Solid source sublimator

Abstract

Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid. The lid can be adapted to allow gas flow within the flow path. The solid source chemical sublimator can include a filter that is disposed between the serpentine flow path and the distal portion of the housing. The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough.

What is claimed is: 
     
         1 . A solid source chemical sublimator, comprising:
 a housing defining a housing axis extending along a length of the housing, the housing configured to hold a solid chemical reactant therein;   a base disposed at a distal end of the housing;   a lid disposed at a proximal end of the housing, the housing axis being perpendicular to a face of the lid and to a face of the base;   a thermally conductive conduit extending from the base along the housing axis; and   a plurality of thermally conductive protrusions extending from the thermally conductive conduit, each of the plurality of thermally conductive protrusions configured to heat the solid chemical reactant.   
     
     
         2 . The solid source chemical sublimator of  claim 1 , wherein at least one of the plurality of thermally conductive protrusions is connected to the base. 
     
     
         3 . The solid source chemical sublimator of  claim 1 , wherein at least one of the plurality of thermally conductive protrusions extends from the base. 
     
     
         4 . The solid source chemical sublimator of  claim 3 , wherein the at least one of the plurality of thermally conductive protrusions extends axially from the base. 
     
     
         5 . The solid source chemical sublimator of  claim 1 , wherein at least two of the plurality of thermally conductive protrusions are spaced radially in relation to the housing axis. 
     
     
         6 . The solid source chemical sublimator of  claim 5 , wherein the at least two of the plurality of thermally conductive protrusions extend orthogonal to the housing axis. 
     
     
         7 . The solid source chemical sublimator of  claim 1 , wherein each of the plurality of thermally conductive protrusions is spaced apart circumferentially relative to the housing axis from an adjacent protrusion of the plurality of thermally conductive protrusions. 
     
     
         8 . The solid source chemical sublimator of  claim 1 , further comprising a heat source, wherein the thermally conductive conduit is in conductive thermal communication with the heat source. 
     
     
         9 . The solid source chemical sublimator of  claim 1 , further comprising a heating rod disposed approximately along the housing axis within the thermally conductive conduit. 
     
     
         10 . The solid source chemical sublimator of  claim 9 , wherein a portion of the housing is configured to remain between the heating rod and a solid source reactant of the solid source chemical sublimator. 
     
     
         11 . The solid source chemical sublimator of  claim 1 , wherein the lid is removably coupled to the housing. 
     
     
         12 . A solid source chemical sublimator, comprising:
 a housing comprising a housing axis extending along a length of the housing, the housing configured to hold solid chemical reactant therein;   a thermally conductive conduit disposed within the housing and extending along the housing axis; and   a plurality of thermally conductive protrusions extending from the thermally conductive conduit, each of the plurality of thermally conductive protrusions configured to heat the solid chemical reactant.   
     
     
         13 . The solid source chemical sublimator of  claim 12 , wherein each of the plurality of thermally conductive protrusions extends radially outward from the thermally conductive conduit. 
     
     
         14 . The solid source chemical sublimator of  claim 13 , wherein each thermally conductive protrusion in the plurality of thermally conductive protrusions is spaced apart circumferentially relative to the housing axis from an adjacent thermally conductive protrusion in the plurality of thermally conductive protrusions. 
     
     
         15 . The solid source chemical sublimator of  claim 12 , further comprising a heating rod disposed approximately along the housing axis within the thermally conductive conduit. 
     
     
         16 . The solid source chemical sublimator of  claim 15 , wherein a portion of the housing is configured to remain between the heating rod and a solid source reactant of the solid source chemical sublimator. 
     
     
         17 . A solid source chemical sublimator, comprising:
 a housing comprising a housing axis extending along a length of the housing, the housing configured to hold solid chemical reactant therein;   a plurality of thermally conductive protrusions extending from a thermally conductive conduit; and   an active heating element in thermal communication with the plurality of thermally conductive protrusions, wherein each of the plurality of thermally conductive protrusions configured to heat the solid chemical reactant.   
     
     
         18 . The solid source chemical sublimator of  claim 17 , wherein each of the plurality of thermally conductive protrusions is configured to conduct heat from the active heating element. 
     
     
         19 . The solid source chemical sublimator of  claim 17 , wherein the active heating element comprises a heating rod disposed within the housing. 
     
     
         20 . The solid source chemical sublimator of  claim 19 , wherein the heating rod is disposed approximately along the housing axis within the thermally conductive conduit.