Compliant Pin Probes with Multiple Spring Segments and Compression Spring Deflection Stabilization Structures, Methods for Making, and Methods for Using

Abstract

Embodiments are directed to probe structures, arrays, methods of using probes and arrays, and/or methods for making probes and/or arrays. In the various embodiments, probes include at least two flat spring segments with at least one of those segments being used in a compressive manner wherein the probe additionally includes guide elements, framing structures or other structural configurations that limit or inhibit one or more compressive spring segments from bowing or deflecting out of a desired position when subjected to loading.

What is claimed is: 
     
         1 . A probe for testing a device under test (DUT), comprising:
 a first tip for making electrical contact to an electrical circuit element, the first tip having a first contact region and a first connection region;   a first extension arm connecting directly or indirectly to the first connection region of the first tip;   a compliant structure comprising at least one first spring segment, wherein a first region of the compliant structure connects directly or indirectly to the first extension arm;   a second extension arm connecting directly or indirectly to a second connection region of the compliant structure such that relative displacement of the first extension arm and the second extension arm results in elastic movement of the at least one first spring segment of the compliant structure; and   a second tip having a first connection region and a second region wherein the first connection region joins the second extension arm, wherein the at least one first spring segment undergoes increased compression upon relative displacement of the first tip and the second tip toward one another along a longitudinal axis of the probe,   wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of: (1) a tip for making a contact connection, and (2) a tip for making an attached connection.   
     
     
         2 . The probe of  claim 1  further comprising a guidance structure that limits elastic movement of the compliant structure to substantially longitudinal movement along a longitudinal axis of the probe. 
     
     
         3 . The probe of  claim 2  further comprising at least one structure that is directly or indirectly attached to an end of the at least one first spring segment for providing a function selected from a group consisting of: (1) providing a stop structure that moves with the end of the at least one first spring segment as the first tip and the second tip are moved relative to one another; and (2) providing for relative longitudinal motion of the first tip relative to the second tip while inhibiting excessive lateral motion of at least one of the first tip or the second tip. 
     
     
         4 . The probe of  claim 1  further comprising a rigid probe body providing a frame which supports a relative lateral positioning of the compliant structure, the first extension arm, and the second extension arm while allowing at least one of the first extension arm and first tip or the second extension arm and second tip to move longitudinally, via an external compressive force applied to the first and/or second tips, through a working range of longitudinally extended probe length to longitudinally compressed probe length while increasing a tensional force on the at least one first spring segment and moving longitudinally through a working range of longitudinally compressed probe length to extended probe length under a force of extension provided, at least in part, by the tensional force stored in the at least one first spring segment, wherein the rigid probe body extends from at least one end of the at least one first spring segment to the other end of the at least one first spring segment at a full working extension of the at least one first spring segment. 
     
     
         5 . The probe of  claim 1  wherein the at least one first spring segment comprises at least two spring segments that are joined together in a serial configuration. 
     
     
         6 . The probe of  claim 5  wherein the at least two joined spring segments operate in compression. 
     
     
         7 . The probe of  claim 1  wherein the at least one first spring segment comprises at least two flat spring segments wherein the at least two flat spring segments are spaced from one another and at least partially overlay one another in a face-to-face configuration. 
     
     
         8 . The probe of  claim 7  wherein the at least two flat spring segments are separated from one another by an intermediate surface against which at least one of the flat spring segments can slide. 
     
     
         9 . The probe of  claim 7 , wherein the compliant structure further comprises:
 a second flat spring segment that is a tensional spring segment that undergoes extension when the first tip and the second tip are pressed toward one another.   
     
     
         10 . The probe of  claim 1  wherein the at least one first spring segment has a configuration selected from a group consisting of: (1) a serpentine pattern, (2) a repeated pattern with C-shaped elements, (3) a repeated pattern with S-shaped elements, (4) a repeated pattern with pattern angled elements where the angles are under 90°, (5) a repeated pattern with saw-tooth shaped elements, (6) a repeated pattern with angled elements where the angles are 90°, and (7) a repeated pattern with sine-shaped elements. 
     
     
         11 . The probe of  claim 1  configured to have a first guide path for movement of a compression segment having a configuration selected from a group consisting of: (1) the first guide path is wider than a neighboring guide path for an adjacent spring segment; (2) the first guide path overlaps but is offset from a neighboring guide path for an adjacent spring segment; (3) the first guide path is bounded by a barrier material that at least partially separates the first guide path from a neighboring guide path such that the barrier material allows for separation of two first spring segments of the at least one first spring segment in neighboring paths while providing a smooth or low friction surface against which a compression spring segment can slide; (4) the first guide path provides a rail on which a compression spring segment can move with one or more of the at least one first spring segment or the rail providing at least a partial side wall, lip, or plurality of extended features that inhibit the compression spring segment from moving an excessive amount laterally. 
     
     
         12 . The probe of  claim 11  wherein the compression spring segment has a compressive width that is captured at least around its edges and a portion of its front and back faces by elements defining a compressive movement slot that inhibits excessive non-longitudinal movement of the compression spring segment. 
     
     
         13 . The probe of  claim 11  further comprising a sheath having a compressive slot with a compressive width for compressive movement of the compression spring segment while the sheath also has a tensional slot with a tensional width for tensional movement of a tensional spring segment, wherein the compressive width is larger than the tensional width and wherein the tensional width is smaller than the compressive width of the compression spring segment. 
     
     
         14 . The probe of  claim 11  further comprising a sheath having a compressive slot with a compressive width for compressive movement of the compression spring segment while the sheath also has a tensional slot with a tensional width for tensional movement of a tensional spring segment, wherein the compressive slot is shifted from the tensional slot such that the compressive slot and the tensional slot only partially overlap in a direction perpendicular to planes of the compression spring segment and the tensional spring segment. 
     
     
         15 . The probe of  claim 1  further comprising a sheath in which the compliant structure moves, the sheath at least partially encasing one or more of at least one first spring segment. 
     
     
         16 . The probe of  claim 15  wherein the sheath has a plurality of slots, each slot separated by a fixed barrier structure wherein one or more of the at least one first spring segment moves within a compressive slot and one or more other of the at least one first spring segment moves within a different slot. 
     
     
         17 . The probe of  claim 1  further comprising a sheath in which the compliant structure moves, the sheath at least partially encasing one or more of the at least one first spring segment and having a plurality of slots, each slot separated by a fixed barrier structure, wherein one of the at least one first spring segment moves within a compressive slot and one or more others of the at least one first spring segment moves within a different slot. 
     
     
         18 . A probe, comprising:
 a first tip for making electrical contact to an electrical circuit element, the first tip having a first contact region and a first connection region;   a first extension arm connecting directly or indirectly to the first connection region of the first tip;   a compliant structure comprising at least one first spring segment, wherein a first region of the compliant structure connects directly or indirectly to the first extension arm;   a second extension arm connecting directly or indirectly to a second connection region of the compliant structure such that relative displacement of the first extension arm and the second extension arm results in elastic movement of the at least one first spring segment of the compliant structure;   a second tip having a first connection region and a second region wherein the first connection region joins the second extension arm, wherein the at least one first spring segment undergoes increased compression upon relative displacement of the first tip and the second tip toward one another along a longitudinal axis of the probe, and   a guidance structure that limits elastic movement of the compliant structure to substantially longitudinal movement along a longitudinal axis of the probe,   wherein the second region of the second tip is configured for making an electrical connection to a second circuit element, wherein the configuration is selected from a group consisting of: (1) a tip for making a contact connection, and (2) a tip for making an attached connection.   
     
     
         19 . The probe of  claim 18  further comprising at least one structure that is directly or indirectly attached to an end of the at least one first spring segment for providing a function selected from a group consisting of: (1) providing a stop structure that moves with the end of the at least one first spring segment as the first tip and the second tip are moved relative to one another; and (2) providing for relative longitudinal motion of the first tip relative to the second tip while inhibiting excessive lateral motion of at least one of the first tip or the second tip. 
     
     
         20 . The probe of  claim 18  further comprising a rigid probe body providing a frame which supports a relative lateral positioning of the compliant structure, the first extension arm, and the second extension arm while allowing at least one of the first extension arm and first tip or the second extension arm and second tip to move longitudinally, via an external compressive force applied to the first and/or second tips, through a working range of longitudinally extended probe length to longitudinally compressed probe length while increasing a tensional force on the at least one first spring segment and moving longitudinally through a working range of longitudinally compressed probe length to extended probe length under a force of extension provided, at least in part, by the tensional force stored in the at least one first spring segment, wherein the rigid probe body extends from at least one end of the at least one first spring segment to the other end of the at least one first spring segment at a full working extension of the at least one first spring segment. 
     
     
         21 . The probe of  claim 18  wherein the at least one first spring segment comprises at least two spring segments that are joined together in a serial configuration. 
     
     
         22 . The probe of  claim 21  wherein the at least two joined spring segments operate in compression. 
     
     
         23 . The probe of  claim 18  wherein the at least one first spring segment comprises at least two flat spring segments, wherein the at least two flat spring segments are spaced from one another and at least partially overlay one another in a face-to-face configuration. 
     
     
         24 . The probe of  claim 23  wherein the at least two flat spring segments are separated from one another by an intermediate surface against which at least one of the flat spring segments can slide. 
     
     
         25 . The probe of  claim 23 , wherein the compliant structure further comprises:
 a second flat spring segment that is a tensional spring segment that undergoes extension when the first tip and the second tip are pressed toward one another.   
     
     
         26 . The probe of  claim 18  wherein the at least one first spring segment has a configuration selected from a group consisting of: (1) a serpentine pattern, (2) a repeated pattern with C-shaped elements, (3) a repeated pattern with S-shaped elements, (4) a repeated pattern with pattern angled elements where the angles are under 90°, (5) a repeated pattern with saw-tooth shaped elements, (6) a repeated pattern with angled elements where the angles are 90°, and (7) a repeated pattern with sine-shaped elements. 
     
     
         27 . The probe of  claim 18  configured to have a first guide path for movement of a compression segment having a configuration selected from a group consisting of: (1) the first guide path is wider than a neighboring guide path for an adjacent spring segment; (2) the first guide path overlaps but is offset from a neighboring guide path for an adjacent spring segment; (3) the first guide path is bounded by a barrier material that at least partially separates the first guide path from a neighboring guide path such that the barrier material allows for separation of two first spring segments of the at least one first spring segment in neighboring paths while providing a smooth or low friction surface against which a compression spring segment can slide; (4) the first guide path provides a rail on which a compression spring segment can move with one or more of the at least one first spring segment or the rail providing at least a partial side wall, lip, or plurality of extended features that inhibit the compression spring segment from moving an excessive amount laterally. 
     
     
         28 . The probe of  claim 27  wherein the compression spring segment has a compressive width that is captured at least around its edges and a portion of its front and back faces by elements defining a compressive movement slot that inhibits excessive non-longitudinal movement of the compression spring segment. 
     
     
         29 . The probe of  claim 27  further comprising a sheath having a compressive slot with a compressive width for compressive movement of the compression spring segment while the sheath also has a tensional slot with a tensional width for tensional movement of a tensional spring segment, wherein the compressive width is larger than the tensional width and wherein the tensional width is smaller than the compressive width of the compression spring segment. 
     
     
         30 . The probe of  claim 27  further comprising a sheath having a compressive slot with a compressive width for compressive movement of the compression spring segment while the sheath also has a tensional slot with a tensional width for tensional movement of a tensional spring segment, wherein the compressive slot is shifted from the tensional slot such that the compressive slot and the tensional slot only partially overlap in a direction perpendicular to planes of the compression spring segment and the tensional spring segment.