Conditioning disk with microfeatures

Abstract

A conditioning disk with microfeatures is described. More specifically, a conditioning disk with at least one discrete abrasive element and at least one microfeature. The asymmetry of the at least one microstructure may enable, based on orientation, a wide range of pad polishing parameters, such as surface roughness and pad wear rate.

What is claimed is: 
     
         1 . A pad conditioning disk, comprising:
 at least one discrete abrasive element, the at least one discrete abrasive element comprising at least one microfeature having a base and a top;   wherein the at least one microfeature has at least three facets with at least three edges, each edge being between an adjacent pair of facets and extending from the base;   wherein the at least three edges are not all a same length; and   wherein the at least one microfeature has a leading edge, the leading edge being either
 (i) coincident with the shortest edge from a top plan view of the at least three edges, or 
 (ii) if two edges of the at least three edges from a top plan view are a same length but shorter than the other edges, halfway in rotation between each of the two edges and extending from the base of the microfeature to the top; 
   wherein the at least one discrete abrasive element is oriented and disposed on the pad conditioning disk such that the leading edge of the at least one microfeature forms an angle of at least 5 degrees with a direction of instantaneous rotation of the pad conditioning disk.   
     
     
         2 . The pad conditioning disk of  claim 1 , wherein the at least one microfeature has a truncated top. 
     
     
         3 . The pad conditioning disk of  claim 1 , wherein the at least one microfeatures has four edges. 
     
     
         4 . The pad conditioning disk of  claim 1 , wherein the at least one microfeature is an array of microfeatures. 
     
     
         5 . The pad conditioning disk of  claim 4 , wherein each microfeature in the array of microfeatures is the same shape, size, and orientation. 
     
     
         6 . The pad conditioning disk of  claim 4 , wherein the array of microfeatures varies by at least one of shape, size, or orientation. 
     
     
         7 . The pad conditioning disk of  claim 1 , wherein the at least one discrete element includes at least two discrete elements, and the at least two discrete elements each include at least one microfeature, with a same size and shape but have different orientations relative to a respective reference point. 
     
     
         8 . The pad conditioning disk of  claim 1 , wherein the at least one discrete element is attached to the pad conditioning disk by an adhesive. 
     
     
         9 . The pad conditioning disk of  claim 1 , wherein the at least one discrete element is repositionably attached to the pad conditioning disk. 
     
     
         10 . The pad conditioning disk of  claim 1 , wherein the at least one discrete abrasive element includes at least five discrete abrasive elements. 
     
     
         11 . The pad conditioning disk of  claim 1 , wherein the at least one microfeature of the at least one discrete abrasive element includes superabrasive grit. 
     
     
         12 . The pad conditioning disk of  claim 11 , wherein the at least one microfeature of the at least one discrete abrasive element includes CVD diamond. 
     
     
         13 . The pad conditioning disk of  claim 1 , wherein the at least one microfeature of the at least one discrete abrasive element includes a ceramic material. 
     
     
         14 . The pad conditioning disk of  claim 1 , wherein the at least one discrete abrasive element includes a working surface where the at least one microfeature is disposed and a carrier, wherein the carrier includes a metal substrate. 
     
     
         15 . The pad conditioning disk of  claim 1 , wherein the pad conditioning disk includes a carrier where the at least one discrete abrasive element is disposed. 
     
     
         16 . The pad conditioning disk of  claim 15 , wherein the carrier of the pad conditioning disk is stainless steel. 
     
     
         17 . A method of forming a pad conditioning disk, comprising:
 providing a carrier;   providing at least one discrete abrasive element, wherein the at least one discrete element includes at least one microfeature having a base and a top, the microfeature including at least three facets with at least three edges, each edge being between an adjacent pair of facets and extending from the base, wherein the at least three edges are not all a same length, and wherein the at least one microfeature has a leading edge, the leading edge being either
 (i) coincident with the shortest edge of the at least three edges, or 
 (ii) if two edges of the at least three edges are a same length but shorter than the other edges, halfway in rotation between each of the two edges and extending from the base of the microfeature to the top, 
   orienting and disposing the at least one discrete abrasive element on the carrier such that the leading edge of the at least one microfeature forms an angle of at least 5 degrees with a direction of instantaneous rotation of the pad conditioning disk.   
     
     
         18 . The method of  claim 17 , wherein orienting and disposing the at least one discrete abrasive element includes orienting and disposing at least two discrete abrasive elements on the carrier, wherein a leading edge of at least one microfeature of each of the at least two discrete abrasive elements forms a different angle with a direction of instantaneous rotation of the pad conditioning disk. 
     
     
         19 . The method of  claim 17 , wherein orienting and disposing the at least one discrete abrasive element includes orienting and disposing at least two discrete abrasive elements on the carrier, wherein a leading edge of at least one microfeature of each of the at least two discrete abrasive elements forms a same angle with a direction of instantaneous rotation of the pad conditioning disk. 
     
     
         20 . The method of  claim 17 , further comprising repositioning at least one discrete abrasive element.