Method for producing liquid transport apparatus

Abstract

There is provided a method for producing a liquid transport apparatus includes: a pressure chamber plate partially defining a pressure chamber that communicates with a nozzle for ejecting liquid; an insulating ceramics layer located on a surface of the pressure chamber plate to cover the pressure chamber; a piezoelectric layer located on the insulating ceramics layer; and a first electrode located on the piezoelectric layer. The method includes: forming the insulating ceramics layer on the pressure chamber plate by heating an insulating ceramic material; forming the piezoelectric layer and the first electrode on the insulating ceramics layer; forming the piezoelectric layer including annealing the piezoelectric layer at the annealing temperature; and forming the pressure chamber by removing a part of the pressure chamber plate so that a part of the insulating ceramics layer is exposed on the pressure chamber.

What is claimed is: 
     
         1 . A method for producing a liquid transport apparatus which includes:
 a pressure chamber plate partially defining a pressure chamber that communicates with a nozzle for ejecting liquid;   an insulating ceramics layer located on a surface of the pressure chamber plate to cover the pressure chamber;   a piezoelectric layer located on the insulating ceramics layer; and   a first electrode located on the piezoelectric layer,   the method comprises:   forming the insulating ceramics layer on the pressure chamber plate by heating an insulating ceramic material;   forming the piezoelectric layer and the first electrode on the insulating ceramics layer;   forming the piezoelectric layer including annealing the piezoelectric layer at the annealing temperature; and   forming the pressure chamber by removing a part of the pressure chamber plate so that a part of the insulating ceramics layer is exposed on the pressure chamber.   
     
     
         2 . The method for producing the liquid transport apparatus according to  claim 1 , wherein
 in a case that the insulating ceramics layer is formed on the pressure chamber plate, a temperature of the insulating ceramic material does not become higher than an annealing temperature of the piezoelectric layer.   
     
     
         3 . The method for producing the liquid transport apparatus according to  claim 1 , wherein
 in a case that the first electrode is formed on the insulating ceramic layer after the annealing of the piezoelectric layer at the annealing temperature, the first electrode is heated at a temperature lower than the annealing temperature after annealing the piezoelectric layer at the annealing temperature.   
     
     
         4 . The method for producing the liquid transport apparatus according to  claim 1 , wherein the piezoelectric layer is formed by an aerosol deposition method. 
     
     
         5 . The method for producing the liquid transport apparatus according to  claim 1 , wherein the insulating ceramics layer is formed by an aerosol deposition method. 
     
     
         6 . The method for producing the liquid transport apparatus according to  claim 1 , wherein the insulating ceramic layer is formed of zirconia. 
     
     
         7 . The method for producing the liquid transport apparatus according to  claim 1 , wherein the insulating ceramic layer is formed of alumina. 
     
     
         8 . The method for producing the liquid transport apparatus according to  claim 1 , wherein
 the pressure chamber plate, the insulating ceramics layer, the piezoelectric layer, and the first electrode are stacked in layers in a stacking direction,   the piezoelectric layer is located between the first electrode and the insulating ceramics layer in the stacking direction, and   the method further comprises forming a second electrode such that the second electrode is located between the piezoelectric layer and the insulating ceramics layer in the stacking direction.