Coaxial lift device with dynamic leveling

Abstract

Embodiments described herein generally relate to process chambers with coaxial lift devices. In some embodiments, the device comprises both a bottom bowl lift and a pedestal lift. The bottom bowl lift supports a bottom bowl and is configured to move the bottom bowl into a position that reduces the process volume. The bottom bowl lift is co-axial with the pedestal lift and the bottom bowl lift and the pedestal lift are attached for vacuum operation. The pedestal lift includes multiple actuators to create a dynamic lift mechanism. Both systems complete a nested system such that the bottom bowl lift is adjustable and can close the bottom bowl creating a symmetric and small process volume. The pedestal lift can move independently to its process position and tilt in a desired direction without interference with the bottom bowl lift, increasing film uniformity on a processed substrate.

We claim: 
     
         1 . A method for a lift system, comprising:
 lowering a bottom bowl lift to an exchange position such that a bottom bowl is in a lowered position proximate a bottom surface of a process chamber, wherein the bottom bowl comprises a wall that has an inner surface that defines an inner volume;   raising the bottom bowl lift to a process position that is a distance from the bottom surface of the process chamber;   orienting a top surface of a pedestal in a first orientation relative to an output surface of a showerhead, wherein
 the first orientation of the top surface of the pedestal relative to the output surface of the showerhead is not coplanar; and 
 the pedestal is positionable within the inner volume of the bottom bowl; and 
   depositing a first layer of material on a substrate disposed on the top surface of the pedestal while the top surface of the pedestal is oriented in the first orientation, and the bottom bowl lift is in the process position.   
     
     
         2 . The method of  claim 1 , wherein the lift system comprises a bottom bowl carrier, wherein the bottom bowl carrier is coupled to the bottom bowl. 
     
     
         3 . The method of  claim 2 , wherein the bottom bowl lift comprises a backbone structure attached to the bottom bowl carrier and having adjustable mounts configured to provide angular adjustment of the backbone structure and the bottom bowl. 
     
     
         4 . The method of  claim 1 , wherein the lift system comprises a bottom bowl carrier and pedestal carrier, wherein the bottom bowl carrier is coupled to the bottom bowl and the pedestal carrier is coupled to the pedestal. 
     
     
         5 . The method of  claim 4 , wherein the bottom bowl lift comprises a backbone structure attached to the bottom bowl carrier and having adjustable mounts configured to provide angular adjustment of the backbone structure and the bottom bowl. 
     
     
         6 . The method of  claim 1 , wherein the lift system comprises a plurality of actuators configured to cause relative linear and angular motion between the pedestal and the bottom bowl. 
     
     
         7 . The method of  claim 1 , wherein the bottom bowl lift comprises a bottom bowl actuator assembly, a bottom bowl carrier and a backbone structure, the bottom bowl actuator assembly comprises one or more guides and a bottom bowl actuator, wherein the one or more guides are coupled to the backbone structure and the bottom bowl carrier, and the one or more guides are configured to allow relative linear motion between the backbone structure and the bottom bowl carrier in a first direction when the bottom bowl actuator causes the bottom bowl carrier to translate in the first direction. 
     
     
         8 . The method of  claim 4 , wherein the lift system further comprises a cooling hub attached to the bottom bowl carrier and the pedestal carrier. 
     
     
         9 . The method of  claim 4 , wherein the bottom bowl carrier and the pedestal carrier are attached together via a bellows, the bellows forming a seal between the bottom bowl lift and the pedestal lift. 
     
     
         10 . The method of  claim 1 , wherein a lower end of the bottom bowl further comprises a bellows having a first end and a second end, the first end of the bellows coupled to the wall and the second end of the bellows sealed to a portion of the bottom surface of the process chamber.  11 , A method for a lift system, comprising:
 lowering a bottom bowl lift to an exchange position such that a bottom bowl is in a lowered position proximate a bottom surface of a process chamber, wherein the bottom bowl comprises a wall that has an inner surface that defines an inner volume;   raising the bottom bowl lift to a process position that is a distance from the bottom surface of the process chamber;   orienting a top surface of a pedestal in a first orientation relative to an output surface of a showerhead; and   depositing a first layer of material on a substrate disposed on the top surface of the pedestal while the top surface of the pedestal is oriented in the first orientation, and the bottom bowl lift is in the process position.   
     
     
         12 . The method of claim  11 , wherein the lift system comprises a bottom bowl carrier, wherein the bottom bowl carrier is coupled to the bottom bowl. 
     
     
         13 . The method of  claim 12 , wherein the bottom bowl lift comprises a backbone structure attached to the bottom bowl carrier and having adjustable mounts configured to provide angular adjustment of the backbone structure and the bottom bowl. 
     
     
         14 . The method of claim  11 , wherein the lift system comprises a bottom bowl carrier and pedestal carrier, wherein the bottom bowl carrier is coupled to the bottom bowl and the pedestal carrier is coupled to the pedestal. 
     
     
         15 . The method of  claim 14 , wherein the bottom bowl lift comprises a backbone structure attached to the bottom bowl carrier and having adjustable mounts configured to provide angular adjustment of the backbone structure and the bottom bowl. 
     
     
         16 . The method of claim  11 , wherein the lift system comprises a plurality of actuators configured to cause relative linear and angular motion between the pedestal and the bottom bowl. 
     
     
         17 . The method of claim  11 , wherein the bottom bowl lift comprises a bottom bowl actuator assembly, a bottom bowl carrier and a backbone structure, the bottom bowl actuator assembly comprises one or more guides and a bottom bowl actuator, wherein the one or more guides are coupled to the backbone structure and the bottom bowl carrier, and the one or more guides are configured to allow relative linear motion between the backbone structure and the bottom bowl carrier in a first direction when the bottom bowl actuator causes the bottom bowl carrier to translate in the first direction. 
     
     
         18 . The method of  claim 14 , wherein the lift system further comprises a cooling hub attached to the bottom bowl carrier and the pedestal carrier. 
     
     
         19 . The method of  claim 14 , wherein the bottom bowl carrier and the pedestal carrier are attached together via a bellows, the bellows forming a seal between the bottom bowl lift and the pedestal lift. 
     
     
         20 . The method of claim  11 , wherein a lower end of the bottom bowl further comprises a bellows having a first end and a second end, the first end of the bellows coupled to the wall and the second end of the bellows sealed to a portion of the bottom surface of the process chamber.