Polishing device, polishing method, and machine part

Abstract

A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface of the object to be polished, and a second drive unit for causing the support unit to control synchronously with the first drive unit such that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.

What is claimed is: 
     
         1 . A polishing device comprising:
 a supporting unit supporting a polishing tool;   a stage holding an object to be polished;   a first drive unit moving the supporting unit and the stage relative to each other along a shape of a polished surface of the object to be polished; and   a second drive unit synchronized with the first drive unit and controlling the supporting unit so that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.   
     
     
         2 . The polishing device according to  claim 1 , wherein the first drive unit moves the supporting unit and the stage relative to each other in a non-circular pattern along the shape of the polishing surface. 
     
     
         3 . The polishing device according to  claim 1 , further comprising a jig holding the polishing member, wherein:
 the polishing member includes a first polishing member and a second polishing member different from the first polishing member;   the jig presses the first polishing member with a first pressing strength in a first step using the first polishing member, and presses the second polishing member with a second pressing strength in a second step using the second polishing member; and   the first pressing strength is lower than the second pressing strength.   
     
     
         4 . The polishing device according to  claim 3 , wherein the first polishing member is a brush, and the second polishing member is a sponge. 
     
     
         5 . A polishing method for a polishing surface on a hard anodized aluminum, the polishing method comprising:
 a first step of polishing the polishing surface with a first polishing member at a first pressing strength; and   a second step of polishing the polishing surface with a second polishing member at a second pressing strength after the first step,   wherein the first pressing strength is lower than the second pressing strength.   
     
     
         6 . The polishing method for the polishing surface on the hard anodized aluminum according to  claim 5 , wherein the second step comprises:
 pressing the second polishing member onto the polishing surface and moving the second polishing member and the polishing surface relative to each other; and   controlling the second polishing member so that one end of the second polishing member faces in a movement direction of the second polishing member.   
     
     
         7 . The polishing method for the polishing surface on the hard anodized aluminum according to  claim 5 , wherein the first polishing member is a brush, and the second polishing member is a sponge. 
     
     
         8 . The polishing method for the polishing surface on the hard anodized aluminum according to  claim 5 , wherein
 the first polishing member and the second polishing member are held by a jig, and   the jig includes a first spring that presses the first polishing member in the first step and a second spring that presses the second polishing member in the second step,   the first pressing strength and the second pressing strength are controlled by a spring constant of the first spring and a spring constant of the second spring.   
     
     
         9 . The polishing method for the polishing surface on the hard anodized aluminum according to  claim 8 , wherein the spring constant of the first spring and the spring constant of the second spring are different from each other. 
     
     
         10 . The polishing method for the polishing surface on the hard anodized aluminum according to  claim 9 , wherein the spring constant of the second spring is greater than the spring constant of the first spring. 
     
     
         11 . The polishing method for the polishing surface on the hard anodized aluminum according to  claim 10 , further comprising, after the first step and before the second step, replacing the first spring in the jig used in the first step with a second spring to be used in the second step. 
     
     
         12 . A machine part comprising:
 a hard anodized aluminum surface; and   a polishing surface on a part of the hard anodized aluminum surface,   wherein a waviness of the polishing surface is 0.2 μm or less and a surface roughness of the polishing surface is 0.4 μm or less.   
     
     
         13 . The machine part according to  claim 12 , wherein a standard deviation of the waviness of the polishing surface is 0.2 μm or less, and a standard deviation of the surface roughness is 0.3 μm or less. 
     
     
         14 . The machine part according to  claim 12 , wherein the waviness of the polishing surface is 0.1 μm or less.