Multi-Blade Trimming and Dressing Tool

Abstract

An apparatus includes a first platen configured to hold a first workpiece; a first dressing board; and blade holder including arms extending from a central axis, wherein the blade holder is configured to hold a blade at an end of each respective arm, wherein the blade holder is operable to rotate around the central axis, wherein the blade holder is configured to trim the first workpiece using at least one blade, wherein the blade holder is configured to dress at least one blade on the first dressing board.

What is claimed is: 
     
         1 . An apparatus comprising:
 a first platen configured to hold a first workpiece;   a first dressing board; and   blade holder comprising a plurality of arms extending from a central axis, wherein the blade holder is configured to hold a blade at an end of each respective arm, wherein the blade holder is operable to rotate around the central axis, wherein the blade holder is configured to trim the first workpiece using at least one blade, wherein the blade holder is configured to dress at least one blade on the first dressing board.   
     
     
         2 . The apparatus of  claim 1  further comprising a second platen configured to hold a second workpiece, wherein the blade holder is configured to simultaneously trim the first workpiece using one blade and trim the second workpiece using another blade. 
     
     
         3 . The apparatus of  claim 1  further comprising a second dressing board, wherein the blade holder is configured to simultaneously dress one blade on the first dressing board and another blade on the second dressing board. 
     
     
         4 . The apparatus of  claim 1 , wherein the blade holder has four arms. 
     
     
         5 . The apparatus of  claim 1  further comprising a sensor arm configured to measure a condition of a trimmed region of the first workpiece. 
     
     
         6 . The apparatus of  claim 1 , wherein the blade holder further comprises a sensor configured to measure a condition of a blade held by the blade holder. 
     
     
         7 . The apparatus of  claim 1 , wherein each arm of the blade holder comprises an actuator, wherein each actuator is configured to extend or retract the blade at the end of the respective arm. 
     
     
         8 . The apparatus of  claim 1 , wherein the first dressing board comprises a first region corresponding to a first blade grit size and a second region corresponding to a second blade grit size. 
     
     
         9 . A trimming tool comprising:
 a blade holder comprising a plurality of arms, wherein the blade holder holds a plurality of blades, wherein each arm holds a respective blade;   a plurality of platens, wherein each platen is configured to hold a respective wafer, wherein the plurality of platens is aligned with a first set of arms of the plurality of arms; and   a plurality of dressing boards, wherein the plurality of dressing boards is aligned with a second set of arms of the plurality of arms.   
     
     
         10 . The trimming tool of  claim 9 , wherein the plurality of blades are in a cross-shaped arrangement. 
     
     
         11 . The trimming tool of  claim 9 , wherein the plurality of blades comprises at least two different types of blades. 
     
     
         12 . The trimming tool of  claim 9 , wherein the plurality of dressing boards comprises at least two different types of dressing boards. 
     
     
         13 . The trimming tool of  claim 9 , wherein the blade holder is operable to rotate to align the plurality of platens with the second set of arms and the plurality of dressing boards with the first set of arms. 
     
     
         14 . The trimming tool of  claim 9 , wherein the plurality of platens comprises a first platen of the plurality of platens that is located above a second platen of the plurality of platens. 
     
     
         15 . The trimming tool of  claim 9 , wherein each dressing board of the plurality of dressing boards is configured to rotate independently. 
     
     
         16 . A method comprising:
 rotating a blade holder to align a first blade of the blade holder with a first platen and a second blade of the blade holder with a first dressing board;   trimming a first workpiece on the first platen using the first blade;   dressing the second blade using the dressing board;   rotating the blade holder to align the second blade of the blade holder with the first platen; and   trimming a second workpiece on the first platen using the second blade.   
     
     
         17 . The method of  claim 16  further comprising rotating the dressing board after dressing the second blade. 
     
     
         18 . The method of  claim 16 , wherein rotating the blade holder to align the first blade with the first workpiece also aligns a third blade with a third workpiece. 
     
     
         19 . The method of  claim 18  further comprising trimming the third workpiece using the third blade while the first workpiece is trimmed using the first blade. 
     
     
         20 . The method of  claim 16 , wherein the first blade has a course grit size and the second blade has a fine grit size.