US2023246044A1PendingUtilityA1

Image sensor and electronic device including the image sensor

Assignee: SAMSUNG ELECTRONICS CO LTDPriority: Jan 28, 2022Filed: Jan 27, 2023Published: Aug 3, 2023
Est. expiryJan 28, 2042(~15.5 yrs left)· nominal 20-yr term from priority
H10F 39/811H10F 39/8063H10F 39/807H10F 39/8053H10F 39/803H10F 39/182H10F 39/8027H10F 39/8023H01L 27/14621H01L 27/14645H01L 27/1463
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Claims

Abstract

An image sensor includes a sensor substrate including a plurality of light sensing cells configured to sense light, and a color filter array provided on the sensor substrate. The color filter includes a plurality of filters provided to respectively face the plurality of light sensing cells to filter light of different wavelengths and a fence structure configured to separate the plurality of filters from each other. A width of the fence structure may have a plurality of different values according to types of two filters provided adjacent to each other with the width interposed therebetween. Crosstalk between adjacent cells may be reduced by the image sensor.

Claims

exact text as granted — not AI-modified
What is claimed is: 
     
         1 . An image sensor comprising:
 a sensor substrate comprising a plurality of light sensing cells configured to sense light; and   a color filter array provided on the sensor substrate, the color filter array comprising:
 a plurality of filters provided to respectively face the plurality of light sensing cells to filter light of different wavelengths, and 
 a fence structure configured to separate the plurality of filters from each other, 
   wherein a width of the fence structure interposed between two adjacent filters, among the plurality of filters, has a plurality of different values according to a characteristics of each of the two adjacent filters, and   wherein a difference between a maximum value and a minimum value among the plurality of values is equal to or greater than 20 nm.   
     
     
         2 . The image sensor of  claim 1 , wherein the fence structure comprises a material having a first refractive index lower than a second refractive index of each of the plurality of filters. 
     
     
         3 . The image sensor of  claim 1 , wherein the plurality of filters comprise a red filter, a first green filter, a second green filter, and a blue filter arranged in a Bayer pattern. 
     
     
         4 . The image sensor of  claim 3 , wherein the fence structure has a first width between the red filter and the first green filter and a second width between the first green filter and the blue filter, the first width being greater than the second width. 
     
     
         5 . The image sensor of  claim 3 , wherein the fence structure has a third width between the red filter and the second green filter and a fourth width between the second green filter and the blue filter, the third width being greater than the fourth width. 
     
     
         6 . The image sensor of  claim 3 ,
 wherein a distance between centers of pixels adjacent to each other among a plurality of pixels is equal to or less than 0.6 μm, and   wherein the fence structure has two widths in a range from 50 nm to 200 nm.   
     
     
         7 . The image sensor of  claim 3 , wherein the first green filter and the second green filter have a first area smaller than a second area of the blue filter and greater than a third area of the red filter. 
     
     
         8 . The image sensor of  claim 3 , wherein the sensor substrate comprises an isolation structure configured to electrically separate the plurality of light sensing cells and arranged corresponding to the fence structure. 
     
     
         9 . The image sensor of  claim 8 , wherein a width of the isolation structure varies according to a type of a filter facing two adjacent light sensing cells, between which the isolation structure is interposed. 
     
     
         10 . The image sensor of  claim 8 ,
 wherein the plurality of light sensing cells comprise a red pixel, a first green pixel, a second green pixel, and a blue pixel facing the red filter, the first green filter, the second green filter, and the blue filter, respectively, and   wherein a first width of the isolation structure between the red pixel and the first green pixel is less than a second width of the isolation structure between the first green pixel and the blue pixel.   
     
     
         11 . The image sensor of  claim 10 , wherein a third width of the isolation structure between the red pixel and the second green pixel is less than a fourth width of the isolation structure between the second green pixel and the blue pixel. 
     
     
         12 . The image sensor of  claim 11 ,
 wherein the first green filter and the second green filter have a first area greater than a second area of the red pixel, and   wherein the second area of the red pixel is greater than a third area of the blue pixel.   
     
     
         13 . The image sensor of  claim 9 ,
 wherein a distance between centers of pixels adjacent to each other among a plurality of pixels is equal to or less than 0.6 μm, and   wherein the isolation structure has two widths in a range from 50 nm to 180 nm.   
     
     
         14 . The image sensor of  claim 8 , wherein the fence structure and the isolation structure are vertically connected to each other. 
     
     
         15 . The image sensor of  claim 1 , wherein the plurality of filters comprise:
 a red filter group comprising four red filters;   a first green filter group comprising four first green filters;   a second green filter group comprising four second green filters; and   a blue filter group comprising four blue filters, and   wherein the red filter group, the first green filter group, the second green filter group, and the blue filter group are arranged in a Bayer pattern.   
     
     
         16 . The image sensor of  claim 15 , wherein a width of the fence structure between filters of a same color is different from a width of the fence structure between filters of different colors. 
     
     
         17 . The image sensor of  claim 15 , wherein widths of the fence structure between filters of a same color are different from each other in two or more filter groups. 
     
     
         18 . The image sensor of  claim 15 , wherein a width of the fence structure between the red filter and the first green filter adjacent to each other between the red filter group and the first green filter group is different from a width of the fence structure between the first green filter and the blue filter adjacent to each other between the first green filter group and the blue filter group. 
     
     
         19 . The image sensor of  claim 15 , wherein the sensor substrate comprises an isolation structure configured to electrically separate the plurality of light sensing cells and face the fence structure. 
     
     
         20 . An electronic device comprising:
 an image sensor configured to convert an optical image into an electrical signal; and   a processor configured to control an operation of the image sensor and process a signal generated by the image sensor,   wherein the image sensor comprises:
 a sensor substrate comprising a plurality of light sensing cells configured to sense light; and 
 a color filter array provided on the sensor substrate, the color filter array comprising:
 a plurality of filters provided to respectively face the plurality of light sensing cells to filter light of different wavelengths, and 
 a fence structure configured to separate the plurality of filters from each other, 
 
 wherein a width of the fence structure interposed between two adjacent filters, among the plurality of filters, has a plurality of different values according to a characteristics of each of the two adjacent filters, and 
 wherein a difference between a maximum value and a minimum value among the plurality of values is equal to or greater than 20 nm.

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