Meta-surface optical element and method of manufacturing the same

Abstract

Provided are meta-surface optical device and methods of manufacturing the same. The meta-surface optical device may include a meta-surface arranged on a region of a substrate and a light control member arranged around the meta-surface. The light control member may be arranged on or below the substrate. A material layer formed of the same material used to form the meta-surface may be disposed between the light control member and the substrate. Also, the meta-surface may be a first meta-surface arranged on an upper surface of the substrate, and a second meta-surface may be arranged on a bottom surface of the substrate. Also, the meta-surface may include a first meta-surface and at least one second meta-surface may formed on the first meta-surface, and the light control member may be arranged around the at least one second meta-surface.

What is claimed is: 
     
         1 . A meta-surface optical device comprising:
 a transparent substrate;   a meta-surface comprising a plurality of first patterns provided on a first region of a first surface of the transparent substrate; and   a light control member comprising a plurality of second patterns provided on a second region of a second surface of the transparent substrate and configured to surround an entirety of the first region in which the meta-surface is provided, each of the plurality of second patterns being a columnar pattern,   wherein the plurality of first patterns and the plurality of second patterns are made of a dielectric material.   
     
     
         2 . The meta-surface optical device of  claim 1 , wherein the meta-surface comprises a plurality of a columnar pattern. 
     
     
         3 . The meta-surface optical device of  claim 1 , wherein the meta-surface and the light control member are on the same side of the transparent substrate. 
     
     
         4 . The meta-surface optical device of  claim 1 , wherein the first surface is on a first side of the transparent substrate and the second surface is on a second side of the transparent substrate which is opposite to the first side. 
     
     
         5 . The meta-surface optical device of  claim 1 , wherein the plurality of second patterns are configured to reflect light incident thereon. 
     
     
         6 . The meta-surface optical device of  claim 1 , wherein the plurality of second patterns are configured to absorb light incident thereon. 
     
     
         7 . The meta-surface optical device of  claim 1 , wherein the plurality of second patterns are configured to diffract light incident thereon. 
     
     
         8 . The meta-surface optical device of  claim 1 , wherein the plurality of first patterns comprise a columnar pattern. 
     
     
         9 . The meta-surface optical device of  claim 8 , wherein the plurality of first patterns and the plurality of second patterns comprise a same material. 
     
     
         10 . The meta-surface optical device of  claim 1 , wherein the plurality of second patterns uniformly distribute on an entirety of the second region. 
     
     
         11 . The meta-surface optical device of  claim 1 , wherein the plurality of first patterns are meta-patterns having a dimension different from the plurality of second patterns. 
     
     
         12 . The meta-surface optical device of  claim 1 , wherein the plurality of second patterns comprise alignment key patterns, and
 wherein the light control member further comprises light absorption layer configured to cover the alignment key patterns.   
     
     
         13 . The meta-surface optical device of  claim 1 , wherein the plurality of second patterns comprise alignment key patterns, and
 wherein the light control member further comprises light reflection layer configured to cover the alignment key patterns.   
     
     
         14 . The meta-surface optical device of  claim 1 , further comprising a gap between the meta-surface and the light control member, wherein a width of the gap is less than or equal to 5 μm. 
     
     
         15 . The meta-surface optical device of  claim 1 , wherein the meta-surface and the light control member overlap with each other, and a width of overlap between the meta-surface and the light control member is less than or equal to 9 μm. 
     
     
         16 . A method of manufacturing a meta-surface optical device, the method comprising:
 forming a material layer on a first surface of a transparent substrate; and   patterning the material layer,   wherein the patterning the material layer comprises:   forming a meta-surface comprising a plurality of first patterns on a first region of the first surface of the transparent substrate; and   forming a light control member comprising a plurality of second patterns on a second region of a second surface of the transparent substrate,   wherein the plurality of second patterns are configured to surround an entirety of the first region in which the meta-surface is provided,   wherein each of the plurality of second patterns is a columnar pattern,   wherein the plurality of first patterns and the plurality of second patterns are made of a dielectric material, and   wherein the meta-surface and the light control member are formed in a same operation.   
     
     
         17 . The method of  claim 16 , wherein the plurality of first patterns are meta-patterns having a dimension different from the plurality of second patterns. 
     
     
         18 . The method of  claim 16 , wherein the meta-surface and the light control member are on a same side of the transparent substrate. 
     
     
         19 . The method of  claim 16 , wherein the first surface is on a first side of the transparent substrate and the second surface is on a second side of the transparent substrate which is opposite to the first side. 
     
     
         20 . A depth sensor comprising the meta-surface optical device of  claim 1 .