Radiation-sensitive resin composition, method for forming pattern, and method for producing monomeric compound

Abstract

A radiation-sensitive resin composition includes: a resin containing a structural unit A represented by formula (1); at least one radiation-sensitive acid generator selected from the group consisting of a radiation-sensitive acid generator represented by formula (2-1) and a radiation-sensitive acid generator represented formula (2-2); and a solvent. At least one R 3 is an acid-dissociable group; and R 41 is a hydrogen atom or a protective group to be deprotected by action of an acid. At least one of R f1 and R f2 is a fluorine atom or a fluoroalkyl group; R 5a is a monovalent organic group having a cyclic structure; X 1 + is a monovalent onium cation; R 5b is a monovalent organic group, and X 2 + is a monovalent onium cation whose atom having a positive charge is not an atom forming a cyclic structure.

1 : A method for producing a monomeric compound, comprising:
 reacting a formylhydroxy aromatic carboxylic acid and an alcohol having an acid-dissociable group structure to synthesize an ester body having the acid dissociable group, the method further comprising, in any order:   protecting a hydroxyl group of the ester body; and   converting a formyl group of the ester body to an alkene.   
     
     
         2 : The method according to  claim 1 , wherein the hydroxyl group of the ester body is protected by reacting the ester body and acetyl chloride. 
     
     
         3 : The method according to  claim 1 , wherein the formyl group of the ester body is converted to an alkene by Wittig olefination reaction in a presence of a metal complex generated from zinc and an alkyl halide. 
     
     
         4 : The method according to  claim 1 , wherein the hydroxyl group of the ester body is protected, and then the formyl group of the ester body is converted to an alkene. 
     
     
         5 : The method according to  claim 1 , wherein the formyl group of the ester body is converted to an alkene, and then the hydroxyl group of the ester body is protected. 
     
     
         6 : The method according to  claim 1 , wherein the acid-dissociable group is represented by formula (2); 
       
         
           
           
               
               
           
         
         wherein R 8  is a monovalent hydrocarbon group having 1 to 20 carbon atoms, R 9  and R 10  are each independently a monovalent chain hydrocarbon group having 1 to 10 carbon atoms or a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, or R 9  and R 10  taken together represent a divalent alicyclic group having 3 to 20 carbon atoms together with the carbon atom to which R 9  and R 10  are bonded, and * represents a hand bonding to an oxygen atom of an ester bond of the ester body. 
       
     
     
         7 : The method according to  claim 1 , wherein the hydroxyl group of the ester body is protected by a protective group represented by formula (AL-1), formula (AL-2), or formula (AL-3): 
       
         
           
           
               
               
           
         
         wherein, in the formulas (AL-1) to (AL-3), * represents a hand bonding to another moiety, 
         in the formulas (AL-1) and (AL-2), R L1  and R L2  are each a monovalent hydrocarbon group, optionally having a hetero atom, 
         in the formula (AL-1), a is an integer of 0 to 10, 
         in the formula (AL-2), R L3  and R L4  are each independently a monovalent hydrocarbon group, optionally having a hetero atom, and optionally two of R L2 , R L3 , and R L4  taken together represent a ring having 3 to 20 carbon atoms together with the carbon atom or —CO— to which the two of R L2 , R L3 , and R L4  are bonded, and 
         in the formula (AL-3), R L5 , R L6 , and R L7  are each independently a monovalent hydrocarbon group, optionally having a hetero atom, and optionally two of R U , R L , and R L7 taken together represent a ring having 3 to 20 carbon atoms together with the carbon atom to which the two of R L5 , R L6 , and R L7  are bonded.