Micro diaphragm pump

Abstract

A micro-diaphragm pump includes a main body, a pump chamber, a diaphragm, a first electrode and a second electrode. The diaphragm is constituted of a crystal material having an electrostrictive effect. The diaphragm can be constituted of a transparent crystal material having an electrostrictive effect. The diaphragm can be constituted of either a cubic KTN [KTa 1-α Nb α O 3 (0<α<1)] crystal or a lithium-added cubic KLTN [K 1-β Li β Ta 1-α Nb α O 3 (0<α<1, 0<β<1)] crystal.

1 - 8 . (canceled) 
     
     
         9 . A micro-diaphragm pump comprising:
 a main body that provides a concave portion;   a diaphragm that is constituted of a crystal material having an electrostrictive effect, the diaphragm covering an opening of the concave portion and defining a pump chamber together with the main body;   a first electrode that is ohmically connected to a first surface of the diaphragm; and   a second electrode that is ohmically connected to a second surface of the diaphragm.   
     
     
         10 . The micro-diaphragm pump according to  claim 9 , wherein in an initial state, the diaphragm is configured to be recessed towards the pump chamber. 
     
     
         11 . The micro-diaphragm pump according to  claim 9 , further comprising:
 a suction port in the pump chamber and configured to suck a target fluid into the pump chamber; and   a discharge port in the pump chamber and configured to push out the target fluid from the pump chamber.   
     
     
         12 . The micro-diaphragm pump according to  claim 11 , wherein a size of a cross section of the pump chamber decreases towards the discharge port, the cross section of the pump chamber being perpendicular to a transfer direction of the target fluid. 
     
     
         13 . The micro-diaphragm pump according to  claim 11 , further comprising a flow path connected to the suction port, wherein a size of a cross section of the flow path decreases towards the suction port, the cross section of the flow path being perpendicular to a transfer direction of the target fluid. 
     
     
         14 . The micro-diaphragm pump according to  claim 9 , wherein:
 the crystal material of the diaphragm is transparent and has the electrostrictive effect; and   the first electrode and the second electrode are formed around the diaphragm except for a central portion of the diaphragm.   
     
     
         15 . The micro-diaphragm pump according to  claim 9 , wherein the crystal material of the diaphragm is a KTN [KTa 1-α ,Nb α O 3  (0<α<1)] crystal. 
     
     
         16 . The micro-diaphragm pump according to  claim 9 , wherein the crystal material of the diaphragm is a KLTN [K 1-β Li β Ta 1-α Nb α O 3  (0<α<1, 0<β<1)] crystal that comprises lithium. 
     
     
         17 . The micro-diaphragm pump according to  claim 9 , further comprising:
 a protective film on a surface of the diaphragm on a side of the pump chamber, wherein the protective film is configured to protect the diaphragm from a target fluid.   
     
     
         18 . A micro-diaphragm pump comprising:
 a substrate;   an upper plate on a top surface of the substrate, the upper plate comprising an opening disposed therein;   a diaphragm that is constituted of a crystal material having an electrostrictive effect, the diaphragm covering an opening of the upper plate;   a first electrode that is ohmically connected to the diaphragm; and   a second electrode that is ohmically connected to the diaphragm, wherein the first electrode and the second electrode on disposed on opposing surfaces of the diaphragm.   
     
     
         19 . The micro-diaphragm pump according to  claim 18 , wherein in an initial state, the diaphragm is configured to be recessed in the opening. 
     
     
         20 . The micro-diaphragm pump according to  claim 18 , wherein the second electrode is disposed between the upper plate and the diaphragm. 
     
     
         21 . The micro-diaphragm pump according to  claim 18 , further comprising:
 a suction port in the opening and configured to suck a target fluid into the opening; and   a discharge port in the opening and configured to push out the target fluid from the opening.   
     
     
         22 . The micro-diaphragm pump according to  claim 21 , wherein a size of a cross section of the opening decreases towards the discharge port. 
     
     
         23 . The micro-diaphragm pump according to  claim 21 , further comprising a flow path connected to the suction port, wherein a size of a cross section of the flow path decreases towards the suction port. 
     
     
         24 . The micro-diaphragm pump according to  claim 18 , wherein the crystal material of the diaphragm is transparent. 
     
     
         25 . The micro-diaphragm pump according to  claim 18 , wherein the crystal material of the diaphragm is a KTN [KTa 1-α Nb α O 3  (0<α<1)] crystal. 
     
     
         26 . The micro-diaphragm pump according to  claim 18 , wherein the crystal material of the diaphragm is a KLTN [K 1-β Li β Ta 1-α Nb α O 3  (0<α<1, 0<β<1)] crystal that comprises lithium. 
     
     
         27 . The micro-diaphragm pump according to  claim 18 , further comprising:
 a protective film on a surface of the diaphragm on a side of the opening, wherein the protective film is configured to protect the diaphragm from a target fluid.