Apparatus for the production of nanoparticles and method for producing nanoparticles

Abstract

A method for producing nanoparticles is provided. The method comprises the steps of providing a main tube that is closed at a bottom of the main tube and that comprises a sample position at the bottom, providing a main opening in the main tube, positioning a precursor material at the sample position, evaporating the precursor material by heating the precursor material by a heating device that is in thermal contact with the main tube, and providing a stream of a primary gas into the main tube through an inlet channel which is arranged within the main tube, wherein a cross section of the main tube at the sample position is smaller than at other positions of the main tube.

1 . A method for producing nanoparticles, comprising:
 providing a main tube that is closed at a bottom of the main tube and that comprises a sample position at the bottom,   providing a main opening in the main tube,   positioning a precursor material at the sample position,   evaporating the precursor material by heating the precursor material by a heating device that is in thermal contact with the main tube, and   providing a stream of a primary gas into the main tube through an inlet channel which is arranged within the main tube, wherein   a cross section of the main tube at the sample position is smaller than at other positions of the main tube.   
     
     
         2 . The method according to  claim 1 , wherein a main direction of extension of the stream of primary gas encloses an angle of at least 0° and at most 45° with the direction of the gravitational force. 
     
     
         3 . The method according to  claim 1 , wherein a primary dilution and/or a secondary dilution are provided to the nanoparticles. 
     
     
         4 . The method according to  claim 3 , wherein an outlet tube is connected to the main opening of the main tube, the outlet tube comprises a first opening and a second opening, and for the primary dilution, a dilution gas is provided to the first opening of the outlet tube. 
     
     
         5 . The method according to  claim 3 , wherein an outlet tube is connected to the main opening of the main tube, the outlet tube comprises a first opening and a second opening, and for the secondary dilution, a dilution gas is provided at the second opening of the outlet tube. 
     
     
         6 . The method according to  claim 1 , wherein an outlet tube is connected to the main opening of the main tube, and the outlet tube comprises a first opening and a second, wherein the connection of the outlet tube to the main tube is arranged between the first opening and the second opening of the outlet tube. 
     
     
         7 . The method according to  claim 1 , wherein an outlet channel extends parallel to the inlet channel within the main tube and the outlet channel is connected with the main opening, and the outlet channel has the same length as the inlet channel along a main axis of extension of the main tube. 
     
     
         8 . The method according to  claim 1 , wherein the inlet channel is formed by an inlet tube that is arranged within the main tube and extends further outside of the main tube, and the inlet tube extends through an outlet tube. 
     
     
         9 . The method according to  claim 1 , wherein an outlet tube is arranged within the main tube, and the outlet tube extends through the inlet channel. 
     
     
         10 . The method according to  claim 9 , wherein the outlet tube extends further outside of the main tube. 
     
     
         11 . The method according to  claim 1 , wherein the main tube is at least partially mounted within a holder and the sample position is arranged at a variable distance with respect to the holder. 
     
     
         12 . The method according to  claim 1 , wherein the precursor material comprises a metal. 
     
     
         13 . The method according to  claim 1 , wherein the primary gas is provided to the inlet channel by a mass flow controller. 
     
     
         14 . A method for producing nanoparticles, the method comprising the steps of:
 providing a main tube that is closed at a bottom of the main tube and that comprises a sample position at the bottom,   providing a main opening in the main tube,   positioning a precursor material at the sample position,   evaporating the precursor material by heating the precursor material by a heating device that is in thermal contact with the main tube, and   providing a stream of a primary gas into the main tube through an inlet channel which is arranged within the main tube, wherein   a cross section of the main tube at the sample position is smaller than at other positions of the main tube, and   a main direction of extension of the stream of primary gas encloses an angle of at least 0° and at most 45° with the direction of the gravitational force.