Polishing device and polishing method

Abstract

A polishing device according to the present invention includes: a plurality of workpiece holding units that respectively hold workpieces; a base part that is rotatable about a center axis, and is arranged such that the plurality of workpiece holding units are arranged mutually at an equal interval on an identical circumference at an arbitrary distance from the center axis; and a plurality of workpiece polishing units that polish polishing target surfaces of the workpieces held by the workpiece holding units, the base part rotates in one direction about the center axis to sequentially move the workpiece holding units that hold the workpieces to the plurality of polishing positions such that the plurality of workpiece polishing units polish the workpieces, and moves the workpieces polished by the plurality of workpiece polishing units to the workpiece exchange position, and exchanges the polished workpieces with a workpiece that is not yet polished.

1 . A polishing device that polishes a workpiece, the polishing device comprising:
 a plurality of workpiece holding units that respectively hold the workpieces;   a base part that is rotatable about a center axis, and is arranged such that the plurality of workpiece holding units are arranged mutually at an equal interval on an identical circumference at an arbitrary distance from the center axis; and   a plurality of workpiece polishing units that polish polishing target surfaces of the workpieces held by the workpiece holding units,   wherein the plurality of workpiece polishing units are provided above the base part and at a plurality of polishing positions for polishing the workpieces, and are not provided at a workpiece exchange position for exchanging the polished workpieces held by the workpiece holding units,   the plurality of polishing positions and the workpiece exchange position are provided on an identical circumference about the center axis of the base part, and   the base part rotates in one direction about the center axis to sequentially move the workpiece holding units that hold the workpieces to the plurality of polishing positions such that the plurality of workpiece polishing units polish the workpieces, and moves the workpieces polished by the plurality of workpiece polishing units to the workpiece exchange position, and exchanges the polished workpieces with a workpiece that is not yet polished.   
     
     
         2 . The polishing device according to  claim 1 , wherein the workpiece holding units are attachably and detachably provided on the base part. 
     
     
         3 . The polishing device according to  claim 1  further comprising:
 a plurality of driven pulleys that are provided to the base part and are respectively provided to meet the plurality of workpiece holding units; 
 an endless belt that is wound around all driven pulleys at positions meeting the polishing positions among the plurality of drive pulleys, or an outer circumference of the base part; and 
 a driving pulley that is coupled to all the driven pulleys at the positions meeting the polishing positions or the base part with the endless belt interposed therebetween. 
 
     
     
         4 . A polishing method for polishing the workpiece by using the polishing device according to  claim 1 , the polishing method comprising:
 causing the plurality of workpiece holding units to respectively hold the workpieces, the plurality of workpiece holding units being arranged mutually at an equal interval on an identical circumference at an arbitrary distance from the center axis of the base part:   rotating the base part in one direction about the center axis to sequentially move the workpiece holding units that hold the workpieces to the plurality of polishing positions such that the plurality of workpiece polishing units polish the workpieces; and   moving the workpieces to the workpiece exchange position, and exchanging the polished workpieces with a workpiece that is not yet polished.