature.   
     
     
         2 . The vacuum evacuation method of  claim 1 ,
 wherein the process of increasing the temperature includes a process of gradually increasing the temperature of the first stage part from 35K to 60K by using the first heater.   
     
     
         3 . The vacuum evacuation method of  claim 1 ,
 wherein the process of increasing the temperature includes a process of gradually increasing the temperature of the first stage part by 5K.   
     
     
         4 . The vacuum evacuation method of  claim 1 ,
 wherein a pressure of the process gas increases based on the gradually increased temperature of the first stage part and decreases when the temperature of the first stage part reaches the predetermined first stage reference temperature, and   the pressure of the process gas is from 1E-10 Torr to 1E-6 Torr.   
     
     
         5 . The vacuum evacuation method of  claim 1 , further comprising:
 a process of receiving a non-injection signal of the process gas from the process gas injection device that injects the process gas into the processing chamber; and   a process of turning off the first heater of the first stage part to maintain the temperature of the first stage part in an idle state.