Integrated circuit devices with non-collapsed fins and methods of treating the fins to prevent fin collapse

Abstract

An integrated circuit device with a substrate and a plurality of fins is provided where fin width is less than 11 nanometers, fin height is greater than 155 nanometers and spacing between any two neighboring fins is less than 30 nanometers and each fin is in non-collapsed state. An integrated circuit device with a substrate and a plurality of fins is provided where fin width is less than 15 nanometers, fin height is greater than 190 nanometers and spacing between any two neighboring fins is less than 30 nanometers and each fin is in non-collapsed state. A method for forming a fin-based transistor structure is provided where a plurality of fins on a substrate are pre-treated with at least one of a self-assembled monolayer, a non-polar solvent, and a surfactant. One or more of these treatments is to reduce adhesion and/or cohesive forces to prevent occurrence of fin collapse.

1 . An integrated circuit device, comprising:
 a substrate;   a first fin and a second fin extending from the substrate, wherein each of the first and second fins includes a lower portion and an upper portion; and   isolation material adjacent at least the lower portions of the first and second fins;   wherein each of the first and second fins is in a non-collapsed state,   wherein a horizontal width of each of the first and second fins is a distance between sidewall surfaces of the fin at the bottom of the upper portion of the fin, the horizontal width of the first and second fins is less than 11 nm,   wherein a vertical total height, for each of the first and second fins, is a sum of a first height of the lower portion of the fin and a second height of the upper portion of the fin, the vertical total height each of the first and second fins is greater than 200 nm, and   wherein a horizontal spacing between the first and second fins is less than 53 nm as measured between respective sidewall surfaces of the first and second fins at the respective bottoms of the upper portions of the first and second fins.   
     
     
         2 .- 20 . (canceled)