US2024395652A1PendingUtilityA1
Package structure including a package lid having a patterned bottom surface and methods of forming the same
Assignee: TAIWAN SEMICONDUCTOR MFG CO LTDPriority: May 22, 2023Filed: May 22, 2023Published: Nov 28, 2024
Est. expiryMay 22, 2043(~16.8 yrs left)· nominal 20-yr term from priority
H10W 90/736H10W 72/07332H10W 76/15H10W 40/70H10W 40/22H01L 2224/83201H01L 2224/32245H01L 24/83H01L 24/32H01L 23/42H01L 23/053H01L 23/367
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Claims
Abstract
A package structure includes a package substrate, a package module on the package substrate, a thermal interface material (TIM) layer on the package module, and a package lid on the TIM layer. The package lid includes a package lid foot portion attached to the package substrate, and a package lid plate portion on the package lid foot portion and including a patterned bottom surface having a plurality of recessed portions, wherein at least a portion of the TIM layer is located in the plurality of recessed portions.
Claims
exact text as granted — not AI-modifiedWhat is claimed is:
1 . A package structure, comprising:
a package substrate; a package module on the package substrate; a thermal interface material (TIM) layer on the package module; and a package lid on the TIM layer, comprising:
a package lid foot portion attached to the package substrate; and
a package lid plate portion including a patterned bottom surface having a plurality of recessed portions, wherein at least a portion of the TIM layer is located in the plurality of recessed portions.
2 . The package structure of claim 1 , wherein the TIM layer comprises one of a polymer-based phase change material or a low-melting-temperature metal.
3 . The package structure of claim 1 , wherein the TIM layer has a first thickness at the plurality of recessed portions and a second thickness less than the first thickness outside the plurality of recessed portions, and the first thickness is in a range from 50 μm to 1000 μm.
4 . The package structure of claim 3 , wherein a ratio of a depth of the plurality of recessed portions to the first thickness of the TIM layer is in a range from 0.2 to 0.8.
5 . The package structure of claim 1 , wherein the plurality of recessed portions are substantially filled by the TIM layer.
6 . The package structure of claim 1 , wherein a width of the plurality of recessed portions is in a range from 100 μm to 1000 μm.
7 . The package structure of claim 1 , wherein the plurality of recessed portions are arranged in staggered array having a plurality of columns, wherein the plurality of recessed portions within a column of the plurality of columns are separated by a distance in a range from 100 μm to 1000 μm.
8 . The package structure of claim 7 , wherein the column of the plurality of columns is separated from an adjacent column of the plurality of columns by a distance in a range from 100 μm to 1000 μm.
9 . The package structure of claim 1 , wherein a concentration of the plurality of recessed portions varies over the patterned bottom surface.
10 . The package structure of claim 1 , wherein the plurality of recessed portions comprises one of a hexagon shape, a round shape, and oval shape, a capsule shape, a rounded rectangular shape, a square shape, a rectangular shape, a triangular shape, a trapezoid shape and a diamond shape.
11 . The package structure of claim 1 , further comprising:
a surface mount device (SMD) attached to the package substrate between the package lid foot portion and the package module.
12 . The package structure of claim 11 , wherein the SMD comprises one of a rectifier, capacitor or voltage regulator.
13 . The package structure of claim 1 , wherein an outermost recessed portion of the plurality of recessed portions is located over the package module.
14 . The package structure of claim 13 , wherein a distance between an outer sidewall of the package module and the outermost recessed portion is in a range from 0.5 mm to 1.0 mm.
15 . A method of forming a package structure, comprising:
forming a package lid comprising a package lid foot portion and a package lid plate portion on the package lid foot portion, wherein the package lid plate portion comprises a patterned bottom surface having a plurality of recessed portions; attaching a package module to a package substrate; placing a thermal interface material (TIM) layer on the package module; and attaching the package lid to the package substrate such that the package lid plate portion is on the package module and at least a portion of the TIM layer is disposed in the plurality of recessed portions.
16 . The method of claim 15 , wherein the attaching of the package lid to the package substrate comprises pressing the patterned bottom surface of the package lid plate portion onto the TIM layer such that the plurality of recessed portions are substantially filled with the TIM layer.
17 . The method of claim 15 , wherein the forming of the package lid comprises forming a width of the plurality of recessed portions to be in a range from 100 μm to 1000 μm.
18 . The method of claim 15 , wherein the forming of the package lid comprises forming the plurality of recessed portions to be arranged in staggered array having a plurality of columns, wherein the plurality of recessed portions within a column of the plurality of columns are separated by a distance in a range from 100 μm to 1000 μm.
19 . The method of claim 18 , wherein the forming of the package lid comprises forming the column of the plurality of columns to be separated from an adjacent column of the plurality of columns by a distance in a range from 100 μm to 1000 μm.
20 . A package structure, comprising:
a package substrate; a package module on the package substrate; a package lid over the package module, comprising:
a plate portion having a bottom surface including recessed structures; and
a foot portion connected to the plate portion and attached to the package substrate; and
a thermal interface material (TIM) layer between the package module and the bottom surface of the plate portion.Join the waitlist — get patent alerts
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