On-line analysis system and method for specialty gasses

Abstract

The present disclosure includes methods and systems for monitoring real time quality of specialty fluids within one or more specialty fluid containers stored within one or more gas cabinets. The methods and systems monitoring the real time quality of the specialty fluids may utilize an analyzer and sampler to perform one or more tests on the specialty fluids to determine the quality of the specialty fluids in real time. The data collected by the analyzer and sampler may be stored on and processed with the on-line data system to determine if the quality of the specialty fluids is sufficient to be introduced to one or more workpiece processing tools for processing one or more workpieces. The data collected may be compared to a manufacturer technical specification with respect to the specialty fluid to determine if the manufacturer is providing specialty fluids of sufficient quality.

What is claimed is: 
     
         1 . A system, comprising:
 an on-line analysis system;   a workpiece processing tool;   a gas cabinet including a gas container reception structure;   an analysis fluid pathway extends from the gas container reception structure to the on-line analysis system, wherein the gas container reception structure is in fluid communication with the on-line analysis system through the analysis fluid pathway; and   a processing fluid pathway extends from the gas container reception structure to the workpiece processing tool, wherein the gas container reception structure is in fluid communication with the workpiece processing tool through the processing fluid pathway.   
     
     
         2 . The system of  claim 1 , wherein:
 the on-line analysis system includes:
 a switch box; and 
 an on-line analysis tool that is in fluid communication with the switch box; and 
   the analysis fluid pathway extends from the gas container reception structure to the switch box, wherein the gas container reception structure is in fluid communication with the switch box through the analysis fluid pathway.   
     
     
         3 . The system of  claim 2 , wherein:
 the gas cabinet is one of a plurality of gas cabinets; and   the analysis fluid pathway is one of a plurality of analysis fluid pathways, each one of the analysis fluid pathways extends from one of the plurality of gas container reception structures to the switch box, wherein each one of the plurality of gas container reception structures are in fluid communication with the switch box through one of the plurality of analysis fluid pathways.   
     
     
         4 . The system of  claim 3 , wherein:
 the workpiece processing tool is one of a plurality of workpiece processing tools; and   the processing fluid pathway is one of a plurality of processing fluid pathways, each one of the plurality of processing fluid pathways extends from one of the plurality of gas container reception structures to one of the plurality of workpiece processing tools, wherein each one of the plurality of gas container reception structures are in fluid communication with one of the plurality of workpiece processing tools.   
     
     
         5 . The system of  claim 3 , wherein the switch box is configured to open and close the plurality of analysis fluid pathways. 
     
     
         6 . The system of  claim 1 , wherein:
 the gas cabinet further includes:
 a housing; 
 a storage chamber within the housing; and 
 a door on the housing having an opened position and a closed position; 
   the gas container reception structure of the gas cabinet is within the storage chamber of the gas cabinet.   
     
     
         7 . The system of  claim 6 , further comprising a gas container present within the storage chamber and in fluid communication with the gas container reception structure. 
     
     
         8 . The system of  claim 1 , wherein:
 the gas container reception structure is one of a plurality of gas reception structures of the gas cabinet;   the analysis fluid pathway is one of a plurality of analysis fluid pathways, each one of the plurality of analysis fluid pathways is in fluid communication with one of the plurality of gas reception structures; and   the processing fluid pathway is one of a plurality of processing fluid pathways, each one of the plurality of processing fluid pathways is in fluid communication with one of the plurality of gas reception structures.   
     
     
         9 . The system of  claim 1 , further comprising:
 a first valve along the analysis fluid pathway, the first valve having an opened position and a closed position, the first valve configured to control a flow of fluid through the analysis fluid pathway from the gas container reception structure to the on-line analysis system; and   a second valve along the processing fluid pathway, the second valve having an opened position and a closed position, the second valve configured to control a flow of fluid through the processing fluid pathway from the gas container reception structure to the workpiece processing tool.   
     
     
         10 . The system of  claim 8 , further comprising a gas container within the gas cabinet and in fluid communication with the gas container reception structure. 
     
     
         11 . The system of  claim 10 , wherein the on-line analysis system is configured to receive a fluid from the gas container through the analysis fluid pathway and conduct one or more types of on-line tests on the fluid. 
     
     
         12 . The system of  claim 1 , further comprising an on-line data system in electrical communication with the on-line analysis system. 
     
     
         13 . A method, comprising:
 moving a fluid from within a gas container within a gas cabinet along a fluid analysis pathway to an end of the fluid analysis pathway at a switch box of an on-line analysis system;   moving the fluid through the switch box to an on-line analysis tool of the on-line analysis system by opening the switch box at the end of the fluid analysis pathway allowing the fluid to pass through the switch box to the on-line analysis tool;   performing one or more types of tests on the fluid with one or more sensors of the on-line analysis tool of the on-line analysis system;   generating one or more data signals based on results of the one or more types of tests on the fluid;   receiving the one or more data signals at an on-line data system in electrical communication with the on-line analysis system; and   processing a workpiece when the data signals satisfy a pre-determined value.   
     
     
         14 . The method of  claim 13 , further comprising outputting a notification when the fluid has a contamination level greater than a selected contamination level threshold. 
     
     
         15 . The method of  claim 14 , further comprising replacing the gas container with a new gas container in response to the notification. 
     
     
         16 . The method of  claim 14 , further comprising purging the fluid analysis pathway by passing a purge fluid through the fluid analysis pathway. 
     
     
         17 . A specialty on-line analysis system, comprising:
 a purge fluid source containing a purge fluid;   a switch box including:
 a plurality of fluid pathways; 
 a plurality of first valves, each one of the plurality of first valves in fluid communication with one of the plurality of fluid pathways, each one of the plurality of first valves having a closed position and an opened position, and, during operation, one of the plurality of first valves is opened to allow a fluid from one of the plurality of fluid pathways to pass through the switch box; and 
 a plurality of second valves, each one of the plurality of second valves in fluid communication with one of the plurality of fluid pathways and in fluid communication with the purge fluid source, each one of the plurality of second valves having a closed position and an opened position, and, during operation, one of the plurality of second valves is opened to allow the purge fluid to pass through the switch box and into one of the plurality of fluid pathways; 
   an on-line analysis tool in fluid communication with the plurality of first valves;   an off-line sampler tool in fluid communication with the plurality of first valves;   a calibration fluid source containing a calibration fluid in fluid communication with the on-line analysis tool; and   an exhaust port in fluid communication with the on-line analysis tool.   
     
     
         18 . The system of  claim 17 , wherein the purge fluid source is in fluid communication with the off-line sampler tool and the on-line analysis tool. 
     
     
         19 . The system of  claim 17 , wherein, during operation, the calibration fluid is communicated from the calibration fluid source to the on-line analysis tool. 
     
     
         20 . The system of  claim 18 , wherein the on-line analysis tool includes one or more sensors configured to perform a plurality of on-line tests.