X-ray detectors based on an epitaxial layer and methods of making

Abstract

Disclosed herein is a method comprising: forming electrical contacts on a first surface of an epitaxial layer supported on a substrate, the first surface being opposite from the substrate; bonding the epitaxial layer to an electronics layer, wherein the first surface faces the electronics layer and the electrical contacts on the first surface are bonded to electrical contacts of the electronics layer; exposing a second surface opposite the first surface by removing the substrate; and forming a common electrode on the second surface.

What is claimed is: 
     
         1 . A method comprising:
 disposing an analyte onto an X-ray detector, wherein the X-ray detector comprises an epitaxial layer;   causing X-ray fluorescence from the analyte;   absorbing at least a portion of the X-ray fluorescence by the epitaxial layer;   detecting the X-ray fluorescence based on electrical signals the X-ray fluorescence generates in the epitaxial layer.   
     
     
         2 . The method of  claim 1 , further comprising immersing the X-ray detector in a liquid. 
     
     
         3 . The method of  claim 1 , wherein the analyte comprises a cell, a nucleic acid, a peptide, or any combination thereof. 
     
     
         4 . The method of  claim 1 , wherein the analyte is disposed directly on the epitaxial layer. 
     
     
         5 . The method of  claim 1 , wherein the X-ray detector comprises a scintillator layer on the epitaxial layer and the analyte is disposed directly on the scintillator layer. 
     
     
         6 . The method of  claim 1 , wherein the X-ray detector comprises a common electrode on the epitaxial layer and the analyte is disposed directly on the common electrode. 
     
     
         7 . The method of  claim 1 , wherein the X-ray detector comprises an electronics layer and wherein the epitaxial layer is bonded to the electronics layer. 
     
     
         8 . The method of  claim 7 , wherein the X-ray detector comprises electrical contacts on a first surface of the epitaxial layer, the first surface facing the electronics layer; wherein the electronics layer comprises electrical contacts; wherein the electrical contacts on the first surface are bonded to the electrical contacts of the electronics layer. 
     
     
         9 . The method of  claim 1 , wherein the epitaxial layer comprises a p-n junction or a p-i-n junction.