Fluid handling device and fluid handling system

Abstract

The present invention relates to a fluid handling device which can prevent an inclination of a rotary member. The fluid handling device includes a substrate; an arc-shaped groove having a central angle more than 180° disposed on the substrate; a first protrusion located between both ends of the groove in the same circumference as the arc-shaped groove; a second protrusion disposed in the groove; and a film joined on the substrate so as to cover the groove, the first protrusion and the second protrusion. The groove closed by the film functions as a rotary membrane pump.

1 . A fluid handling device comprising:
 a substrate;   an arc-shaped groove having a central angle more than 180° disposed on the substrate;   a first protrusion located between both ends of the groove in the same circumference as the arc-shaped groove;   a second protrusion disposed in the groove; and   a film joined on the substrate so as to cover the groove, the first protrusion and the second protrusion,   wherein the groove closed by the film functions as a rotary membrane pump.   
     
     
         2 . The fluid handling device according to  claim 1 , wherein, in the direction of the circumference, the length of the first protrusion is substantially the same as the length of the second protrusion. 
     
     
         3 . The fluid handling device according to  claim 1 , wherein the height of the second protrusion from the bottom of the groove is equal to or less than the height of the first protrusion from the bottom of the groove. 
     
     
         4 . The fluid handling device according to  claim 3 , wherein the height of the second protrusion from the bottom of the groove is less than the height of the first protrusion from the bottom of the groove. 
     
     
         5 . The fluid handling device according to  claim 1 , wherein, the first protrusion and the second protrusion are arranged at equal intervals on the circumference 
     
     
         6 . A fluid handling system comprising:
 the fluid handling device according to  claim 1 ; and   a rotary member for pressing the rotary membrane pump of the fluid handling device.