US2023340672A1PendingUtilityA1

Device comprising nanowires

Assignee: COMMISSARIAT A IENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVESPriority: Dec 2, 2019Filed: Dec 1, 2020Published: Oct 26, 2023
Est. expiryDec 2, 2039(~13.3 yrs left)· nominal 20-yr term from priority
C23C 18/06C23C 18/1216C23C 18/1204
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Claims

Abstract

A nanowire forming method, including the forming of a DNA origami having through openings, and the forming in the through openings of portions forming all or part of the nanowires.

Claims

exact text as granted — not AI-modified
1 . Method of forming nanowires, comprising the forming of a DNA origami having through openings, and the forming in the through openings of portions forming all or part of the nanowires. 
     
     
         2 . Method according to  claim 1 , wherein the origami and the openings that it comprises are formed before the bonding of the origami onto a substrate. 
     
     
         3 . Method according to  claim 1 , wherein said portions are deposited in a chemical bath. 
     
     
         4 . Method according to any of  claim 1 , wherein said portions form first portions of the nanowires, and second portions of the nanowires extending from the first portions are deposited in a chemical bath. 
     
     
         5 . Method according to  claim 4 , wherein the composition of the chemical bath is different for the forming of the first and second portions. 
     
     
         6 . Method according to  claim 1 , comprising the forming of a polymer matrix between the nanowires. 
     
     
         7 . Method according to  claim 1 , comprising the removal of at least a portion of the DNA. 
     
     
         8 . Device obtained by a method according to  claim 1 , wherein the origami comprises folded DNA strands having portions bound to one another by staples. 
     
     
         9 . Device according to  claim 8 , wherein the DNA origami is located on a layer made of a same material as that of the nanowires, said portions extending from said layer. 
     
     
         10 . Device according to  claim 8 , wherein the DNA origami is located on a metal region and, preferably:
 said metal region has a thickness greater than 100 nm; and/or   said portions extend from said metal region.   
     
     
         11 . Device according to  claim 10 , comprising, at one end of the nanowires opposite to said metal region, an electrically-conductive region in contact with the nanowires. 
     
     
         12 . Device according to  claim 10 , wherein:
 the metal region comprises at least one of the materials from the group formed of gold, nickel, copper, palladium, or platinum; and/or   the nanowires are piezoelectric, preferably, the nanowires having a wurtzite-type crystal structure and/or comprise at least one of the materials from the group formed of zinc oxide, cadmium sulfide, cadmium selenide, and nickel selenide.   
     
     
         13 . Device according to  claim 8 , wherein:
 the nanowires have a transverse dimension smaller than 40 nm, preferably smaller than 20 nm;   the nanowires have a length greater than 500 nm, preferably greater than 1 μm; and/or   the nanowires have a density greater than 10 nanowires per square micrometer, preferably greater than 50 nanowires per square micrometer; and/or   the DNA origami has a thickness in the range from in the order of 2 nm to in the order of 100 nm, preferably in the order of 10 nm.   
     
     
         14 . Sensor pixel, comprising a device according to  claim 8 . 
     
     
         15 . Sensor, preferably of fingerprints, comprising a plurality of pixels according to  claim 14 . 
     
     
         16 . Sensor according to  claim 15 , wherein the pixels are located on the side of a surface of the substrate comprising, vertically in line with each pixel, at least a portion of a circuit associated with this pixel. 
     
     
         17 . Method according to  claim 2 , wherein said portions are deposited in a chemical bath.

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