Pump apparatus and system

Abstract

The present discloses a pump apparatus having a first pump and at least one controller. The at least one controller is suitable for generating a first control signal for controlling the first pump. The at least one controller is suitable for generating a second control signal for controlling operation of a second pump. The second pump is external to the pump apparatus. One or more pump connection port is provided in the pump apparatus for outputting the second control signal to the second pump. The present disclosure also relates to a vacuum system comprising a pump apparatus of the type described herein.

1 . A pump apparatus comprising:
 a first pump;   at least one controller for generating:
 a first control signal for controlling the first pump; and 
 a second control signal for controlling a second pump; 
   wherein the second pump is external to the pump apparatus and the pump apparatus comprises one or more pump connection port for outputting the second control signal to the second pump.   
     
     
         2 . The pump apparatus as claimed in  claim 1 , wherein the at least one controller comprises at least one electronic processor and a memory device, the at least one electronic processor having:
 at least one electrical input for receiving an input signal; and   at least one electrical output for outputting the first control signal to the first pump and/or the second control signal to the second pump.   
     
     
         3 . The pump apparatus as claimed in  claim 1 , wherein the at least one controller is configured to receive an operating signal indicating one or more operating parameter of the second pump. 
     
     
         4 . The pump apparatus as claimed in  claim 3 , wherein the at least one controller is configured to control operation of the first pump and/or the second pump in dependence on the operating signal. 
     
     
         5 . The pump apparatus as claimed in  claim 1 , wherein the at least one controller is configured to receive a pressure request signal indicating a target operating pressure for a process chamber. 
     
     
         6 . The pump apparatus as claimed in  claim 5  comprising at least one input device configured to generate the pressure request signal in dependence on a user input, wherein the user input identifies one of a plurality of operating processes, the at least one controller being configured to generate the pressure request signal in dependence on the identified one of the plurality of operating processes. 
     
     
         7 . The pump apparatus as claimed in  claim 1 , comprising a first pressure sensor for measuring an inlet pressure or an outlet pressure of the first pump. 
     
     
         8 . The pump apparatus as claimed in  claim 7 , wherein the at least one controller is configured to control operation of the second pump in dependence on the measured inlet pressure or outlet pressure of the first pump. 
     
     
         9 . The pump apparatus as claimed in  claim 1 , wherein the at least one controller comprises an input for receiving an operating pressure signal indicating an operating pressure in a process chamber; the at least one controller being configured to control operation of the first pump and/or the second pump in dependence on the operating pressure signal. 
     
     
         10 . The pump apparatus as claimed in  claim 1  comprising:
 a first power supply for supplying electric power to the first pump; and 
 a second power supply for supplying electric power to the second pump. 
 
     
     
         11 . The pump apparatus as claimed in  claim 1  comprising a power outlet for supplying electric power to the second pump. 
     
     
         12 . The pump apparatus as claimed in  claim 1 , wherein the first pump comprises a primary pump for a vacuum system. 
     
     
         13 . A vacuum system comprising:
 a pump apparatus as claimed in  claim 1 , the pump apparatus comprising a first pump and at least one controller; and   a second pump disposed externally of the pump apparatus;   the at least one controller being disposed in the pump apparatus and being configured to control operation of the first pump and the second pump.   
     
     
         14 . The vacuum system as claimed in  claim 13 , wherein the second pump is a secondary pump for a vacuum system. 
     
     
         15 . A controller for controlling a first pump and a second pump, the controller being configured to receive a first pressure signal indicating an operating pressure of a first pump and a second pressure signal indicating an operating pressure of a second pump; the controller being configured to generate:
 a first control signal for controlling the first pump; and   a second control signal for controlling the second pump;   wherein the first and second control signals are generated in dependence on the first and second pressure signals.   
     
     
         16 . The controller as claimed in  claim 15  comprising at least one electronic processor and a memory device, the at least one electronic processor having:
 at least one electrical input for receiving the first pressure signal and the second pressure signal; and 
 at least one electrical pump connection port for outputting the first control signal to the first pump and the second control signal to the second pump. 
 
     
     
         17 . A pump apparatus comprising a controller as claimed in  claim 15  or  claim 16 . 
     
     
         18 . The pump apparatus as claimed in  claim 17 , wherein the first pump is disposed in the pump apparatus; and the pump apparatus comprises one or more pump connection port for electrical connection to the second pump which is external of the pump apparatus.