Inertial measurement device

Abstract

An inertial measurement device includes: a first inertial sensor; a first inertial sensor module in which the first inertial sensor is stored in a first package made of resin; a base having a concave portion and made of ceramic; and a lid body. The first inertial sensor module is accommodated in an accommodation space between the base and the lid body and is hermetically sealed.

What is claimed is: 
     
         1 . An inertial measurement device comprising:
 a first inertial sensor;   a first inertial sensor module in which the first inertial sensor is stored in a first package made of resin;   a base having a concave portion and made of ceramic; and   a lid body, wherein   the first inertial sensor module is accommodated in an accommodation space between the base and the lid body and is hermetically sealed.   
     
     
         2 . The inertial measurement device according to  claim 1 , wherein 
 the base and the lid body are bonded to each other by welding.   
     
     
         3 . The inertial measurement device according to  claim 1 , wherein 
 a gettering agent is stored in the accommodation space.   
     
     
         4 . The inertial measurement device according to  claim 1 , wherein 
 an electronic component electrically coupled to the first inertial sensor module is stored in the accommodation space.   
     
     
         5 . The inertial measurement device according to  claim 1 , wherein 
 the first inertial sensor module has a first surface including a plurality of electrode terminals and a second surface which is an opposite-side surface from the first surface,   the concave portion includes an accommodation portion having a placement surface as a bottom portion, and a peripheral edge portion that is one step higher than the placement surface and that surrounds the accommodation portion,   the first inertial sensor module is mounted on the placement surface in a state in which the second surface faces the concave portion,   a coupling terminal corresponding to the electrode terminal is provided in the peripheral edge portion, and   the electrode terminal and the coupling terminal of the peripheral edge portion are coupled to each other by a bonding wire.   
     
     
         6 . The inertial measurement device according to  claim 5 , wherein 
 a plate-shaped spacer is disposed between the second surface of the first inertial sensor module and the placement surface.   
     
     
         7 . The inertial measurement device according to  claim 1 , wherein 
 the first inertial sensor module has a first surface including a plurality of electrode terminals and a second surface which is an opposite-side surface from the first surface,   a plurality of coupling terminals are provided at a placement surface serving as a bottom portion of the concave portion,   the first inertial sensor module is mounted on the placement surface in a state in which the first surface faces the concave portion, and   the electrode terminals and the coupling terminals are coupled to each other by a conductive material.   
     
     
         8 . The inertial measurement device according to  claim 1 , wherein 
 the first inertial sensor module further includes a third inertial sensor configured to detect a physical quantity different from a physical quantity detected by the first inertial sensor, and   the third inertial sensor is stored in the first package together with the first inertial sensor.   
     
     
         9 . The inertial measurement device according to  claim 1 , further comprising:
 a substrate; and   a second inertial sensor module including a second inertial sensor and a second package configured to accommodate the second inertial sensor, wherein   a first inertial measurement device including the inertial measurement device and the second inertial sensor module are mounted on the substrate.   
     
     
         10 . The inertial measurement device according to  claim 9 , wherein 
 the first inertial sensor has a first axis, a second axis, and a third axis that are orthogonal to one another as detection axes, and   the second inertial sensor has the third axis as the detection axis and has detection accuracy higher than detection accuracy of the first inertial sensor.