Valve module, fluid control apparatus, and electronic apparatus

Abstract

Provided is a valve module that includes a movable member and a support member. The movable member is constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having an opening through which the fluid passes and a second surface on a side opposite to the first surface. The support member has higher rigidity than rigidity of the movable member, covers a part of a region of the second surface, in which the opening is not located as viewed in a direction perpendicular to the second surface, and is fixed to the member.

What is claimed is: 
     
         1 . A valve module, comprising:
 a movable member constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having at least one opening through which the fluid passes and a second surface on a side opposite to the first surface; and   a support member controlling the movable member.   
     
     
         2 . The valve module according to  claim 1 , further comprising
 an overlapping region in which the movable member and the support member overlap each other and a non-overlapping region in which only the support member is located.   
     
     
         3 . The valve module according to  claim 2 , wherein
 the first non-overlapping region and the second non-overlapping region have different areas.   
     
     
         4 . The valve module according to  claim 1 , wherein
 the support member is fixed to the member.   
     
     
         5 . The valve module according to  claim 2 , further comprising
 an end portion of the support member that defines a boundary between the overlapping region and the non-overlapping region has a straight line shape or a shape including a curve line-shaped portion.   
     
     
         6 . The valve module according to  claim 1 , wherein
 the member has a plurality of openings.   
     
     
         7 . The valve module according to  claim 1 , wherein
 at least one opening shape includes a curve line-shaped portion.   
     
     
         8 . The valve module according to  claim 1 , wherein
 at least one opening shape is circular shape.   
     
     
         9 . The valve module according to  claim 1 , wherein
 at least one opening shape is polygonal shape.   
     
     
         10 . The valve module according to  claim 1 , wherein
 at least one opening has a length of 1 mm to 2 mm in a y-axis direction,   the opening has a length of 0.1 mm to 0.5 mm in an x-axis direction, and   the x-axis direction is perpendicular to the y-axis direction and is in a common plane with the y-axis direction.   
     
     
         11 . A fluid control apparatus, comprising:
 a space in which a fluid is capable of flowing;   two plate-like members, which are opposite to each other with the space between the two plate-like members and at least one of which includes an elastic body having flexibility;   a drive mechanism that bends the elastic body and varies volume of the space;   an opening, which is provided in a member and through which the fluid that flows inside and outside the space passes; and   a valve module, comprising:
 a movable member constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having at least one opening through which the fluid passes and a second surface on a side opposite to the first surface; and 
 a support member controlling the movable member. 
   
     
     
         12 . The fluid control apparatus according to  claim 11 , further comprising
 a recess portion on which the valve module is mounted, wherein   the valve module is positioned in such a manner that an end portion of the valve module is brought into contact with an inner surface of the recess portion.   
     
     
         13 . The fluid control apparatus according to  claim 11 , wherein
 the opening includes an intake port that sucks the fluid into the space and an exhaust port that discharges from the space into the fluid, and   the intake port and the exhaust port are different in number.   
     
     
         14 . The fluid control apparatus according to  claim 11 , wherein
 the opening includes an intake port that sucks the fluid into the space and an exhaust port that discharges from the space into the fluid,   the valve module is disposed in each of the intake port and the exhaust port, and   the movable member of the valve module provided in the intake port and the movable member of the valve module provided in the exhaust port are different in thickness and/or shape.   
     
     
         15 . The fluid control apparatus according to  claim 11 , wherein
 the opening includes an intake port that sucks the fluid into the space and an exhaust port that discharges from the space into the fluid,   the valve module is disposed in each of the intake port and the exhaust port, and   the support member of the valve module provided in the intake port and the support member of the valve module provided in the exhaust port are different in shape.   
     
     
         16 . The fluid control apparatus according to  claim 11 , wherein
 the opening includes an intake port that sucks the fluid into the space and an exhaust port that discharges from the space into the fluid,   the valve module is disposed in each of the intake port and the exhaust port, and   the movable member of the valve module provided in the intake port and the movable member of the valve module provided in the exhaust port are different in material.   
     
     
         17 . The fluid control apparatus according to  claim 11 , wherein
 the opening includes an intake port that sucks the fluid into the space and an exhaust port that discharges from the space into the fluid, and   at least one of the intake port or the exhaust port is provided in the elastic body and the valve module is mounted on the elastic body.   
     
     
         18 . The valve module according to  claim 11 , further comprising
 an overlapping region in which the movable member and the support member overlap each other and a non-overlapping region in which only the support member is located, and   an end portion of the support member that defines a boundary between the overlapping region and the non-overlapping region has a straight line shape or a shape including a curve line-shaped portion.   
     
     
         19 . The valve module according to  claim 10 , wherein
 at least one opening shape includes a curve line-shaped portion.   
     
     
         20 . An electronic apparatus, comprising
 a fluid control apparatus including:
 a space in which a fluid is capable of flowing; 
 two plate-like members, which are opposite to each other with the space between the two plate-like members and at least one of which includes an elastic body having flexibility; 
 a drive mechanism that bends the elastic body and varies volume of the space; 
 an opening, which is provided in a member and through which the fluid that flows inside and outside the space passes; and 
 a valve module, comprising:
 a movable member constituted by a film elastically deformable by a fluid and having a first surface positioned on a side of a member having at least one opening through which the fluid passes and a second surface on a side opposite to the first surface; and 
 a support member controlling the movable member.