Substrate transfer system and atmospheric transfer module

Abstract

A substrate transfer system includes a load lock module, an atmospheric transfer module having a first sidewall adjacent to the load lock module and a second sidewall remote from the load lock module, the atmospheric transfer module being connected to the load lock module, and a substrate transfer robot disposed in the atmospheric transfer module. The substrate transfer robot includes a base configured to reciprocate along the first sidewall, a substrate transfer arm disposed on the base, and a flow rectifier surrounding the base, the flow rectifier being configured, upon movement of the base, to create an obliquely downward air flow in a direction opposite to a moving direction of the base.

1 . A transfer system comprising:
 an atmospheric transfer module having a front face and a rear face opposite to the front face;   a load lock module having a front face and a rear face opposite to the front face, the front face of the load lock module being connected to the rear face of the atmospheric transfer module;   a vacuum transfer module having a front face, a rear face opposite to the front face, and a lateral face between the front face and the rear face, the front face of the vacuum transfer module being connected to the rear face of the load lock module;   a substrate processing module connected to the lateral face of the vacuum transfer module; and   an aligner module disposed between the atmospheric transfer module and the substrate processing module, the aligner module having a front face and a rear face opposite to the front face, the front face of the aligner module being connected to the rear face of the atmospheric transfer module, the rear face of the aligner module facing the substrate processing module.   
     
     
         2 . The transfer system of  claim 1 , further comprising:
 a storage module disposed between the atmospheric transfer module and the substrate processing module, the storage module having a front face and a rear face opposite to the front face, the front face of the storage module being connected to the rear face of the atmospheric transfer module, the rear face of the storage module facing the substrate processing module.   
     
     
         3 . The transfer system of  claim 2 , wherein the storage module is disposed adjacent to the aligner module. 
     
     
         4 . The transfer system of  claim 2 , wherein the aligner module is disposed between the storage module and the load lock module. 
     
     
         5 . The transfer system of  claim 1 , further comprising:
 a plurality of storage modules disposed between the atmospheric transfer module and the substrate processing module, each of the plurality of storage modules having a front face and a rear face opposite to the front face, the front face of each of the plurality of storage modules being connected to the rear face of the atmospheric transfer module, the rear face of each of the plurality of storage modules facing the substrate processing module.   
     
     
         6 . The transfer system of  claim 5 , wherein a first storage module of the plurality of storage modules is disposed adjacent to the aligner module. 
     
     
         7 . The transfer system of  claim 6 , wherein the aligner module is disposed between the first storage module and the load lock module. 
     
     
         8 . The transfer system of  claim 5 , wherein the plurality of storage modules include a first storage module and a second storage module, the load lock module is disposed between the first storage module and the second storage module. 
     
     
         9 . The transfer system of  claim 1 , wherein the aligner module is disposed adjacent to the load lock module. 
     
     
         10 . The transfer system of  claim 1 , wherein the aligner module is configured to correct misalignment of an edge ring 
     
     
         11 . The transfer system of  claim 10 , further comprising:
 an additional aligner module disposed between the atmospheric transfer module and the substrate processing module, the additional aligner module having a front face and a rear face opposite to the front face, the front face of the additional aligner module being connected to the rear face of the atmospheric transfer module, the rear face of the additional aligner module facing the substrate processing module,   wherein the additional aligner module is configured to correct misalignment of a substrate.   
     
     
         12 . The transfer system of  claim 1 , wherein the aligner module is configured to correct misalignment of a substrate. 
     
     
         13 . A transfer system comprising:
 an atmospheric transfer module having a front face and a rear face opposite to the front face;   a plurality of load lock modules, each of the plurality of load lock modules having a front face and a rear face opposite to the front face, the front face of each of the plurality of load lock modules being connected to the rear face of the atmospheric transfer module;   a vacuum transfer module having a front face, a rear face opposite to the front face, and a lateral face between the front face and the rear face, the front face of the vacuum transfer module being connected to the rear face of each of the plurality of load lock modules;   a substrate processing module connected to the lateral face of the vacuum transfer module; and   a plurality of storage modules disposed between the atmospheric transfer module and the substrate processing module, each of the plurality of storage modules having a front face and a rear face opposite to the front face, the front face of each the plurality of storage modules being connected to the rear face of the atmospheric transfer module, the rear face of each of the plurality of storage modules facing the substrate processing module.   
     
     
         14 . The transfer system of  claim 14 , wherein the plurality of storage modules include a first storage module and a second storage module, the plurality of load lock modules are disposed between the first storage module and the second storage module. 
     
     
         15 . An aligner module comprising:
 a rotating unit having a body and a plurality of ring supporting portions extending from the body to outward;   a driving unit configured to rotate the rotating unit;   a detector configured to detect a reference shape of the edge ring during which the edge ring on the plurality of ring supporting portions is rotated by rotation of the rotating unit; and   a controller configured to correct misalignment of the edge ring based on a rotation angle of the edge ring when the reference shape of the edge ring is detected by the detector.   
     
     
         16 . The aligner module of  claim 16 , wherein
 an upper surface of the body serves as a substrate support, and   the detector is further configured to detect a reference shape of the substrate during which the substrate on the substrate support is rotated by rotation of the rotating unit.   
     
     
         17 . The aligner module of  claim 17 , wherein the detector includes:
 a light emitting unit configured to radiate a light in a vertical direction, and   a light receiving unit disposed above or below the light emitting unit and configured to receive the light from the light emitting unit.