US2023345621A1PendingUtilityA1

Microelectronic assemblies having conductive structures with different thicknesses

Assignee: INTEL CORPPriority: Feb 6, 2019Filed: Jun 30, 2023Published: Oct 26, 2023
Est. expiryFeb 6, 2039(~12.5 yrs left)· nominal 20-yr term from priority
H10W 70/685H10W 90/724H10W 90/701H10W 70/695H10W 70/05H05K 1/0228H01L 23/49822H05K 1/0298H05K 1/115H05K 1/111H05K 1/181H05K 3/107H05K 3/105H05K 3/0032H05K 3/0035H05K 2201/0376H05K 3/4644
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Claims

Abstract

Microelectronic assemblies, and related devices and methods, are disclosed herein. For example, in some embodiments, a microelectronic assembly may include a dielectric layer, in a substrate, the dielectric layer including an electroless catalyst, wherein the electroless catalyst includes one or more of palladium, gold, silver, ruthenium, cobalt, copper, nickel, titanium, aluminum, lead, silicon, and tantalum; a first conductive trace having a first thickness in the dielectric layer, wherein the first thickness is between 4 um and 143 um; and a second conductive trace having a second thickness in the dielectric layer, wherein the second thickness is between 2 um and 141 um, wherein the first thickness is greater than the second thickness, and wherein the first conductive trace and the second conductive trace have sloped sidewalls.

Claims

exact text as granted — not AI-modified
1 . A microelectronic assembly, comprising:
 a dielectric layer, in a substrate, including an electroless catalyst, wherein the electroless catalyst includes one or more of palladium, gold, silver, ruthenium, cobalt, copper, nickel, titanium, aluminum, lead, silicon, and tantalum;   a first conductive trace having a first thickness in the dielectric layer, wherein the first thickness is between 4 um and 143 um; and   a second conductive trace having a second thickness in the dielectric layer, wherein the second thickness is between 2 um and 141 um, wherein the first thickness is greater than the second thickness, and wherein the first conductive trace and the second conductive trace have sloped sidewalls.   
     
     
         2 . The microelectronic assembly of  claim 1 , wherein the electroless catalyst in the dielectric layer has a weight percent of up to 10. 
     
     
         3 . The microelectronic assembly of  claim 1 , wherein the electroless catalyst in the dielectric layer is palladium having a weight percent of up to 5. 
     
     
         4 . The microelectronic assembly of  claim 1 , wherein the dielectric layer is doped by the electroless catalyst. 
     
     
         5 . The microelectronic assembly of  claim 1 , further comprising:
 a die electrically coupled to the substrate.   
     
     
         6 . The microelectronic assembly of  claim 5 , wherein the die is a central processing unit, a radio frequency chip, a power converter, or a network processor. 
     
     
         7 . The microelectronic assembly of  claim 1 , wherein the substrate is an interposer. 
     
     
         8 . A microelectronic assembly, comprising:
 a first conductive feature having a first thickness in a dielectric layer, of a substrate, the dielectric layer including an electroless catalyst, wherein the first thickness is between 4 um and 143 um; and   a second conductive feature having a second thickness in the dielectric layer of the substrate, wherein the second thickness is between 2 um and 141 um, wherein the second thickness is different from the first thickness, and wherein the first and second conductive features have sloped sidewalls.   
     
     
         9 . The microelectronic assembly of  claim 8 , wherein the electroless catalyst includes one or more of palladium, gold, silver, ruthenium, cobalt, copper, nickel, titanium, aluminum, lead, silicon, or tantalum. 
     
     
         10 . The microelectronic assembly of  claim 8 , wherein the first and second conductive features are traces. 
     
     
         11 . The microelectronic assembly of  claim 8 , wherein the dielectric layer is doped by the electroless catalyst. 
     
     
         12 . The microelectronic assembly of  claim 8 , further comprising:
 a die electrically coupled to the substrate.   
     
     
         13 . The microelectronic assembly of  claim 12 , wherein the die is a central processing unit, a radio frequency chip, a power converter, or a network processor. 
     
     
         14 . The microelectronic assembly of  claim 12 , wherein the first conductive feature or the second conductive feature is electrically coupled to the die via conductive pathways in the substrate. 
     
     
         15 . A computing device, comprising:
 a package substrate having a first surface and an opposing second surface, the package substrate comprising:
 a dielectric layer including an electroless catalyst; 
 a first conductive trace having a first thickness in the dielectric layer, wherein the first thickness is between 4 um and 143 um; and 
 a second conductive trace having a second thickness in the dielectric layer, wherein the second thickness is between 2 um and 141 um, wherein the second thickness is different from the first thickness, and wherein the first conductive trace and the second conductive trace have sloped sidewalls; 
   a circuit board coupled to the first surface of the package substrate; and   a die coupled to the second surface of the package substrate.   
     
     
         16 . The computing device of  claim 15 , wherein the dielectric layer is doped by the electroless catalyst. 
     
     
         17 . The computing device of  claim 15 , wherein the electroless catalyst includes one or more of palladium, gold, silver, ruthenium, cobalt, copper, nickel, titanium, aluminum, lead, silicon, or tantalum. 
     
     
         18 . The computing device of  claim 15 , wherein the computing device is a server device. 
     
     
         19 . The computing device of  claim 15 , wherein the computing device is a portable computing device. 
     
     
         20 . The computing device of  claim 15 , wherein the computing device is a wearable computing device.

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