Method of forming truer

Abstract

A method of forming a truer in a truing where a groove of a grinding wheel used for grinding a chamfer portion of a wafer is formed by a truer having a disc-shape, wherein the method comprising: a process A for adjusting a diameter and a rough shape of the truer by a master grinding wheel for forming the truer; and a process B for forming an edge of the truer into a target shape, wherein the process A and the process B are performed by a plurality of master grooves having different shapes from each other, the plurality of master grooves being provided with the master grinding wheel or the process A and the process B are performed by a plurality of portions having different shapes from each other in at least one of the plurality of master grooves provided with the master grinding wheel.

1 . A method of forming a truer in a truing where a groove of a grinding wheel used for grinding a chamfer portion of a wafer is formed by a truer having a disc-shape, wherein
 the method comprising:   a process A for adjusting a diameter and a rough shape of the truer by a master grinding wheel for forming the truer; and   a process B for forming an edge of the truer into a target shape, wherein   the process A and the process B are performed by a plurality of master grooves having different shapes from each other, the plurality of master grooves being provided with the master grinding wheel or the process A and the process B are performed by a plurality of portions having different shapes from each other in at least one of the plurality of master grooves provided with the master grinding wheel.   
     
     
         2 . The method of forming the truer according to  claim 1 , wherein
 the process A and the process B are performed by a first groove and a second groove which are the plurality of master grooves having different shapes from each other, the first groove and the second groove being provided with the master grinding wheel.   
     
     
         3 . The method of forming the truer according to  claim 2 , wherein
 an edge processing is performed by using an end portion of the second groove after the truer is processed by the first groove.   
     
     
         4 . The method of forming the truer according to  claim 2 , wherein
 a radius of an arc-shaped portion of an end portion of the second groove is larger than a radius of an arc-shaped portion of an end portion of the first groove.   
     
     
         5 . The method of forming the truer according to  claim 2 , wherein
 a chamfering processing of the truer is performed by at least one of the plurality of master grooves by moving the truer in a direction of separating from at least one of the plurality of master grooves.   
     
     
         6 . The method of forming the truer according to  claim 3 , wherein
 a corner R processing of the truer is performed by using the end portion of the second groove for adjusting a shape, a radius and a roundness of the corner of the truer while reducing a moving distance of the truer.   
     
     
         7 . The method of forming the truer according to  claim 6 , wherein
 the corner R processing of a lower surface of the truer is performed after the corner R processing of an upper surface of the truer is performed.   
     
     
         8 . The method of forming the truer according to  claim 7 , wherein
 parameters of a movement start position, a machining speed, an escape position, an escape speed, a rotation speed of the truer, a machining start point and a machining end point are determined by using the value of the corner R processing of the upper surface and the value of the corner R processing of the lower surface, the movement start position including an entering point and an entering speed.   
     
     
         9 . The method of forming the truer according to  claim 8 , wherein
 an amplitude, the machining speed, a spark-out time and the number of times of reciprocating motion are specified as a traverse motion independently for the corner R processing of the upper surface and the corner R processing of the lower surface.   
     
     
         10 . The method of forming the truer according to  claim 1 , wherein
 the process A and the process B are performed by using the plurality of portions having different shapes from each other in at least one of the plurality of master grooves provided with the master grinding wheel, and   the process B is performed by using an end portion of at least one of the plurality of master grooves.   
     
     
         11 . The method of forming the truer according to  claim 10 , wherein
 the process A is performed by using a bottom portion of at least one of the plurality of master grooves.   
     
     
         12 . A master grinding wheel of forming a truer for forming a groove of a grinding wheel used for grinding a chamfer portion of a wafer, the master grinding wheel comprising:
 a first groove for adjusting a diameter and a rough shape of the truer; and   a second groove for forming an edge of the truer into a target shape, the second groove being different from the first groove.   
     
     
         13 . A master grinding wheel of forming a truer for forming a groove of a grinding wheel used for grinding a chamfer portion of a wafer, wherein
 at least one master groove of the master grinding wheel comprising:   a first portion for adjusting a diameter and a rough shape of the truer; and   a second portion for forming an edge of the truer into a target shape, the second portion being different from the first portion.