Integrated handling system for semiconductor articles

Abstract

Methods and apparatuses for integrated cleaning of objects comprising a sequence of wet cleaning and vacuum drying in a same process chamber. The present integrated cleaning process can eliminate moving parts, improving the system reliability. Vacuum decontamination can be included for degassing and decontaminating the cleaned objects. In an embodiment, a cleaner system combines various movements into an integrated movement to be handled by a robot, for example, to improve the throughput. For example, an integrated robot movement comprising picking up a closed container from the input load port, moving both the lid and body together, and then depositing the body and lid separately into the appropriate positions in the cleaner to be cleaned.

1 . An apparatus for transferring articles comprising multiple portions, the apparatus compnmg:
 a transferring mechanism for holding an article and for transferring the article between a first station and a second station,   wherein the transferring mechanism accepts the article from the first station or delivers the article to the first station;   a portion transfer mechanism for transferring individual portions of the article to or from separate locations of the second station,   wherein the apparatus detaches the multiple portions during transferring from the first station to the second station or attaches the multiple portions during transfer from the second station to the first station.   
     
     
         2 . An apparatus as in  claim 1  further comprising: an access mechanism for locking or unlocking the multiple portions of the article. 
     
     
         3 . A cleaner system for cleaning containers, each container comprising at least a container body and a container lid, the system comprising:
 one or more load ports for holding a container;   a cleaning chamber for cleaning the container in separated configuration, wherein the container body and lid are detached and disposed in separate locations in the cleaning chamber;   a transfer mechanism for transfer the container between a load port of the one or more load ports and the cleaning chamber, wherein the transfer mechanism transfers the container with the body and lid in assembled   configuration at the load ports and transfers the container with the body   and lid in disassembled and separated configuration at the cleaning chamber, and   wherein the transfer mechanism assembles or disassembles the body and the lid on-the-fly during transferring.   
     
     
         4 . A cleaner system as in  claim 3  wherein the transfer mechanism comprises one of a locking mechanism for locking the body and lid together and an unlocking mechanism for unlocking the body and lid. 
     
     
         5 . A cleaner system as in  claim 3  wherein the transfer mechanism comprises a portion transfer mechanism for sequentially or parallely delivering the body and the lid into separate locations in the cleaning chamber. 
     
     
         6 . A cleaner system as in  claim 3  wherein the transfer mechanism comprises a portion transfer mechanism for sequentially or parallely accepting the body and the lid from separate locations in the cleaning chamber. 
     
     
         7 - 20 . (canceled)