US2023060205A1PendingUtilityA1

Method and apparatus for detection of particle size in a fluid

Assignee: APPLIED MATERIALS INCPriority: May 27, 2020Filed: Aug 15, 2022Published: Mar 2, 2023
Est. expiryMay 27, 2040(~13.8 yrs left)· nominal 20-yr term from priority
G01N 2015/1438G01N 15/0227G01N 15/1434G01N 2015/0053G01N 2015/0046G01N 2015/0238G01N 2015/1493G01N 15/1459
74
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Claims

Abstract

Examples disclosed herein generally relate to systems and methods for detecting the size of a particle in a fluid. In one example, a system for imaging a particle includes a first imaging device. The first imaging device includes a lens and a digital detector. The system further includes a laser source. He laser source is configured to emit a first laser beam and a second laser beam. The digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens. The accumulated light is scattered from the particle. The accumulated light includes light from the first laser beam and the second laser beam.

Claims

exact text as granted — not AI-modified
What we claim is: 
     
         1 . A system for imaging a particle, comprising:
 a first imaging device comprising:
 a lens; and 
 a digital detector; and 
   a laser source configured to emit a first laser beam and a second laser beam wherein digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens, the accumulated light is refracted from the particle, the accumulated light comprising light from the first laser beam and the second laser beam.   
     
     
         2 . The system for imaging a particle as recited in  claim 1 , comprising:
 a laser terminator disposed in a path of the first laser beam and a path of the second laser beam, the laser terminator configured to interrupt the paths of the first and second laser beams.   
     
     
         3 . The system for imaging a particle as recited in  claim 1 , comprising:
 an encapsulating section having an inlet for receiving the particle and an outlet for allowing the particle to exit the encapsulating section through the outlet.   
     
     
         4 . The system for imaging a particle as recited in  claim 3 , comprising:
 a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam.   
     
     
         5 . The system for imaging a particle as recited in  claim 3 , comprising:
 a beam displacer inside the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam.   
     
     
         6 . The system for imaging a particle as recited in  claim 3 , comprising:
 a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam; and   a focusing lens disposed between the laser source and the encapsulating section.   
     
     
         7 . The system for imaging a particle as recited in  claim 6 , wherein the focusing lens is configured to cause the second laser beam to polarize about 90 degrees from the first laser beam. 
     
     
         8 . The system for imaging a particle as recited in  claim 1 , wherein the second laser beam is displaced from the direction of the first beam, and the second laser beam is polarized at about 90 degrees with respect to the polarization of the first beam by a beam displacer. 
     
     
         9 . The system for imaging a particle as recited in  claim 1 , comprising:
 an encapsulating section configured to receive the first laser beam and the second laser beam;   a first reflector configured to reflect the first laser beam; and   a laser terminator configured to interrupt a path of the second laser beam.   
     
     
         10 . The system for imaging a particle as recited in  claim 1 , comprising:
 an encapsulating section configured to receive the first laser beam and the second laser beam; and   a laser terminator configured to interrupt a path of the first laser beam and the second laser beam.   
     
     
         11 . The system for imaging a particle as recited in  claim 1 , comprising:
 an encapsulating section configured to receive the first laser beam and the second laser beam;   a beam displacer configured to displace the first laser beam from the second laser beam; and   a laser terminator configured to interrupt a path of the second laser beam.   
     
     
         12 . The system for imaging a particle as recited in  claim 1 , comprising:
 a beam displacer configured generate and to displace the first laser beam from the second laser beam; wherein a polarization of the second laser beam is rotated by about 90 degrees with respect to that of the first laser beam displacer.   
     
     
         13 . A particle imaging system, comprising:
 a first imaging device including:
 a lens; and 
 a digital detector; 
   an encapsulating section including an inlet configured to receive particles and an outlet configure to allow particles to exit the encapsulating section; and   a laser source configured to emit a first laser beam and a second laser beam, wherein the digital detector is configured to accumulate a metric of an intensity of an accumulated light that passes through the lens, the accumulated light is scattered from the particle and containing light from the first laser beam and the second laser beam.   
     
     
         14 . The particle imaging system as recited in  claim 13 , comprising:
 a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam.   
     
     
         15 . The particle imaging system as recited in  claim 13 , comprising:
 a beam displacer disposed inside the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam.   
     
     
         16 . The particle imaging system as recited in  claim 13 , comprising:
 a beam displacer disposed between the laser source and the encapsulating section, the beam displacer configured to displace the first laser beam from the second laser beam; and   a focusing lens disposed between the laser source and the encapsulating section.   
     
     
         17 . The particle imaging system as recited in  claim 1 , wherein the second laser beam is polarized by about 90 degrees from the first laser beam. 
     
     
         18 . A method of determining particle size, comprising:
 emitting a first laser beam and a second laser beam from a laser source;   separating the second laser beam from the first laser beam by a distance; and   passing the first laser beam through an encapsulating section, the encapsulating section configured to allow a particle to flow therethrough;   accumulating a first metric of a first intensity of a first light that passes through a lens of an imaging device, the first light scattered from a particle that passes through the first laser beam;   accumulating a second metric of a second intensity of a second light that passes through the lens of the imaging device, the second light scattered from the particle that passes through the second laser beam; and   classifying a particle size based upon the first metric and the second metric.   
     
     
         19 . The method of determining particle size according to  claim 18 , further comprising:
 polarizing the second laser beam by about 90 degrees from the first laser beam.   
     
     
         20 . The method of determining particle size according to  claim 18 , further comprising:
 displacing the second laser beam a distance from the first laser beam upon passing the first laser beam through a beam displacer.

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