Line narrowing module, gas laser device, and electronic device manufacturing method

Abstract

A line narrowing module includes: a prism; a mirror including a reflective surface, first and second adjacent surfaces, and an opposing surface; a grating wavelength-dispersing light reflected by the reflective surface; a holding part holding the mirror; a first adhesive provided between the holding part and the first adjacent surface or between the holding part and the opposing surface and bonding the mirror to the holding part; a second adhesive provided between the holding part and the second adjacent surface and bonding the mirror to the holding part; and a driving unit rotating the holding part to rotate the mirror about an axis perpendicular to a plane where the light is wavelength-dispersed. The second adhesive is located on an opposite side of the first adhesive with respect to a center line of the mirror in parallel to the axis.

What is claimed is: 
     
         1 . A line narrowing module comprising:
 a prism;   a mirror including a reflective surface reflecting light transmitted through the prism, a first adjacent surface and a second adjacent surface adjacent to the reflective surface, and an opposing surface opposed to the reflective surface;   a grating that wavelength-disperses the light reflected by the reflective surface;   a holding part that holds the mirror;   a first adhesive provided between the holding part and the first adjacent surface or between the holding part and the opposing surface and bonding the mirror to the holding part;   a second adhesive provided between the holding part and the second adjacent surface and bonding the mirror to the holding part; and   a driving unit configured to rotate the holding part so that the mirror rotates about an axis perpendicular to a plane in which the light is wavelength-dispersed,   the second adhesive being located on an opposite side of the first adhesive with respect to a center line which passes through a center of the mirror in parallel to the axis when the reflective surface is viewed from front.   
     
     
         2 . The line narrowing module according to  claim 1 ,
 wherein the first adjacent surface is opposed to the second adjacent surface.   
     
     
         3 . The line narrowing module according to  claim 1 ,
 wherein a first normal line on an adhesive surface between the mirror and the first adhesive that adheres to the first adjacent surface intersects a second normal line on an adhesive surface between the second adhesive and the mirror on an inside of the mirror.   
     
     
         4 . The line narrowing module according to  claim 3 , further comprising a third adhesive located on an opposite side of the first adhesive with respect to the center line when the reflective surface is viewed from the front, the third adhesive being provided between the holding part and a third adjacent surface and bonding the mirror to the holding part, the third adjacent surface being adjacent to the reflective surface of the mirror, wherein
 the first normal line intersects a third normal line on an adhesive surface between the third adhesive and the mirror on the inside of the mirror.   
     
     
         5 . The line narrowing module according to  claim 4 , wherein the first normal line intersects the third normal line at an intersection of the first normal line and the second normal line. 
     
     
         6 . The line narrowing module according to  claim 1 , further comprising a third adhesive provided between the holding part and the second adjacent surface and bonding the mirror to the holding part. 
     
     
         7 . The line narrowing module according to  claim 1 , further comprising a third adhesive located on an opposite side of the first adhesive with respect to the center line when the reflective surface is viewed from the front, the third adhesive being provided between the holding part and a third adjacent surface and bonding the mirror to the holding part, the third adjacent surface being adjacent to the reflective surface of the mirror and opposed to the second adjacent surface. 
     
     
         8 . The line narrowing module according to  claim 1 ,
 wherein the first adhesive adhering to the first adjacent surface and the second adhesive adhering to the second adjacent surface are located at a same height position in a direction perpendicular to the reflective surface.   
     
     
         9 . The line narrowing module according to  claim 1 , further comprising a third adhesive located on an opposite side of the first adhesive with respect to the center line when the reflective surface is viewed from the front, the third adhesive being provided between the holding part and the second adjacent surface and bonding the mirror to the holding part, wherein
 area of an adhesive surface between the mirror and the first adhesive is same as a sum of area of an adhesive surface between the mirror and the second adhesive and area of an adhesive surface between the mirror and the third adhesive.   
     
     
         10 . The line narrowing module according to  claim 1 ,
 wherein   the holding part further includes a member that is attachable and detachable to and from the holding part and to which one of the first adhesive and the second adhesive adheres, and   the member is fixed to the holding part by adjusting a position in a thickness direction of the adhesive orthogonal to the center line and to an axis perpendicular to the reflective surface.   
     
     
         11 . The line narrowing module according to  claim 1 , further comprising:
 a rotating stage on which the holding part is placed; and   a fastening member that fastens the holding part to the rotating stage, wherein   the holding part is provided with a slit between the fastening member and at least one of the first adhesive and the second adhesive when the reflective surface is viewed from the front.   
     
     
         12 . The line narrowing module according to  claim 1 ,
 wherein the mirror further includes a light shielding film that shields the light passing through the reflective surface and traveling to at least one of the first adhesive and the second adhesive.   
     
     
         13 . The line narrowing module according to  claim 12 , wherein
 the mirror further includes a reflective film including the reflective surface and a substrate on which the reflective film is provided, and   the light shielding film is provided between the substrate and the reflective film.   
     
     
         14 . The line narrowing module according to  claim 12 , wherein
 the mirror further includes a reflective film including the reflective surface and a substrate on which the reflective film is provided, and   the light shielding film is provided at least one of between the substrate and the first adhesive and between the substrate and the second adhesive.   
     
     
         15 . The line narrowing module according to  claim 1 ,
 wherein   the holding part includes a slit provided in a wall of the holding part to which at least one of the first adhesive adhering to the first adjacent surface and the second adhesive adhering to the second adjacent surface adheres,   a longitudinal direction of the slit extends along the axis, and   when viewed from a direction orthogonal to an axis perpendicular to the reflective surface and to the longitudinal direction of the slit, the slit overlaps at least a part of the adhesive.   
     
     
         16 . The line narrowing module according to  claim 1 ,
 wherein   four driving units are arranged, a pair of driving units among the four driving units is arranged on an opposite side of the other pair of driving units among the four driving units with respect to the center line, and   each of the pair of driving units and the other pair of driving units is arranged in parallel at an interval in an axial direction.   
     
     
         17 . The line narrowing module according to  claim 1 ,
 wherein two driving units are arranged, and the driving units are arranged in parallel at respective positions deviated from the center line and at an interval in an axial direction.   
     
     
         18 . A gas laser device comprising a line narrowing module, the line narrowing module including:
 a prism;   a mirror including a reflective surface reflecting light transmitted through the prism, a first adjacent surface and a second adjacent surface adjacent to the reflective surface, and an opposing surface opposed to the reflective surface;   a grating that wavelength-disperses the light reflected by the reflective surface;   a holding part that holds the mirror;   a first adhesive provided between the holding part and the first adjacent surface or between the holding part and the opposing surface and bonding the mirror to the holding part;   a second adhesive provided between the holding part and the second adjacent surface and bonding the mirror to the holding part; and   a driving unit configured to rotate the holding part so that the mirror rotates about an axis perpendicular to a plane in which the light is wavelength-dispersed,   the second adhesive being located on an opposite side of the first adhesive with respect to a center line which passes through a center of the mirror in parallel to the axis when the reflective surface is viewed from front.   
     
     
         19 . A method of manufacturing an electronic device comprising:
 generating a laser beam by a gas laser device provided with a line narrowing module, the line narrowing module including a prism,   a mirror including a reflective surface reflecting light transmitted through the prism, a first adjacent surface and a second adjacent surface adjacent to the reflective surface, and an opposing surface opposed to the reflective surface,   a grating that wavelength-disperses the light reflected by the reflective surface,   a holding part that holds the mirror,   a first adhesive provided between the holding part and the first adjacent surface or between the holding part and the opposing surface and bonding the mirror to the holding part,   a second adhesive provided between the holding part and the second adjacent surface and bonding the mirror to the holding part, and   a driving unit configured to rotate the holding part so that the mirror rotates about an axis perpendicular to a plane in which the light is wavelength-dispersed, the second adhesive being located on an opposite side of the first adhesive with respect to a center line which passes through a center of the mirror in parallel to the axis when the reflective surface is viewed from front;   outputting the laser beam to an exposure device; and   exposing a photosensitive substrate to the laser beam in the exposure device to produce the electronic device.