US2024367284A1PendingUtilityA1

Grinding apparatus and crystal orientation adjustment fixture thereof

Assignee: GLOBALWAFERS CO LTDPriority: May 4, 2023Filed: May 2, 2024Published: Nov 7, 2024
Est. expiryMay 4, 2043(~16.8 yrs left)· nominal 20-yr term from priority
B24B 5/50B24B 47/22B24B 41/06B24B 41/061
74
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Claims

Abstract

A grinding apparatus and a crystal orientation adjustment fixture thereof are provided. The crystal orientation adjustment fixture includes a fixing seat, an adjustment body, a first adjustment component, and a universal mandrel module. The adjustment body is assembled to the fixing seat through a rear end surface thereof. The adjustment body has a universal slot recessed in a front end surface thereof and a first adjustment slot formed along an adjustment direction, and a bottom of the first adjustment slot corresponds in position to the fixing seat. The first adjustment component is movably assembled in the first adjustment slot along the adjustment direction and abuts against the fixing seat. The universal mandrel module is rotatably assembled in the universal slot. The first adjustment component is adjustable along the adjustment direction to move the adjustment body relative to the fixing seat along the adjustment direction.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . A grinding apparatus, comprising:
 a grinding machine including two rotational shafts arranged along an arrangement axis; and   two crystal orientation adjustment fixtures respectively assembled to the rotational shafts and configured to respectively clamp two ends of a to-be-processed object, wherein each of the two crystal orientation adjustment fixtures includes:
 a fixing seat assembled to the corresponding rotational shaft; 
 an adjustment body having a rear end surface and a front end surface that is opposite to the rear end surface, wherein the adjustment body is assembled to the fixing seat through the rear end surface, and wherein the adjustment body has a universal slot recessed in the front end surface, and the adjustment body has a first adjustment slot that is recessed along an adjustment direction and that has a bottom corresponding in position to the fixing seat; 
 a first adjustment component movably assembled to the first adjustment slot along the adjustment direction and abutting against the fixing seat; and 
 a universal mandrel module rotatably assembled to the universal slot and configured to abut against the to-be-processed object; 
   wherein the first adjustment components of the two crystal orientation adjustment fixtures and the arrangement axis are arranged on an adjustment plane, and the two first adjustment components are diagonally opposite to each other;   wherein the two first adjustment components are adjustable along the adjustment direction by a same distance, such that the two adjustment bodies are moved relative to the two fixing seats along the adjustment direction and are respectively moved in two opposite directions away from each other, thereby rotating the to-be-processed object in the adjustment plane.   
     
     
         2 . The grinding apparatus according to  claim 1 , wherein each of the two crystal orientation adjustment fixtures further includes a second adjustment component, and wherein, in each of the two crystal orientation adjustment fixtures, the adjustment body has a second adjustment slot that is recessed along an extending path of the first adjustment slot and that has a bottom corresponding in position to the fixing seat, the second adjustment component is movably assembled to the second adjustment slot along the adjustment direction and abuts against the fixing seat, and the second adjustment component is arranged on the adjustment plane. 
     
     
         3 . The grinding apparatus according to  claim 2 , wherein, in each of the two crystal orientation adjustment fixtures, each of the first adjustment slot and the second adjustment slot is an inner threaded slot, each of the first adjustment component and the second adjustment component is a stop screw, and the adjustment direction is perpendicular to the arrangement axis. 
     
     
         4 . The grinding apparatus according to  claim 1 , wherein, in each of the two crystal orientation adjustment fixtures, the rear end surface of the adjustment body has at least one slanting surface, an angle between the at least one of slanting surface and the arrangement axis is within a range from 30 degrees to 60 degrees, and the adjustment body tightly abuts against the fixing seat through the at least one slanting surface. 
     
     
         5 . The grinding apparatus according to  claim 4 , wherein, in each of the two crystal orientation adjustment fixtures, a quantity of the at least one slanting surface is two, and wherein, in each of the two crystal orientation adjustment fixtures, the two slanting surfaces are mirror-symmetrical relative to the arrangement axis, and the fixing seat and a part of the rear end surface other than the two slanting surfaces have a gap therebetween. 
     
     
         6 . The grinding apparatus according to  claim 1 , wherein, in each of the two crystal orientation adjustment fixtures, the universal mandrel module includes:
 a universal bearing kit assembled in the universal slot; and   a mandrel head including a plate and a column that is connected to the plate, wherein the plate is configured to abut against the to-be-processed object, the mandrel head is assembled to the universal bearing kit through the column, and the mandrel head is rotatable relative to the adjustment body through the universal bearing kit.   
     
     
         7 . The grinding apparatus according to  claim 6 , wherein, in each of the two crystal orientation adjustment fixtures, the adjustment body has a plurality of buffering slots that are recessed in the front end surface and that surround the universal slot, the universal mandrel module includes a plurality of buffering components respectively assembled to the buffering slots, and an end of each of the buffering components protrudes from the corresponding buffering slot and abuts against the plate. 
     
     
         8 . The grinding apparatus according to  claim 7 , wherein, in each of the two crystal orientation adjustment fixtures, the adjustment body has an airflow channel that is recessed in the rear end surface and that is in spatial communication with the buffering slots. 
     
     
         9 . A crystal orientation adjustment fixture of a grinding apparatus, comprising:
 a fixing seat;   an adjustment body having a rear end surface and a front end surface that is opposite to the rear end surface, wherein the adjustment body is assembled to the fixing seat through the rear end surface, and wherein the adjustment body has a universal slot recessed in the front end surface, and the adjustment body has a first adjustment slot that is recessed along an adjustment direction and that has a bottom corresponding in position to the fixing seat;   a first adjustment component movably assembled to the first adjustment slot along the adjustment direction and abutting against the fixing seat; and   a universal mandrel module rotatably assembled to the universal slot and configured to abut against one end of a to-be-processed object.   
     
     
         10 . The crystal orientation adjustment fixture according to  claim 9 , further comprising a second adjustment component, wherein the adjustment body has a second adjustment slot that is recessed along an extending path of the first adjustment slot and that has a bottom corresponding in position to the fixing seat, and the second adjustment component is movably assembled to the second adjustment slot along the adjustment direction and abuts against the fixing seat.

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