Film forming apparatus for forming metal film

Abstract

A mask structure includes a screen mask having a penetrating portion with a predetermined pattern. The screen mask includes a mesh portion having an opening formed in a grid pattern, and a mask portion having the penetrating portion and being fixed to the mesh portion so as to face the substrate. The mask portion includes a core portion that retains the shape of the mask portion, and a seal portion made of an elastic material softer than the material of the core portion and contacting the substrate.

What is claimed is: 
     
         1 . A film forming apparatus for forming a metal film having a predetermined pattern on a substrate by electroplating, with a mask structure sandwiched between an electrolyte membrane and a substrate,
 wherein:   the film forming apparatus includes a pressing mechanism that presses the mask structure by the electrolyte membrane with a fluid pressure of a plating solution,   the mask structure includes a screen mask in which a penetrating portion having the predetermined pattern is formed,   the screen mask includes a mesh portion having an opening formed in a grid pattern, and a mask portion having the penetrating portion and being fixed to the mesh portion so as to face the substrate, and   the mask portion includes a core portion that retains a shape of the mask portion, and a seal portion made of an elastic material softer than a material of the core portion and adapted to contact the substrate.   
     
     
         2 . The film forming apparatus for forming a metal film according to  claim 1 , wherein the seal portion extends along a side wall surface forming the penetrating portion. 
     
     
         3 . The film forming apparatus for forming a metal film according to  claim 1 ,
 wherein:   the core portion includes an opposite surface facing the substrate and a side wall surface forming the penetrating portion, and   the seal portion is formed along a ridgeline formed by the opposite surface and the side wall surface.   
     
     
         4 . The film forming apparatus for forming a metal film according to  claim 1 , wherein hardness of the mask portion gradually increases from the seal portion toward the core portion.