Apparatus and methods for handling die carriers

Abstract

Apparatus and methods for handling die carriers are disclosed. In one example, a disclosed apparatus includes: a load port configured to load a die carrier operable to hold a plurality of dies into a processing tool; and a lane changer coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool and transfer the at least one die into the processing tool for processing the at least one die.

What is claimed is: 
     
         1 . An apparatus for handling die carriers, comprising:
 a load port configured to load dies in a die carrier into a processing chamber, wherein the die carrier is operable to hold a plurality of dies,   wherein the load port comprises:
 a table configured to receive the die carrier, and 
 a radio frequency identity (RFID) reader coupled on the table and operable to read information on the die carrier to determine whether the die carrier is correctly scheduled for processing by the processing chamber. 
   
     
     
         2 . The apparatus of  claim 1 , wherein the load port further comprises a storage space configured to store a plurality of die carriers at a same time. 
     
     
         3 . The apparatus of  claim 1 , wherein:
 the die carrier is transported onto the table by an overhead hoist transport (OHT) in a first direction.   
     
     
         4 . The apparatus of  claim 3 , wherein:
 the load port comprises a turn stage coupled on the table and operable to turn the die carrier from the first direction to a second direction for storing the die carrier.   
     
     
         5 . The apparatus of  claim 4 , wherein the die carrier is placed onto the turn stage on the table by the OHT. 
     
     
         6 . The apparatus of  claim 1 , further comprising:
 a lane changer comprising a plurality of lanes located beside the load port, coupled to the load port and configured to move at least one die in the die carrier to an input of the processing tool chamber and transfer the at least one die into the processing chamber for processing the at least one die, wherein:   the load port comprises a push bar operable to push a boat carrying the plurality of dies from the die carrier to the lane changer; and   the lane changer is configured to move the boat along at least one direction to one of the plurality of lanes to align the boat with the input of the processing chamber and convey the boat into the processing chamber.   
     
     
         7 . The apparatus of  claim 6 , further comprising a mapping sensor configured to determine at least one of quantity information or location information of boats in the die carrier. 
     
     
         8 . The apparatus of  claim 6 , further comprising a two-dimensional barcode reader configured to identify and trace the boat that is processed by the processing tool chamber. 
     
     
         9 . The apparatus of  claim 6 , further comprising:
 an automated optical inspection (AOI) sensor coupled to the load port or the lane changer, and configured to detect a defect on at least one of the dies in the die carrier, wherein the AOI sensor is further configured to determine at least one of quantity information or size information of the dies in the die carrier.   
     
     
         10 . The apparatus of  claim 6 , wherein:
 the lane changer is further configured to receive the boat from an output of the processing chamber after the dies on the boat are processed, and move along at least one direction to align the boat with an additional push bar associated with the load port; and   the additional push bar is configured to push the boat back into the die carrier.   
     
     
         11 . An apparatus for handling die carriers, comprising:
 a load port; and   a lane changer comprising a plurality of lanes located beside the load port and coupled to the load port,   wherein the load port comprises:   a table configured to receive a die carrier in a first direction, wherein the die carrier is operable to hold a plurality of dies;   a turn stage coupled on the table and operable to turn the die carrier from the first direction to a second direction for the lane changer to retrieve at least one die from the die carrier for processing the at least one die in a processing tool chamber; and a storage space configured to store a plurality of die carriers at a same time.   
     
     
         12 . The apparatus of  claim 11 , further comprising:
 a radio frequency identity (RFID) reader coupled on the table and operable to read information of the die carrier to determine whether the die carrier is correctly scheduled for processing by the processing chamber,   wherein the load port further comprises a push bar operable to push a boat carrying the plurality of dies from the die carrier to the lane changer, wherein the lane changer is configured to move the boat to one of the plurality of lanes to align the boat with an input of the processing chamber and convey the boat into the processing chamber for processing the dies on the boat.   
     
     
         13 . The apparatus of  claim 11 , wherein the load port is configured to open a first door of the die carrier and store the first door in a predetermined location. 
     
     
         14 . The apparatus of  claim 13 , wherein:
 the load port is further configured to unload the die carrier after the plurality of dies are processed; and   the load port is further configured to retrieve a second door having a same model as the first door, and close the second door onto the die carrier that has been unloaded.   
     
     
         15 . The apparatus of  claim 11 , further comprising:
 a two-dimensional barcode reader configured to identify and trace the boat that is processed by the processing chamber.   
     
     
         16 . The apparatus of  claim 11 , further comprising a mapping sensor configured to determine at least one of quantity information or location information of boats in the die carrier. 
     
     
         17 . A method, comprising:
 receiving a die carrier in a first direction;   reading information on the die carrier to determine whether the die carrier is correctly scheduled for processing by a processing chamber;   turning the die carrier from the first direction to a second direction;   retrieving a plurality of dies from the die carrier;   pushing the plurality of dies from the die carrier to a lane changer, wherein the lane changer is configured to move the plurality of dies to one of the plurality of lanes;   conveying the plurality of dies at the same time to align the plurality of dies with different inputs of a processing chamber, respectively; and   loading the plurality of dies into different flowing channels of the processing chamber via the different inputs, respectively, for processing the plurality of dies in the processing chamber.   
     
     
         18 . The method of  claim 17 , further comprising detecting a defect on at least one of the plurality of dies while pushing the plurality of dies or conveying the plurality of dies. 
     
     
         19 . The method of  claim 18 , wherein the plurality of dies are contained in a respective one of a plurality of boats, the method further comprising:
 receiving, via a respective one of the plurality of lanes of the lane changer, each of the plurality of boats from a respective output of the processing chamber after the plurality of dies are processed; and   pushing each of the plurality of boats back into the die carrier.   
     
     
         20 . The method of  claim 19 , further comprising receiving each of the plurality of boats from an output of the processing chamber after the dies on the plurality of boats are processed.