US2023402383A1PendingUtilityA1

Semiconductor Device and Method of Providing High Density Component Spacing

Assignee: STATS CHIPPAC PTE LTDPriority: Mar 27, 2020Filed: Aug 17, 2023Published: Dec 14, 2023
Est. expiryMar 27, 2040(~13.7 yrs left)· nominal 20-yr term from priority
H10W 74/10H10W 20/031H10W 72/951H10W 72/941H10W 72/019H10W 72/012H10W 72/07236H10W 72/241H10W 72/072H10W 72/01271H10W 90/724H10W 72/252H10W 70/685H10W 70/60H10W 74/114H10W 20/425H10W 90/00H01L 23/53238H01L 21/76838H01L 23/31
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Claims

Abstract

A semiconductor device has a substrate and a first conductive layer formed over the substrate. A second conductive layer is formed over the first conductive layer. The first conductive layer can be copper, and the second conductive layer can be nickel. A thickness of the second conductive layer is greater than a thickness of the first conductive layer. A flux material is deposited over the second conductive layer by a printing process. An electrical component is disposed over the flux material, and the flux material is reflowed to make electrical connection between the electrical component and second conductive layer. The flux material substantially vaporizes during the reflow to reduce the occurrence of short circuits. The electrical components can be placed over the substrate with narrow spacing and higher density given the use of the flux material to make electrical connection. An encapsulant is deposited over the electrical component.

Claims

exact text as granted — not AI-modified
What is claimed: 
     
         1 . A method of making a semiconductor device, comprising:
 providing a substrate;   forming a first conductive post over the substrate;   forming a second conductive post over the substrate;   disposing a flux material over a top surface of the first conductive post and second conductive post;   disposing a first electrical component over the flux material on the first conductive post; and   disposing a second electrical component over the flux material on the second conductive post, wherein the flux material maintains separation between the first electrical component and second electrical component.   
     
     
         2 . The method of  claim 1 , further including reflowing the flux material to make electrical connection between the first electrical component and the first conductive post and further to make electrical connection between the second electrical component and the second conductive post while maintaining separation between the first electrical component and second electrical component. 
     
     
         3 . The method of  claim 1 , further including:
 disposing a pre-solder material on a contact pad of the first electrical component and on a contact pad of the second electrical component; and   bringing the pre-solder material in contact with the flux material when disposing the first electrical component and second electrical component over the flux material.   
     
     
         4 . The method of  claim 1 , further including:
 forming the first conductive post including a first portion of a first conductive layer formed over the substrate and a first portion of a second conductive layer formed over the first portion of the first conductive layer; and   forming the second conductive post including a second portion of the first conductive layer formed over the substrate and a second portion of the second conductive layer formed over the second portion of the first conductive layer.   
     
     
         5 . The method of  claim 4 , wherein a thickness of the second conductive layer is greater than a thickness of the first conductive layer. 
     
     
         6 . The method of  claim 1 , further including depositing an encapsulant over the first electrical component and second electrical component. 
     
     
         7 . A method of making a semiconductor device, comprising:
 providing a substrate;   forming a first conductive post over the substrate;   forming a second conductive post over the substrate;   disposing a flux material over a top surface of the first conductive post and second conductive post;   disposing a first electrical component over the flux material on the first conductive post; and   disposing a second electrical component over the flux material on the second conductive post, wherein the flux material holds the first electrical component and second electrical component place on the first conductive post and second conductive post, respectively, to avoid contact between the first electrical component and second electrical component.   
     
     
         8 . The method of  claim 7 , further including reflowing the flux material to make electrical connection between the first electrical component and the first conductive post and further to make electrical connection between the second electrical component and the second conductive post while avoiding contact between the first electrical component and second electrical component. 
     
     
         9 . The method of  claim 7 , further including:
 disposing a pre-solder material on a contact pad of the first electrical component and on a contact pad of the second electrical component; and   bringing the pre-solder material in contact with the flux material when disposing the first electrical component and second electrical component over the flux material.   
     
     
         10 . The method of  claim 7 , further including:
 forming the first conductive post including a first portion of a first conductive layer formed over the substrate and a first portion of a second conductive layer formed over the first portion of the first conductive layer; and   forming the second conductive post including a second portion of the first conductive layer formed over the substrate and a second portion of the second conductive layer formed over the second portion of the first conductive layer.   
     
     
         11 . The method of  claim 10 , wherein a thickness of the second conductive layer is greater than a thickness of the first conductive layer. 
     
     
         12 . The method of  claim 10 , wherein the second conductive layer includes nickel or copper. 
     
     
         13 . The method of  claim 7 , further including depositing an encapsulant over the first electrical component and second electrical component. 
     
     
         14 . A semiconductor device, comprising:
 a substrate;   a first conductive post formed over the substrate;   a second conductive post formed over the substrate;   a flux material disposed over a top surface of the first conductive post and second conductive post;   a first electrical component disposed over the flux material on the first conductive post; and   a second electrical component disposed over the flux material on the second conductive post, wherein the flux material maintains position of the first electrical component and second electrical component to avoid contact between the first electrical component and second electrical component.   
     
     
         15 . The semiconductor device of  claim 4 , wherein the flux material includes a flux print material. 
     
     
         16 . The semiconductor device of  claim 14 , further including a pre-solder material disposed on a contact pad of the first electrical component and on a contact pad of the second electrical component, wherein the pre-solder material contacts the flux material with the first electrical component and second electrical component disposed over the flux material. 
     
     
         17 . The semiconductor device of  claim 14 , wherein:
 the first conductive post includes a first portion of a first conductive layer formed over the substrate and a first portion of a second conductive layer formed over the first portion of the first conductive layer; and   the second conductive post includes a second portion of the first conductive layer formed over the substrate and a second portion of the second conductive layer formed over the second portion of the first conductive layer.   
     
     
         18 . The semiconductor device of  claim 17 , wherein a thickness of the second conductive layer is greater than a thickness of the first conductive layer. 
     
     
         19 . The semiconductor device of  claim 14 , further including an encapsulant deposited over the first electrical component and second electrical component. 
     
     
         20 . A semiconductor device, comprising:
 a substrate;   a first conductive post formed over the substrate;   a second conductive post formed over the substrate;   a flux material disposed over a top surface of the first conductive post and second conductive post;   a first electrical component disposed over the flux material on the first conductive post; and   a second electrical component disposed over the flux material on the second conductive post, wherein the flux material maintains separation between the first electrical component and second electrical component.   
     
     
         21 . The semiconductor device of  claim 20 , wherein the flux material includes a flux print material. 
     
     
         22 . The semiconductor device of  claim 20 , further including a pre-solder material disposed on a contact pad of the first electrical component and on a contact pad of the second electrical component, wherein the pre-solder material contacts the flux material with the first electrical component and second electrical component disposed over the flux material. 
     
     
         23 . The semiconductor device of  claim 20 , wherein:
 the first conductive post includes a first portion of a first conductive layer formed over the substrate and a first portion of a second conductive layer formed over the first portion of the first conductive layer; and   the second conductive post includes a second portion of the first conductive layer formed over the substrate and a second portion of the second conductive layer formed over the second portion of the first conductive layer.   
     
     
         24 . The semiconductor device of  claim 23 , wherein a thickness of the second conductive layer is greater than a thickness of the first conductive layer. 
     
     
         25 . The semiconductor device of  claim 20 , further including an encapsulant deposited over the first electrical component and second electrical component.

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