Control device and control method for vacuum pump

Abstract

The object of the disclosure is to prevent erroneous transition of an operation mode to an operation limitation mode. A control device 6 includes a controller 62 . The controller 62 counts the number of times of occurrence of each of multiple types of abnormalities occurred in a vacuum pump 1 , and issues a critical alarm in a case where the number of times of occurrence of each of the multiple types of abnormalities exceeds a predetermined threshold.

What is claimed is: 
     
         1 . A control device for a vacuum pump configured to discharge gas by rotating a rotor by a motor, comprising:
 a controller,   wherein the controller is configured to,
 count the number of times of occurrence of each of multiple types of abnormalities occurred in the vacuum pump, and 
 issue a critical alarm in a case where the number of times of occurrence of each of the multiple types of abnormalities exceeds a predetermined threshold. 
   
     
     
         2 . The control device according to  claim 1 , wherein
 the controller is configured to cause an operation mode of the vacuum pump to transition to an operation limitation mode in which the operation is limited as compared to normal operation, in a case where the vacuum pump is restarted after stop in a case where the number of times of occurrence of each of the multiple types of abnormalities exceeds the predetermined threshold.   
     
     
         3 . The control device according to  claim 2 , wherein
 the controller is configured to stop the vacuum pump after the vacuum pump has operated only for a predetermined time after start-up in a case where the operation mode of the vacuum pump is the operation limitation mode.   
     
     
         4 . The control device according to  claim 2 , further comprising: 
 a storage,   wherein the controller is configured to,
 store a critical alarm issuance history indicating issuance of the critical alarm in the storage in a case where the critical alarm is issued, and 
 determine the operation mode of the vacuum pump as the operation limitation mode in a case where the critical alarm issuance history indicates the issuance of the critical alarm when the vacuum pump is restarted. 
   
     
     
         5 . The control device according to  claim 2 , wherein
 the controller is configured to cancel the operation limitation mode when a dedicated password is input.   
     
     
         6 . The control device according to  claim 1 , wherein 
 the predetermined threshold is changeable.   
     
     
         7 . The control device according to  claim 1 , wherein
 the multiple types of abnormalities include at least two abnormalities selected from an abnormality regarding vibration of the vacuum pump, an abnormality regarding the number of rotations of the rotor, and an abnormality regarding a temperature of the vacuum pump.   
     
     
         8 . A control method for a vacuum pump configured to discharge gas by rotating a rotor by a motor, comprising:
 counting the number of times of occurrence of each of multiple types of abnormalities occurred in the vacuum pump; and   issuing a critical alarm in a case where the number of times of occurrence of each of the multiple types of abnormalities exceeds a predetermined threshold.